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Method for producing miniflow control chip

A microfluidic chip and glass chip technology, applied in the fields of chemistry, physics, electronics and materials, can solve the problems of large contact area and low signal-to-noise ratio, and achieve the effect of high detection sensitivity, low signal-to-noise ratio and excellent performance

Inactive Publication Date: 2006-05-17
WUHAN CHEM COLLEGE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the current detection electrode material is mainly metal film material, which has a large contact area with the liquid to be tested, so the signal-to-noise ratio is low

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] A glass chip material made of:

[0023] (1) Glass melting and glass sheet production: according to the following weight percentages: 64.32% SiO 2 , 4.60% Al 2 o 3 , 25.65% Li 2 O, 3.69% K 2 O, 0.71% Na 2 O, 1.26% ZnO, 0.025% CeO 2 , 0.017% SnO 2 , 0.061%Ag 2 O, 0.25% Sb 2 o 3 , take the above-mentioned substances to make a mixture, and melt it into molten glass at a temperature of 1500 ° C. The melting time changes with the temperature. After the molten glass is drawn into a sheet, it is ground and polished into a glass sheet with a thickness of 0.8 mm;

[0024] (2) Light irradiation treatment: fix the mask engraved with patterns such as microfluidic channels, liquid pools, and micron holes on the glass sheet, and use a 300W ultraviolet light source to irradiate the glass for 3 hours. The processing time is inversely proportional to the power of the ultraviolet light source. relation. The light irradiation time at the micro-hole is twice the irradiation time ...

Embodiment 2

[0035] A glass chip material processing is the same as embodiment 1A.

[0036] B electrode integration

[0037] (1) After printing electrode leads on a flat glass, bond it to the glass chip containing microfluidic channels, liquid pools, and micropores prepared in process A. The bonding temperature is 560°C.

[0038] (2) Loading the catalyst used for the synthesis of carbon nanotubes in the micropores by electroplating. The electroplating solution used is a mixed solution of cobalt sulfate and boric acid, wherein the content of cobalt sulfate is 0.02mol / L, the content of boric acid is 0.03mol / L, the electroplating voltage is 10V, the electroplating time is 30 seconds, and the thickness of the obtained catalyst cobalt film is 50nm .

[0039] (3) Using microwave electron cyclotron resonance plasma chemical vapor deposition method to integrate carbon nanotube electrodes in micro-pores: microwave power 200W, coil excitation current 20A, plasma cavity pressure 800Pa, methane flow...

Embodiment 3

[0043] A glass chip material processing is the same as embodiment 1A.

[0044] B electrode integration

[0045] (1) After printing electrode leads on a flat glass, bond it to the glass chip containing microfluidic channels, liquid pools, and micropores prepared in process A. The bonding temperature is 560°C.

[0046] (2) Loading the catalyst used for the synthesis of carbon nanotubes in the micropores by electroplating. The electroplating solution used is a mixed solution of ferric sulfate and boric acid, wherein the content of ferric sulfate is 0.01 / L, the content of boric acid is 0.03mol / L, the electroplating voltage is 10V, the electroplating time is 30 seconds, and the thickness of the obtained catalyst iron film is 40nm.

[0047] (3) Using microwave electron cyclotron resonance plasma chemical vapor deposition method to integrate carbon nanotube electrodes in micro-pores: microwave power 200W, coil excitation current 20A, plasma cavity pressure 800Pa, methane flow rate 5...

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Abstract

The present invention relates to a microflow control chip and its preparation method. Said method includes the following steps: selecting glass component, adding proper quantity of photosensitizer and crystal nucleus agent, high-temperature melting, drawing or pouring to obtain sheet material, grinding and polishing to obtain glass sheet, making the glass sheet successively undergo the processes of optical irradiation, high temperature and acid corrosion treatment so as to obtain the glass chip with microflow channel, liquid cell, high-pressure isolation structure and hole array for integrating electrodes; utilizing plasma chemical gas-phase deposition method, hot wire chemical gas-phase deposition method or high-temperature cracking method to respectively integrate nano carbon tube working electrode, reference electrode and electrophoretic separation electrode in the correspondent holes and packaging so as to obtain the invented microflow control chip.

Description

technical field [0001] The invention relates to the fields of physics, chemistry, electronics and materials, in particular to a preparation method of a highly integrated microfluidic chip. The main core technology of the microfluidic chip lies in the preparation of photosensitive glass-ceramic chip materials and the integration of carbon nanotube electrodes. With multiple functions such as reaction, separation, and detection, it is suitable for all analytical fields, including biomedicine, environmental monitoring, food hygiene, criminal science, and national defense. Background technique [0002] The microfluidic chip is the core of the miniature total analysis system, which represents the development direction of the analysis instrument towards miniaturization and integration. Realize the overall miniaturization, automation, integration and portability of the analysis system from sample processing to detection. The advantage is that the automatic microfluidic operation i...

Claims

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Application Information

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IPC IPC(8): G01N27/447G01N27/26G01N35/00
Inventor 王升高汪建华杨茂荣李艳琼王涛
Owner WUHAN CHEM COLLEGE
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