The invention relates to a sensing method and a device for micro inner
cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation, belonging to the technical filed oThe invention relates to a sensing method and a device for micro inner
cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation, belonging to the technical filed oe, easy
miniaturization, large
measured depth-
diameter ratio, simple
system structure, good real-time performance, easy practical application, and has obvious advantages for carrying out the quick ande, easy
miniaturization, large
measured depth-
diameter ratio, simple
system structure, good real-time performance, easy practical application, and has obvious advantages for carrying out the quick andultra-precise measurement and calibration for the inner cavity micro-size and the three-dimensional coordinate. Especially, the top of the resolution capability can reach the deep sub-nanometer magni ultra-precise measurement and calibration for the inner cavity micro-size and the three-dimensional coordinate. Especially, the top of the resolution capability can reach the deep sub-nanometer magnitude, and an
absolute zero position exists in the three-dimensional measurement direction.tude, and an
absolute zero position exists in the three-dimensional measurement direction.f precise instrument manufacture and measurement, in particular to a sensing method and a device for micro and complex inner
cavity size and three-dimensional coordinate in the filed of sub-macroscopyf precise instrument manufacture and measurement, in particular to a sensing method and a device for micro and complex inner cavity size and three-dimensional coordinate in the filed of sub-macroscopy, which is especially suitable for the three-dimensional detection of blind holes with large depth-
diameter ratio. The device combines a micro spherical biconvex lens and an
optical fiber probe measur, which is especially suitable for the three-dimensional detection of blind holes with large depth-
diameter ratio. The device combines a micro spherical biconvex lens and an
optical fiber probe measuring rod, and establishes a
point light two-dimensional micro-focus collimation imaging light path by using the micro spherical biconvex lens, thereby realizing the
high magnification and the sensing fing rod, and establishes a
point light two-dimensional micro-focus collimation imaging light path by using the micro spherical biconvex lens, thereby realizing the
high magnification and the sensing for the three-dimensional displacement of the
optical fiber probe measuring rod by utilizing the light path. The invention has the characteristics of small measured force of a single optical
fiber probor the three-dimensional displacement of the
optical fiber probe measuring rod by utilizing the light path. The invention has the characteristics of small measured force of a single optical
fiber prob