35results about How to "Small measuring force" patented technology

The invention discloses a variable-rigidity parallel flexible constraint micro-nano probe, which comprises an annular outer shell, wherein the top part of the outer shell is provided with an upper end cover, an object carrier is hoisted at the inner center of the upper end cover, the bottom part of the outer shell is connected with a variable-rigidity parallel flexible constraint mechanism through an outer shell bearing platform, the center of one side (away from the upper end cover) of the variable-rigidity parallel flexible constraint mechanism is provided with a test rod, and the end part of one end (away from a mobile platform) of the test rod is provided with a test ball. The variable-rigidity parallel flexible constraint micro-nano probe can change the transverse rigidity of the flexible constraint mechanism according to requirements of a measured object and working process, so as to satisfy the requirement for measurement.

The invention discloses a device for micro-displacement direction conversion, which belongs to the technical field of precision mechanical measurement and is used for the conversion of micro-displacement so as to be able to measure accurately. It is characterized in that the device is mainly composed of a measuring head, a cross spring leaf, a transmission lever and a sensor. The measuring head is installed on the transmission lever and is used to measure the small displacement in the X direction. The transmission lever is fixed on the support through the cross spring leaf, and the sensor is located on the right side of the transmission lever. When the measuring head is displaced in the X direction, the transmission lever can convert the displacement into the Y direction displacement with the intersection point of the cross spring as the fulcrum, and then realize the conversion of the displacement direction and realize accurate measurement. The invention has the beneficial effects of high sensitivity, small measurement force, no gap, simple operation and accurate displacement transmission for a small amount of rotation.

The invention relates to a sensing method and a device for micro inner cavity and two-dimensional coordinate based on one-dimensional micro-focus collimation, belonging to the technical filed of preciThe invention relates to a sensing method and a device for micro inner cavity and two-dimensional coordinate based on one-dimensional micro-focus collimation, belonging to the technical filed of precization, large measured depth-diameter ratio, simple system structure, good real-time performance, easy practical application, and has obvious advantages for carrying out the quick and ultra-precise mezation, large measured depth-diameter ratio, simple system structure, good real-time performance, easy practical application, and has obvious advantages for carrying out the quick and ultra-precise measurement and calibration for the inner cavity micro-size and the two-dimensional coordinate. Especially, the top of the resolution capability can reach the deep sub-nanometer magnitude, and an absoluasurement and calibration for the inner cavity micro-size and the two-dimensional coordinate. Especially, the top of the resolution capability can reach the deep sub-nanometer magnitude, and an absolute zero position exists in the two-dimensional measurement direction.te zero position exists in the two-dimensional measurement direction.se instrument manufacture and measurement, in particular to a sensing method and a device for micro and complex inner cavity structure size and two-dimensional coordinate in the filed of sub-macroscopse instrument manufacture and measurement, in particular to a sensing method and a device for micro and complex inner cavity structure size and two-dimensional coordinate in the filed of sub-macroscopy, which is especially suitable for the measurement of micro-holes with large depth-diameter ratio. By using the structure characteristics of super large curvature and micro-cylindrical lens of an opty, which is especially suitable for the measurement of micro-holes with large depth-diameter ratio. By using the structure characteristics of super large curvature and micro-cylindrical lens of an optical fiber probe measuring rod, a point light source one-dimensional micro-focus collimation imaging light path is established, thereby realizing the high magnification and the sensing of the two-dimeical fiber probe measuring rod, a point light source one-dimensional micro-focus collimation imaging light path is established, thereby realizing the high magnification and the sensing of the two-dimensional displacement of the optical fiber probe measuring rod by utilizing the light path. The invention has the characteristics of small measured force of a single optical fiber probe, easy miniaturinsional displacement of the optical fiber probe measuring rod by utilizing the light path. The invention has the characteristics of small measured force of a single optical fiber probe, easy miniaturi

An exemplary contour measuring probe (10) includes a tip extension (16) and two driving members (13). The tip extension is configured for touching a surface of an object. The driving members are configured for driving the tip extension linearly moving along a first direction. The driving members are tapered and a diameter of each driving member increases along the first direction. The driving members are driven to move by gas pressure acting on an outer side surface thereof.

The invention relates to a sensing method and a device for micro inner cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation, belonging to the technical filed oThe invention relates to a sensing method and a device for micro inner cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation, belonging to the technical filed oe, easy miniaturization, large measured depth-diameter ratio, simple system structure, good real-time performance, easy practical application, and has obvious advantages for carrying out the quick ande, easy miniaturization, large measured depth-diameter ratio, simple system structure, good real-time performance, easy practical application, and has obvious advantages for carrying out the quick andultra-precise measurement and calibration for the inner cavity micro-size and the three-dimensional coordinate. Especially, the top of the resolution capability can reach the deep sub-nanometer magni ultra-precise measurement and calibration for the inner cavity micro-size and the three-dimensional coordinate. Especially, the top of the resolution capability can reach the deep sub-nanometer magnitude, and an absolute zero position exists in the three-dimensional measurement direction.tude, and an absolute zero position exists in the three-dimensional measurement direction.f precise instrument manufacture and measurement, in particular to a sensing method and a device for micro and complex inner cavity size and three-dimensional coordinate in the filed of sub-macroscopyf precise instrument manufacture and measurement, in particular to a sensing method and a device for micro and complex inner cavity size and three-dimensional coordinate in the filed of sub-macroscopy, which is especially suitable for the three-dimensional detection of blind holes with large depth-diameter ratio. The device combines a micro spherical biconvex lens and an optical fiber probe measur, which is especially suitable for the three-dimensional detection of blind holes with large depth-diameter ratio. The device combines a micro spherical biconvex lens and an optical fiber probe measuring rod, and establishes a point light two-dimensional micro-focus collimation imaging light path by using the micro spherical biconvex lens, thereby realizing the high magnification and the sensing fing rod, and establishes a point light two-dimensional micro-focus collimation imaging light path by using the micro spherical biconvex lens, thereby realizing the high magnification and the sensing for the three-dimensional displacement of the optical fiber probe measuring rod by utilizing the light path. The invention has the characteristics of small measured force of a single optical fiber probor the three-dimensional displacement of the optical fiber probe measuring rod by utilizing the light path. The invention has the characteristics of small measured force of a single optical fiber prob

