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Titanium-aluminum-silver-nitride nano composite coating and preparation method thereof

A nano-composite coating, titanium-aluminum-nitrogen technology, applied in the coating, metal material coating process, ion implantation plating and other directions, can solve the problem of interface modulation can not improve wear resistance, low, etc., to suppress excessive wear, Maintaining high hardness and relieving frictional heat generation

Inactive Publication Date: 2014-05-07
CHINA WEAPON SCI ACADEMY NINGBO BRANCH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If its low friction coefficient is related to the interlayer bonding force and the wear mode of peeling off layer by layer (see Patent 1 and Document 1), then the interface modulation cannot improve the wear resistance, or even the opposite; secondly, the TiAlN layer alternately The cutting performance corresponding to TiN, TiAlCN, VCN and other laminates is not higher than that of TiAlN coating

Method used

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  • Titanium-aluminum-silver-nitride nano composite coating and preparation method thereof
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  • Titanium-aluminum-silver-nitride nano composite coating and preparation method thereof

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specific Embodiment 1

[0042] A titanium-aluminum-silver-nitrogen nanocomposite coating, which adopts a magnetron sputtering deposition method, includes the following implementation steps: step 1, put the metal or alloy substrate into the cavity of the coating equipment and then evacuate to 2.5×10 -3 Pa, then turn on the heating power supply to heat the metal or alloy substrate to 350°C and stabilize it, and then use a mass flow meter to controllably feed Ar (argon gas) into the vacuum chamber of the coating equipment to maintain a vacuum pressure of 0.25Pa; Step 2 , set the sample stage to start rotating at an angular speed of 5 rpm, and turn on the base bias voltage to 500V, then turn on the chromium target starter power supply at 0.03A / dm 2 The current density of sputtering for 30min; then within 5min, the bias voltage is linearly reduced to 45V according to time, and the current density of the chromium target is linearly increased to 2A / dm within 5min. 2 , and keep it for 10min; step 3, use a ma...

specific Embodiment 2

[0047] A titanium-aluminum-silver-nitrogen nanocomposite coating, which adopts a magnetron sputtering deposition method, includes the following implementation steps: step 1, put the metal or alloy substrate into the cavity of the coating equipment and then evacuate to 2.5×10 -3 Pa, then turn on the heating power supply to heat the metal or alloy substrate to 400°C and stabilize it, and then use a mass flow meter to controllably feed Ar (argon gas) into the vacuum chamber of the coating equipment to maintain a vacuum pressure of 0.25Pa; Step 2 , set the sample stage to start rotating at an angular speed of 5 rpm, and turn on the base bias voltage to 500V, then turn on the chromium target starter power supply at 0.03A / dm 2 The current density of sputtering for 30min; then within 5min, the bias voltage is linearly reduced to 45V according to time, and the current density of the chromium target is linearly increased to 2A / dm within 5min. 2 , and keep it for 20min; step 3, use a ma...

specific Embodiment 3

[0052] A titanium-aluminum-silver-nitrogen nanocomposite coating, which adopts a magnetron sputtering deposition method, includes the following implementation steps: step 1, put the metal or alloy substrate into the cavity of the coating equipment and then evacuate to 2.5×10 -3 Pa, then turn on the heating power supply to heat the metal or alloy substrate to 450°C and stabilize it, and then use a mass flow meter to controllably feed Ar (argon gas) into the vacuum chamber of the coating equipment to maintain a vacuum pressure of 0.25Pa; Step 2 , set the sample stage to start rotating at an angular speed of 5 rpm, and turn on the base bias voltage to 500V, then turn on the chromium target starter power supply at 0.03A / dm 2 The current density of sputtering for 30min; then within 5min, the bias voltage is linearly reduced to 45V according to time, and the current density of the chromium target is linearly increased to 2A / dm within 5min. 2 , and keep it for 20min; step 3, use a ma...

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Abstract

The invention provides a titanium-aluminum-silver-nitride nano composite coating and a preparation method thereof. The titanium-aluminum-silver-nitride nano composite coating is characterized by mainly comprising titanium-aluminum-nitrogen nanocrystal particles with the particle diameter of 8-33 nm and silver distributed between crystal boundaries of the titanium-aluminum-nitrogen nanocrystal particles, and comprises 3-8 at.% of silver, 45-50 at.% of nitrogen and the balance of titanium and aluminum. The preparation method comprises the following steps: step 1, vacuumizing after metal or an alloy substrate is packed into a cavity of coating equipment, heating, stabilizing, and introducing Ar; step 2, enabling a sample table to rotate, starting substrate voltage bias, and then starting a chrome target starting power supply for sputtering; step 3, introducing N2, and linearly increasing the flow of the N2 according to time to control the flow ratio of Ar / N2; step 4, starting a titanium-aluminum target starting power supply, quickly increasing the density of titanium-aluminum target current, and simultaneously increasing the density of silver target current; step 5, sequentially turning off the titanium-aluminum target, the silver target and a substrate heating power supply, and closing the introduction of the N2; step 6, taking out a coated sample. The titanium-aluminum-silver-nitride nano composite coating has higher hardness and higher fracture toughness, and is smaller in friction coefficient and lower in wear rate at the environment with the temperature of 400-600 DEG C.

Description

technical field [0001] The invention belongs to surface engineering technology, in particular to a titanium-aluminum-silver-nitrogen nanocomposite coating for material surface wear protection and a preparation method thereof. Background technique [0002] During the non-lubricated cutting process, the tool coating produces a sharply fluctuating temperature field and stress field, torturing the comprehensive properties of the surface coating such as adhesion, hardness, load bearing, and thermal stability. The vacuum-deposited titanium-aluminum-nitrogen coating has strong oxidation resistance and high red hardness, and is often used as a surface coating for high-speed steel and cemented carbide tools. However, the requirements of modern industry for machining efficiency and machining quality are constantly improving, and the performance of cutting tools limited by the toughness, oxidation resistance and friction coefficient of a single titanium-aluminum-nitrogen coating cannot...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/34
Inventor 洪春福刘智勇杨润田钱坤明
Owner CHINA WEAPON SCI ACADEMY NINGBO BRANCH
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