A Probe of Variable Stiffness Contact Micro-nano Coordinate Measuring Machine

Abstract

The invention relates to a variable-stiffness contact micro-nano coordinate measuring machine probe which is characterized in that the variable-stiffness contact micro-nano coordinate measuring machine probe comprises elastic sensitive beams, a central connector, a crane-shaped frame, an H-shaped flexible mechanism, a capacitor upper pole plate, a capacitor lower pole plate and a worktable; the inner end of the elastic sensitive beam is fixed to the head part of the crane-shaped frame; the outer end of the elastic sensitive beam is fixed to the inner end of the midpoint of the H-shaped flexible mechanism; the end of the central connector is fixed to the midpoint of the elastic sensitive beam; two sides of the H-shaped flexible mechanism are fixed to the crane-shaped frame; the capacitor upper pole plate is fixed to the lower surface of the end of the central connector; and the capacitor lower pole plate is fixed to the upper end of the worktable. According to the variable-stiffness contact micro-nano coordinate measuring machine probe, through arranging a probe suspension mechanism, probe system stiffness adjustment and compact spatial arrangement structure are realized; through arranging a piezoelectric driver and the elastic sensitive beam, a measuring force in a measuring process is reduced; through arranging the elastic sensitive beams which are uniformly distributed aroundthe axis of the workpiece and the crane-shaped frame, a requirement for mounting symmetry and consistent pressure of the elastic sensitive beam is reduced; and furthermore the variable-stiffness contact micro-nano coordinate measuring machine probe has advantages of simple structure, convenient operation, high economic performance and high practicability.

Description

technical field [0001] The invention relates to a precision measuring head, in particular to a variable stiffness contact type micro-nano coordinate measuring machine measuring head. Background technique [0002] When measuring the surface topography of miniature workpieces, the contact micro-nano coordinate measuring machine needs to use the top of the stepped measuring rod of the probe to contact the measured workpiece, so that the elastic sensitive beam produces a small strain or displacement to calibrate the coordinates of the measured point. At present, most contact micro-nano coordinate machines use probes with fixed stiffness, and the research and application of probes with variable stiffness are still immature. The existing probes have the following problems: 1. The large contact force between the probe and the workpiece will cause damage to the workpiece with a soft surface; 2. The attractive force between the probe and the workpiece will damage the repeatability of...

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Problems solved by technology

The existing probes have the following problems: 1. The large contact force between the probe and the workpiece will cause damage to the workpiece with a soft surface; 2. The attractive force between the probe and the workpiece will damage the repeatability of the probe system; 3. Inertial force may cause certain false triggers; 4. The stiffness of the probe system is difficult to achieve isotropy; 5. The three-beam suspension form of the variable stiffness probe that has been proposed has very strict requirements on machining accuracy; 6. The force exerted by the electric drive is different, resulting in errors, and it is difficult to effectively compensate for processing defects; 7. When using capacitive or optical sensors, the layout space is insufficient

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