The invention relates to a variable-stiffness contact micro-nano coordinate measuring machine probe which is characterized in that the variable-stiffness contact micro-nano coordinate measuring machine probe comprises elastic sensitive beams, a central connector, a crane-shaped frame, an H-shaped flexible mechanism, a capacitor upper pole plate, a capacitor lower pole plate and a worktable; the inner end of the elastic sensitive beam is fixed to the head part of the crane-shaped frame; the outer end of the elastic sensitive beam is fixed to the inner end of the midpoint of the H-shaped flexible mechanism; the end of the central connector is fixed to the midpoint of the elastic sensitive beam; two sides of the H-shaped flexible mechanism are fixed to the crane-shaped frame; the capacitor upper pole plate is fixed to the lower surface of the end of the central connector; and the capacitor lower pole plate is fixed to the upper end of the worktable. According to the variable-stiffness contact micro-nano coordinate measuring machine probe, through arranging a probe suspension mechanism, probe system stiffness adjustment and compact spatial arrangement structure are realized; through arranging a piezoelectric driver and the elastic sensitive beam, a measuring force in a measuring process is reduced; through arranging the elastic sensitive beams which are uniformly distributed aroundthe axis of the workpiece and the crane-shaped frame, a requirement for mounting symmetry and consistent pressure of the elastic sensitive beam is reduced; and furthermore the variable-stiffness contact micro-nano coordinate measuring machine probe has advantages of simple structure, convenient operation, high economic performance and high practicability.

The invention relates to a PVDF-based tapping-mode high-sensitivity SPM measuring head and a measuring method thereof. The PVDF-based tapping-mode high-sensitivity SPM measuring head is characterized in that a PVDF piezoelectric membrane is taken as a vibrating beam and a tungsten probe is taken as scanning probe; the vibrating beam is set to be a simply supported beam with bended radian; the left end and the right end of the vibrating beam are fixed on front ends of oppositely arranged piezoelectric drivers on both sides through clamping structures respectively; rear ends of the piezoelectric drivers on both sides are fixed on respective cantilever beams respectively; one end of each of the cantilever beams is suspended on a measuring head holder; and the scanning probe is fixed on a center position on the lower surface of the vibrating beam. The measuring method takes the variation of electric charges outputted by the vibrating beam to represent the amplitude variation of the vibrating beam caused by a micrometering force, and performs multipoint micrometering force tapping scanning on a surface to be measured to realize measurement of the surface of a sample. The PVDF-based tapping-mode high-sensitivity SPM measuring head and the measuring method can realize high spatial resolution and low measuring force, are suitable for various materials, and can measure under air environment.

The invention discloses a V-shaped positioning type inner diameter and outer diameter comparison measuring instrument, which belongs to the technical field of measuring instruments. It has a base and a sliding shaft measurement assembly. The cross-sectional shape of the base is an isosceles right triangle or an ordinary isosceles triangle. There is a rectangular slot along the length direction, and a pair of positioning posts are installed symmetrically on both sides of the axis of the rectangular slot at one end of the base table, and the sliding shaft measuring assembly is installed in the rectangular slot, and the sliding shaft measuring assembly includes a sliding shaft , Install the sliding shaft seat and the clamping table sliding seat on the sliding shaft, install the clamping table seat for clamping the indicator table on the clamping table sliding seat, install a fixed measuring head on one end of the sliding shaft, and the upper and lower ends of the sliding shaft have Eyelets for tying knots. Compared with the prior art, the present invention does not need to readjust the position of the positioning contact for the tested pieces with different diameters, it can measure both the inner diameter and the outer diameter, and has good measurement repeatability and high measurement accuracy.

The invention relates the Mikrokator damping oil and preparing method, comprising 40 parts dimethyl silicon oil and 1.8 parts smoke-silica gel. The Mikrokator has the advantages of gapless, zero friction and high sensibility, the core of Mikrokator is damper system, and the core of damper system is damping oil. The product can be used in Mikrokator.

The invention discloses an arbitrarily triangular sensor and a calibration method thereof. The arbitrarily triangular sensor comprises a sensor connector block, a sensor, an adaptor, a measuring rod and a probe, wherein the sensor is arranged on the sensor connector block; the adaptor is pivoted on the sensor connector block through a rotary centre; the measuring rod is arranged on one end of theadaptor, the probe is arranged on one end away from the adaptor; the other end of the adaptor is contacted with the sensor contact; and the line connecting the rotary centre and the sensor contact centre is parallel to the measuring rod and above the measuring rod. The calibration method comprises: mounting the sensor, computing a group of variables H corresponding to the centre of the probe, obtaining a group of calibration values, substituting the calibrated parameter values into a program and re-measuring, verifying the accuracy of the measurement, and eliminating the installation errors. The arbitrarily triangular sensor and the calibration method thereof reduce requirements on installation and debugging of the sensor and make operation simpler and more convenient.