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Variable-rigidity parallel flexible constraint micro-nano probe

A variable stiffness, parallel technology, applied in the field of measuring instruments, can solve the problems of false triggering, large measuring force, slow dynamic response, etc.

Active Publication Date: 2016-09-21
ANHUI UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, there are still some defects in the touch probe. For example, the stiffness of the restraint support mechanism of the touch probe has a great influence on the measurement. The low stiffness will cause low resonance frequency, slow dynamic response, and "golf" at the moment of measurement collision. "Ball effect", false triggering caused by inertial force, etc.; too high stiffness will reduce the sensitivity and dynamic response speed of the measurement process, resulting in large measurement force and even damage to the surface of the tested component

Method used

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Embodiment Construction

[0015] Below in conjunction with accompanying drawing, by describing embodiment, the present invention will be further described:

[0016] Such as Figures 1 to 4 As shown, a variable stiffness parallel flexible constraint micro-nano measuring head of the present invention includes an annular shell 1, the top of the shell 1 is provided with an upper end cover 2, and four edges of the upper end cover 2 are evenly distributed for connecting with the shell 1. Connected threaded hole I6, the center of the upper end cover 2 is provided with a threaded hole II4 for lifting the loaded object 5, the inner center of the upper end cover 2 passes through the threaded hole II4 to lift the loaded object 5, and the loaded object 5 is located in the cavity surrounded by the shell 1 , the carrier 5 is a hollow regular hexagonal prism, which reduces the weight of the overall structure of the present invention.

[0017] Three laser interferometers 3 are evenly distributed on the side wall of t...

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Abstract

The invention discloses a variable-rigidity parallel flexible constraint micro-nano probe, which comprises an annular outer shell, wherein the top part of the outer shell is provided with an upper end cover, an object carrier is hoisted at the inner center of the upper end cover, the bottom part of the outer shell is connected with a variable-rigidity parallel flexible constraint mechanism through an outer shell bearing platform, the center of one side (away from the upper end cover) of the variable-rigidity parallel flexible constraint mechanism is provided with a test rod, and the end part of one end (away from a mobile platform) of the test rod is provided with a test ball. The variable-rigidity parallel flexible constraint micro-nano probe can change the transverse rigidity of the flexible constraint mechanism according to requirements of a measured object and working process, so as to satisfy the requirement for measurement.

Description

technical field [0001] The invention relates to the technical field of measuring instruments, in particular to a variable stiffness parallel flexible constraint micro-nano measuring head. Background technique [0002] Probe is one of the key components of precision measuring instruments. As a sensor, it provides geometric information of the workpiece to be measured. Its development level directly affects the measurement accuracy, working performance, efficiency and flexibility of precision measuring instruments. At present, the three-dimensional measurement technology of the touch trigger probe has been widely used. Compared with non-contact probes, trigger probes have sufficient accuracy, low cost, high reliability, and easy calibration. [0003] The three-dimensional probe is one of the key components of the coordinate measuring machine, and the accuracy of the coordinate measuring machine directly depends on the accuracy of the probe. The contact trigger type probe is m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/016
CPCG01B7/016
Inventor 李保坤王康刘素梅韩迎鸽王开松马天兵杨洪涛王成军陈清华张国荣程勇
Owner ANHUI UNIV OF SCI & TECH
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