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Spherical grinding material, preparation method, application and sapphire grinding fluid containing spherical grinding material

A spherical grinding and lapping fluid technology, applied in polishing compositions containing abrasives, chemical instruments and methods, other chemical processes, etc., can solve the problem of increasing the contact area between the diamond cutting acute angle and the sapphire wafer, the poor lapping effect of the lapping fluid, Problems such as low wafer roughness value, to achieve the effect of increasing the grinding rate, increasing the contact time, and increasing the grinding rate

Pending Publication Date: 2022-07-12
ZHEJIANG AUFIRST MATERIAL TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The object of the present invention is to propose a spherical abrasive with controllable size and uniform appearance, and the abrasive is passed through Consolidating the diamond micropowder in the spherical abrasive increases the contact area between the sharp diamond cutting angle and the sapphire wafer; the sapphire grinding fluid containing it can maintain stable suspension, high grinding efficiency, and the processed wafer has low roughness, good flatness and no obvious Scratch, especially suitable for double-sided and single-sided grinding and thinning of sapphire wafers

Method used

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  • Spherical grinding material, preparation method, application and sapphire grinding fluid containing spherical grinding material
  • Spherical grinding material, preparation method, application and sapphire grinding fluid containing spherical grinding material
  • Spherical grinding material, preparation method, application and sapphire grinding fluid containing spherical grinding material

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Embodiment 1-12

[0134] Embodiment 1-12 discloses a variety of sapphire lapping liquids, and its components and weight ratios are shown in Table 1:

[0135] Component and weight ratio of table 1 embodiment 1-12 sapphire grinding liquid

[0136]

[0137]

[0138] The spherical abrasive used in Examples 1-12 is prepared by the following preparation method:

[0139] 1) at first weigh three kinds of abrasives by table 2: alumina powder: silicon oxide powder: diamond micropowder, three kinds of abrasives add up to 1kg, add in the stirring kettle, add 1kg ethanol, stir 10min to make uniform slurry;

[0140] 2) in every 1kg slurry, add successively PVB, polyethylene glycol 400, polymethyl acrylate and dodecyl hydroxypropyl sulfobetaine described in table 2, stir 30min under 80rpm rotating speed to prepare mixed slurry;

[0141] 3) The mixed slurry obtained in step 2) was added to the planetary ball mill, the ball milling speed was set to 300rpm, the grinding ball and the ball mill tank were bo...

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Abstract

The invention provides a spherical grinding material, a preparation method, application and sapphire grinding fluid containing the spherical grinding material. The spherical grinding material is formed by mixing and sintering diamond micro-powder, alumina powder and silicon oxide powder, the diamond micro-powder is solidified in the spherical grinding material, and the contact area of a diamond cutting acute angle and a sapphire wafer is increased. The invention further discloses sapphire grinding fluid which comprises the spherical grinding material, a diamond grinding material, a suspending agent, a lubricating agent, a pH regulator, a wetting agent, a dispersing agent, an anti-rust agent and water. The sapphire grinding fluid can improve the grinding efficiency and reduce the processing cost on the premise of ensuring the surface quality of a wafer. The sapphire substrate obtained by grinding with the sapphire grinding fluid is low in surface roughness, good in flatness and free of obvious scratches. The sapphire grinding fluid disclosed by the invention has very good application prospects and large-scale industrial popularization potential.

Description

technical field [0001] The present invention relates to processing technology of sapphire crystal material, in particular to a spherical abrasive, preparation method, application and sapphire lapping liquid containing the same. Background technique [0002] Sapphire also known as Al 2 O 3 Single crystal, commonly known as corundum, is a simple coordination oxide crystal. Sapphire crystal has excellent optical properties, mechanical properties and chemical stability, high strength, high hardness, erosion resistance, and can work under harsh conditions of high temperature close to 2000 ℃, so it is widely used in infrared military devices, satellite space technology, Window material for high-intensity lasers. Its unique lattice structure, excellent mechanical properties, and good thermal properties make sapphire crystal a practical semiconductor GaN / Al 2 O 3 Light-emitting diodes (LEDs), large-scale integrated circuits SOI and SOS, and superconducting nanostructured thin f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09K3/14C09G1/02
CPCC09K3/1436C09G1/02
Inventor 侯军李传强褚雨露单晓倩
Owner ZHEJIANG AUFIRST MATERIAL TECH CO LTD
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