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Molybdenum-silver laminar composite material and preparation method and application thereof

A composite material, silver layer technology, applied in metal material coating process, coating, ion implantation plating and other directions, can solve the problems of natural environment and human health damage, interconnection chip performance damage, increase pollution control costs and other problems, Achieve excellent anti-oxidative corrosion and thermal fatigue resistance, solve the effect of non-dense coating, good economic and social benefits

Active Publication Date: 2020-03-10
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the electroplating process needs to go through multiple high-temperature heat treatment processes, which is very cumbersome and complicated, and the strength is still insufficient.
Furthermore, the electroplated silver layer has its own defects. Usually, the electroplated coating has a columnar crystal structure with poor compactness, and there are vacancies and defects inside. In the low earth orbit environment, atomic oxygen can pass through these defects of the coating material. Entering into the interior to corrode it, such a long and slow atomic oxygen attack can still cause serious damage to the performance of the interconnect
In addition, the wastewater, waste gas and waste residue generated during the electroplating process will cause damage to the natural environment and human health, and also increase the cost of pollution control for enterprises

Method used

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  • Molybdenum-silver laminar composite material and preparation method and application thereof
  • Molybdenum-silver laminar composite material and preparation method and application thereof
  • Molybdenum-silver laminar composite material and preparation method and application thereof

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preparation example Construction

[0029] As an aspect of the technical solution of the present invention, it relates to a method for preparing a molybdenum-silver layered composite material (also called a silver / metal intermediate layer / molybdenum layered composite material), which includes:

[0030] At least placing a molybdenum substrate and a metal target with good solid solubility with molybdenum in a vacuum environment, and depositing a metal intermediate layer on the surface of the molybdenum substrate by a DC magnetron sputtering method;

[0031] At least placing the molybdenum substrate and the metal silver target material with the metal intermediate layer formed on the surface into a vacuum environment, and depositing a silver layer on the surface of the metal intermediate layer by a DC magnetron sputtering method; and

[0032] The obtained molybdenum substrate-metal intermediate layer-silver layer composite structure is annealed, so that the metal elements constituting the metal intermediate layer continuous...

Embodiment 1

[0082] (1) Mo foil pretreatment

[0083] After the molybdenum foil with a size of 50mm×50mm×0.02mm is polished with sandpaper, it is soaked in a degreasing solution (NaOH: Na 2 CO 3 : Na 2 SiO 3 = 3:2:1 mixed solution) degreasing treatment. After degreasing, rinse the surface of the Mo foil with a large amount of deionized water. Place Mo foil in 10% H 2 SO 4 Etch in the solution for 10 minutes, take it out and rinse with deionized water, then place it in deionized water for ultrasonic cleaning for 20 minutes, take it out and dry it for later use.

[0084] (2) Magnetron sputtering deposited Cr intermediate layer

[0085] Place the Mo foil processed in step (1) in a vacuum coating chamber. Using metal Cr with a purity of 99.99% as the target and high-purity Ar as the working gas, pre-evacuated to 5×10 -3 Below Pa, after 30 minutes of plasma cleaning treatment, turn on the pulse DC power supply of the Cr target, and deposit the Cr intermediate layer on the surface of the Mo foil. Th...

Embodiment 2

[0097] In this embodiment, the substrate is exactly the same as that in Example 1. A Cr intermediate layer and an Ag layer are sequentially deposited on the surface of the substrate to prepare a Mo / Cr / Ag layered composite material. The preparation method is as follows:

[0098] (1) Same as step (1) in Example 1;

[0099] (2) Magnetron sputtering deposited Cr intermediate layer

[0100] Place the Mo foil processed in step (1) in a vacuum coating chamber. Using metal Cr with a purity of 99.99% as the target and high-purity Ar as the working gas, pre-evacuated to 5×10 -3 Below Pa, after 30 minutes of plasma cleaning treatment, turn on the pulse DC power supply of the Cr target, and deposit the Cr intermediate layer on the surface of the Mo foil. The Cr target sputtering power was 500W, the bias voltage was -85V, the working pressure was 0.5Pa, and the deposition time was 10min. A Cr layer (hereinafter referred to as Mo / Cr composite material) was deposited on the surface of the Mo foil....

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Abstract

The invention discloses a molybdenum-silver laminar composite material and a preparation method and application of the molybdenum-silver laminar composite material. The preparation method includes thesteps that at least a molybdenum base material and a metal target having good solid solubility with molybdenum are placed in a vacuum environment, and a metal intermediate layer is formed on the surface of the molybdenum base material through deposition with a direct-current magnetron sputtering method; at least the molybdenum base material with the metal intermediate layer formed on the surfaceand the metal silver target are placed in a vacuum environment, and a silver layer is formed on the surface of the metal intermediate layer through deposition with the direct-current magnetron sputtering method; and an obtained molybdenum base material-metal intermediate layer-silver layer composite structure is annealed, so that metal elements constituting the metal intermediate layer are continuously diffused into the molybdenum base material and the silver layer. By means of the preparation method, the silver / metal intermediate layer / molybdenum laminar composite material can be successfullyprepared, and the preparation method is environmentally friendly, high in process stability and capable of realizing large-scale production; and besides, the obtained molybdenum-silver laminar composite material is high in density, excellent in bonding strength and excellent in oxidative corrosion resistance and thermal fatigue resistance.

Description

Technical field [0001] The invention relates to a preparation method of a molybdenum-silver layered composite material, in particular to a silver film / metal intermediate layer / molybdenum composite material and a preparation method and application thereof, belonging to the technical field of composite materials. Background technique [0002] The antigenic oxygen and thermal fatigue performance of the space solar array interconnecting sheet material directly affect the high reliability, long-life and safe operation of the low-orbit spacecraft solar array. Because molybdenum has excellent electrical conductivity, excellent heat resistance, high temperature mechanical properties, low thermal expansion coefficient and high thermal conductivity, it has become a natural choice for thermal shock and thermal fatigue. In addition, the reaction rate of molybdenum with atomic oxygen is almost zero, that is, molybdenum is not affected by atomic oxygen corrosion. Because of these characterist...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/16C23C14/58H01L31/05
CPCC23C14/35C23C14/3485C23C14/345C23C14/165C23C14/5806H01L31/0512Y02E10/50
Inventor 姜欣赵大强张学东蒲吉斌王立平
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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