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Array waveguide grating of organic polymer and its making process

An arrayed waveguide grating, polymer technology, used in light guides, optics, optical components, etc.

Inactive Publication Date: 2004-09-08
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is to overcome the deficiencies of the background technology, to find an economical and quick process to prepare AWG devices, to avoid the use of expensive thick film growth and corresponding etching equipment, and to avoid the difficulty of growing materials at high temperatures, and to The central wavelength of the device can be fine-tuned, which is conducive to the optimal design of the device; it is easy to control the core layer thickness and refractive index of the waveguide, and the AWG device can be fabricated in a process that is easy to implement in a lower temperature range (room temperature to 150 °C)

Method used

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  • Array waveguide grating of organic polymer and its making process
  • Array waveguide grating of organic polymer and its making process
  • Array waveguide grating of organic polymer and its making process

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Effect test

Embodiment 1

[0052] Embodiment 1, a kind of preparation not containing fluoropolymer solution

[0053] A copolymer of methyl methacrylate and glycidyl methacrylate is used as the cladding material (2) (as shown in the general formula VI). After testing, the refractive index of this material at 1.55 μm is 1.483. Bisphenol A epoxy resin is used as a high-refractive index regulator (as shown in general formula VII), mixed into the cladding material to form a core layer material (3), adjust the percentage of epoxy resin, and control the core layer The refractive index is 1.495, so that the waveguide formed is single-mode transmission. Add a certain amount of solvent to the cladding and core materials for dilution, mix and stir, filter with a 0.4 micron filter, adjust its concentration so that it can flow slowly, and set aside.

Embodiment 2

[0054] Embodiment 2: the polyester of synthesizing basic formula

[0055] Add 10g of 1,1,1,3,3,3,-hexafluorobisphenol A diacetate and 5.7g of 2,2,3,3,4,4,-hexafluoro Glutaric acid, then add 0.03g dibutyltin oxide as a catalyst. Put the pear-shaped bottle on a rotary evaporator and heat it to 200°C with an oil bath to react for 2 hours under a nitrogen atmosphere. The prepolymer was transferred to a test tube and reacted at 240° C. for 24 hours under the conditions of evacuating to 0.2 mmHg and filling with nitrogen. A transparent amber solid was obtained, which was dissolved in tetrahydrofuran and purified by precipitation with methanol to obtain a white powder as the product. After testing, the number average molecular weight of the sample was 9800, the Tg was 110° C., and the refractive index at 1.55 microns was 1.478.

Embodiment 3

[0056] Embodiment 3: synthesis adds terephthalic acid modified polyester on the basis of basic formula

[0057] Add 10g of 1,1,1,3,3,3,-hexafluorobisphenol A diacetate, 4.57g of 2,2,3,3,4,4,-hexafluoro Glutaric acid and 0.8g terephthalic acid, then add 0.03g dibutyltin oxide as a catalyst. Put the pear-shaped bottle on a rotary evaporator and heat it to 200° C. with an oil bath to react for 2 hours under nitrogen atmosphere. After the viscosity of the system increases, vacuumize to 0.1 mmHg and react for 11 hours. The prepolymer was transferred to a test tube and reacted at 240° C. for 24 hours under the conditions of evacuation and nitrogen gas. A transparent amber solid was obtained, which was dissolved in tetrahydrofuran and purified by precipitation with methanol to obtain a white powder as the product. After testing, the number average molecular weight of the sample is 9800, the Tg is 113° C., and the refractive index at 1.55 microns is 1.512. This material can be used ...

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Abstract

The present invention is array waveguide grating of organic polymer and its making process. The array waveguide grating is made through the process of painting lower cladding polymer onto monocrystal silicon chip as substrate, stoving and painting polymer core layer material; stoving, evaporating or sputtering aluminum film, painting photoresist and photoetching through array waveguide grating mask; oxygen reacting ion etching to obtain array waveguide grating pattern on polymer core layer material; painting upper cladding polymer material and stoving to obtain array waveguide grating. The array waveguide grating device and its making process has easily control of refraction index difference between polymer core layer and cladding material, easy control of thickness of each layer, flexible selection of the core layer and the cladding material to realized optimized design.

Description

technical field [0001] The invention relates to an organic polymer array waveguide grating and a manufacturing method thereof, in particular to an array waveguide grating using a novel organic polymer material as an optical waveguide cladding layer and a core layer and a manufacturing method thereof. Background technique [0002] Wavelength Division Multiplexing (WDM) technology is an effective method to solve broadband and large-capacity optical fiber network communication. The multiplexer / demultiplexer is a key device in constructing a WDM system. Now practical multiplexers include multilayer thin film filter type, fiber Bragg grating filter type and arrayed waveguide grating type. Among them, arrayed waveguide grating (AWG) is considered to be the most promising new type of optical wavelength division multiplexing device suitable for dense WDM systems. It can work with high-order diffraction, so it has very good wavelength resolution on the nanometer scale even though i...

Claims

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Application Information

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IPC IPC(8): G02B6/124
Inventor 张大明崔占臣赵禹王菲马春生刘式墉
Owner JILIN UNIV
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