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Ceramic dielectric filter surface coating method based on micro-arc ion plating and ceramic dielectric filter

A micro-arc ion plating, ceramic dielectric technology, applied in ion implantation plating, waveguide type devices, coatings, etc., can solve the problems of film breakage, insufficient film adhesion, poor diffraction, etc., to enhance the interface bonding Strength, improved film thickness uniformity, and improved bonding effect

Pending Publication Date: 2022-05-13
江阴微弧金属科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the traditional magnetron sputtering method has the problems of low target atomic ionization rate, insufficient film adhesion, and poor diffraction. Compared with magnetron sputtering ion plating, micro-arc ion plating technology makes the plating particles The ionization rate is higher, which can achieve the effect of preparing uniform thickness coatings at different spatial positions in the vacuum chamber
[0005] However, for ceramic dielectric filters, due to the large difference in lattice constant and thermal expansion coefficient between silver and the ceramic substrate, the bonding force between the outer plated pure silver layer and the ceramic substrate is weakened, and deformation is easy to occur, and severe deformation may even cause The film layer is broken, which affects the yield of the ceramic dielectric filter and also affects the performance of the ceramic dielectric filter during use

Method used

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  • Ceramic dielectric filter surface coating method based on micro-arc ion plating and ceramic dielectric filter
  • Ceramic dielectric filter surface coating method based on micro-arc ion plating and ceramic dielectric filter
  • Ceramic dielectric filter surface coating method based on micro-arc ion plating and ceramic dielectric filter

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0072] Step 1: Select the ceramic dielectric filter as the substrate, and perform conventional pre-cleaning treatment on the substrate.

[0073] Step 2: Place the ceramic dielectric filter obtained in step 1 on the workpiece frame (target base distance 150mm) in the vacuum chamber of the micro-arc ion plating equipment, and the working disk keeps the revolution and rotation (5r / min) in the following steps ), Ni target material (purity 99.9%) and Ag target material (purity 99.9%) are placed in the vacuum chamber.

[0074] Step 3: The first plasma cleaning is used to remove residual dirt on the surface of the workpiece

[0075] The vacuum chamber in step 2 is evacuated so that the vacuum degree of the vacuum chamber is 5.5×10 -3 Pa, feed argon again, keep the working pressure in this vacuum chamber in this step as 9.0×10 -1Pa. Turn on the Ni target current, and reduce the Ni target current from 2A to 0.25A within 3 minutes; then, maintain the Ni target current, and apply a ne...

Embodiment 2

[0089] Step 1: Select the ceramic dielectric filter as the substrate, and perform conventional pre-cleaning treatment on the substrate.

[0090] Step 2: Place the ceramic dielectric filter obtained in step 1 on the workpiece frame (target base distance 120 mm) in the vacuum chamber of the micro-arc ion plating equipment, and the working disk keeps revolution and rotation (8r / min) in the following steps ), and Ni target material (purity 99.95%), Cu target material (purity 99.95%) and Ag target material (purity 99.9%) are placed in the vacuum chamber.

[0091] Step 3: The first plasma cleaning is used to remove residual dirt on the surface of the workpiece

[0092] The vacuum chamber in step 2 is evacuated so that the vacuum degree of the vacuum chamber is 4.5×10 -3 Pa, feed argon again, keep the working pressure in this vacuum chamber in this step as 4.0×10 -1 Pa. Turn on the Ni target current, and reduce the Ni target current from 5A to 0.5A within 6 minutes; keep the Ni ta...

Embodiment 3

[0106] Step 1: Select the ceramic dielectric filter as the substrate, and perform conventional pre-cleaning treatment on the substrate.

[0107] Step 2: Place the ceramic dielectric filter obtained in step 1 on the workpiece frame (target base distance 90mm) in the vacuum chamber of the micro-arc ion plating equipment. ), Ni target material (purity 99.95%), Cu target material (purity 99.95%) and Ag target material (purity 99.99%) are placed in the vacuum chamber.

[0108] Step 3: The first plasma cleaning is used to remove residual dirt on the surface of the workpiece

[0109] The vacuum chamber in step 2 is evacuated so that the vacuum degree of the vacuum chamber is 3.5×10 -3 Pa, feed argon again, keep the working pressure in this vacuum chamber in this step as 2.0×10 -1 Pa. Turn on the Ni target current, and reduce the Ni target current from 8A to 0.5A within 8 minutes; keep the Ni target current at any time, and apply a negative bias voltage of 550V to the ceramic diele...

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Abstract

The invention provides a ceramic dielectric filter surface coating method based on micro-arc ion plating, which comprises the following steps: ultrasonically cleaning a to-be-treated ceramic dielectric filter; and the ceramic dielectric filter is placed on a workpiece frame in a vacuum chamber of micro-arc ion plating equipment and then sequentially subjected to the steps of plasma cleaning, metal conducting layer deposition, secondary plasma cleaning, metal base layer deposition, transition layer deposition, Ag plating layer deposition, post-treatment and the like, and the ceramic dielectric filter with the surface plating layer is obtained. The invention also provides a ceramic dielectric filter. According to the method, a thick coating can be prepared, the components of the coating can be accurately regulated and controlled, the treated ceramic filter surface silver coating is good in interface bonding, compact in section structure and excellent in electrical property, and the whole silver plating process is high in automation degree and good in stability and reliability.

Description

technical field [0001] The invention relates to the technical field of new material manufacturing, in particular to a method for coating the surface of a ceramic dielectric filter based on micro-arc ion plating, and a ceramic dielectric filter. Background technique [0002] The filter is the "frequency selection" eye of the base station, which can help the communication base station filter out unnecessary bands and realize the transmission and reception of electromagnetic waves of specific frequencies. With the advent of the 5G era, the weight and volume of communication base station equipment will be more stringent than that of 4G, and the filter must be miniaturized and integrated, that is, the smaller and lighter ceramic dielectric filter will replace the traditional metal cavity Filters will become the mainstream, and the manufacturing technology route will be completely revolutionized. Because metal silver has good electrical conductivity, thermal conductivity, ductili...

Claims

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Application Information

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IPC IPC(8): C23C14/02C23C14/18C23C14/32C23C14/48H01P1/20H01P11/00
CPCC23C14/325C23C14/18C23C14/022C23C14/48C23C14/027H01P11/007H01P1/2002
Inventor 杨波李洪涛刘灿灿徐彤张宁路永荣鲍星毅
Owner 江阴微弧金属科技有限公司
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