Teater
A technology for processing devices and gases, applied in the direction of gaseous chemical plating, cleaning methods and utensils, coatings, etc.
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Embodiment 1
[0055] The processing device of the present invention such as figure 1 shown. figure 1 It is a schematic cross-sectional view of the processing apparatus of the present invention cut along a plane perpendicular to the electrode axis of the cylindrical electrodes 3a, 3b, and 3c. The treatment device 11 is composed of a discharge vessel 1 and a treatment space 2, and between the discharge vessel 1 and the discharge vessel 2, an MgF 2 The light-taking window 7 that constitutes. For generating Ar from the discharge vessel 1 with a maximum wavelength value of 126nm 2 For excimer light, the electrodes 3a, 3b, and 3c for dielectric barrier discharge arranged in the discharge vessel 1 are electrically connected to the power supply 5 for discharge, and the electrodes 3a, 3b, and 3c are arranged on the inside of the quartz glass tube as a dielectric, for example, And apply high frequency and high voltage between the electrodes. In this embodiment, the light source is composed of t...
Embodiment 2
[0060] figure 2 Example 2 in the present invention is shown. figure 2 It is a schematic sectional view cut on a plane perpendicular to the lamp tube axis of the excimer ultraviolet lamp 21; in this embodiment 2, the figure 1 Ar produced by the wavelength maximum of 126nm in 2 A light source composed of excimer light discharge space 1, etc., replaced with Xe 2 Excimer UV lamp. Specifically, the processing device 20 is composed of a lamp chamber 21 and a processing space 22 , and a light-taking window 27 is arranged between the lamp chamber 21 and the processing space 22 . Xe is disposed inside the lamp house 21 2 excimer UV lamp 23, the Xe 2 The excimer ultraviolet lamp 23 is used as a discharge vessel, coaxially configured with an outer diameter of 26 mm and a wall thickness of 1 mm and an outer diameter of 16 mm and an inner tube of 1 mm. The space between the outer tube and the inner tube , Xe sealed with Xe gas at 53.3Kpa 2 Excimer UV lamp23. The Xe 2 The excime...
Embodiment 3
[0063] image 3 Example 3 of the present invention is shown. image 3 It is a schematic cross-sectional view cut along a plane perpendicular to the electrode axes of the cylindrical electrodes 3a, 3b, and 3c. In the processing device 40 in the third embodiment, the light-trapping window in the first embodiment is removed, the supply direction of the discharge gas is set above the object 9 to be irradiated, and the discharge plasma 4b is pinched between the inlets. The discharge gas for light generation is supplied from the discharge gas inlets 36a and 36b, and the ammonia NH 3 Introduction port 10a, supply ammonia NH 3 . As the ammonia gas supplied here, a gas diluted with nitrogen or argon can also be used. In this treatment device, discharge gas, ammonia NH 3 , and gas generated by decomposition of, for example, organic substances scattered from the surface of the object to be processed, are discharged from the discharge port 10b. In this embodiment, the light source i...
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