Internal heating evaporation boat with composite ceramic coating and preparation method thereof

A composite ceramic and internal heating technology, which is applied in coating, vacuum evaporation plating, metal material coating process, etc., can solve the problems of becoming brittle, easy to break, and lower melting point, and achieve low porosity, tight bonding, and reduced The effect of manufacturing production costs

Active Publication Date: 2018-04-13
FUZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In practical application, the metal evaporation boat will become brittle and easy to break after heating, especially in high vacuum, it will infiltrate with high-temperature molten metal (such as Ni, Al) to alloy and reduce the melting point of the entire material, resulting in a metal boat with a service life of nearly one time. sex
For a long time, many researchers have published many patents in order to improve the corrosion resistance, mechanical properties and service life of metal evaporation boats. Most of them focus on the design of different material components of boron nitride synthetic conductive ceramic evaporation boats. The other part focuses on the transformation design of the structure and shape of the evaporation boat, and there is almost no direct surface modification or surface protection for the metal evaporation boat.

Method used

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  • Internal heating evaporation boat with composite ceramic coating and preparation method thereof
  • Internal heating evaporation boat with composite ceramic coating and preparation method thereof
  • Internal heating evaporation boat with composite ceramic coating and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Preparation of Al by an Atmospheric Plasma Spraying Technology 2 o 3 -8YSZ adopts plasma spraying corrosion-resistant coating, including the following steps:

[0029] (1) Machining: Use high-purity tungsten to make a square tungsten boat with a thickness of 1mm and a length of 10cm as the base material ( figure 2 );

[0030] (2) Substrate surface treatment: Electrolytic corrosion polishing is carried out on the machined tungsten boat, then rough grinding is carried out with silicon carbide sandpaper, and then the surface coating treatment is carried out on the non-sprayed parts, and finally sandblasting is carried out for roughening. Enhance the mechanical bond between the spray powder and the substrate.

[0031] The electrolytic polishing mainly uses 3wt% sodium hydroxide aqueous solution, and the voltage is 6v to polish for 10 minutes. The sandblasting mainly adopts the GP-1 dry sandblasting machine produced by Beijing Changkong Sandblasting Equipment Co., Ltd., an...

Embodiment 2

[0037] Preparation of Al by an Atmospheric Plasma Spraying Technology 2 o 3 -8YSZ adopts plasma spraying corrosion-resistant coating, including the following steps:

[0038] (1) Machining: Use high-purity tungsten to make a square tungsten boat with a thickness of 1mm and a length of 10cm as the base material ( figure 2 );

[0039] (2) Substrate surface treatment: Electrolytic corrosion polishing is carried out on the machined tungsten boat, then rough grinding is carried out with silicon carbide sandpaper, and then the surface coating treatment is carried out on the non-sprayed parts, and finally sandblasting is carried out for roughening. Enhance the mechanical bond between the spray powder and the substrate.

[0040] The electrolytic polishing mainly uses 3wt% sodium hydroxide aqueous solution, and the voltage is 6v to polish for 10 minutes. The sandblasting mainly adopts the GP-1 dry sandblasting machine produced by Beijing Changkong Sandblasting Equipment Co., Ltd., an...

Embodiment 3

[0046] Preparation of Al by an Atmospheric Plasma Spraying Technology 2 o 3 -8YSZ adopts plasma spraying corrosion-resistant coating, including the following steps:

[0047] (1) Machining: Use high-purity tungsten to make a square tungsten boat with a thickness of 1mm and a length of 10cm as the base material ( figure 2 );

[0048] (2) Substrate surface treatment: Electrolytic corrosion polishing is carried out on the machined tungsten boat, then rough grinding is carried out with silicon carbide sandpaper, and then the surface coating treatment is carried out on the non-sprayed parts, and finally sandblasting is carried out for roughening. Enhance the mechanical bond between the spray powder and the substrate.

[0049] The electrolytic polishing mainly uses 3wt% sodium hydroxide aqueous solution, and the voltage is 6v to polish for 10 minutes. The sandblasting mainly adopts the GP-1 dry sandblasting machine produced by Beijing Changkong Sandblasting Equipment Co., Ltd., an...

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Abstract

The invention discloses an internal heating evaporation boat with a molten-aluminum-corrosion-resistant composite ceramic coating and a preparation method thereof. A plasma spraying method process isadopted on a surface of a high-purity tungsten boat so as to prepare an Al2O3-8YSZ ceramic layer with a composition structure with the thickness being 0.5 to 0.8mm. Aluminum oxide and yttria-stabilized zirconia powder are weighed and mixed according to different mass ratios (10 to 55 percent by weight of Al2O3: 90 to 45 percent by weight of 8YSZ) to obtain a uniform spraying material. A plasma spraying technology is characterized in that a plasma arc is adopted as a heat source, ceramics, alloys, metals and other materials are heated to a melt or half-melt state, and Al2O3-8YSZ composite powder can be fully melted and sprayed to a surface of a workpiece at a high speed so as to form a surface protection coating firm to attach.

Description

technical field [0001] The invention relates to the field of vacuum coating technology, in particular to a method of depositing Al on a tungsten evaporation boat substrate by using plasma spraying technology. 2 o 3 -Preparation method of 8YSZ composite coating. Background technique [0002] Resistance heating evaporation source is widely used in the field of vacuum coating because of its simple structure, convenient installation and low price. It is often used in vacuum evaporation packaging materials, capacitor metallization coating, display Plating and aluminum plating of paper and textiles, etc., the main evaporation film materials are aluminum wire, copper, silver, gold, etc. As a device for containing low melting point metal film materials (such as aluminum wire, aluminum sheet, aluminum particles, copper wire, silver wire, etc.), it has high temperature resistance, metal melt corrosion resistance, and conducts heat under high vacuum conditions. The film material is ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/26C23C4/134C23C4/11
CPCC23C4/11C23C4/134C23C14/243C23C14/26
Inventor 李强谈耀宏郑钦龙何柯
Owner FUZHOU UNIV
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