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Aluminum alloy surface carbon-based composite coating and preparation method thereof

A technology of aluminum alloy surface and composite coating, applied in metal material coating process, coating, ion implantation plating, etc., can solve the problem of poor bearing capacity, large difference in modulus and thermal expansion coefficient, and poor adhesion of DLC layer and other problems, to achieve the effect of improving bearing capacity, improving plastic deformation resistance, and improving high stress

Pending Publication Date: 2022-03-01
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Chinese patent CN109082647 discloses that a mixed transition layer of SiC and Si-DLC is deposited on the 7075 aluminum alloy, and then a DLC layer containing H is directly deposited on the transition layer. This method adopts SiC and Si-DLC mixed transition layer deposition, while SiC and Al has a large difference in modulus and thermal expansion coefficient, and there are bonding problems in the service process as a transition layer
[0006] Therefore, it is urgent to solve the technical problem of poor bonding force and poor bearing capacity of Al matrix combined with DLC layer

Method used

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  • Aluminum alloy surface carbon-based composite coating and preparation method thereof
  • Aluminum alloy surface carbon-based composite coating and preparation method thereof
  • Aluminum alloy surface carbon-based composite coating and preparation method thereof

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Effect test

Embodiment 1

[0040] The carbon-based coating structure is:

[0041] (1) Deposit a bonding layer Ti with a thickness of 800nm ​​and a grain size of 5-10nm;

[0042] (2) Depositing a support layer Si with a thickness of 1500nm;

[0043] (3) Depositing a catalytic layer Ti with a thickness of 100nm and a grain size of 100-120nm;

[0044] (4) Deposit the functional layer DLC with a thickness of 1000 nm.

[0045] The preparation process is as follows: (1) put the cleaned aluminum alloy substrate into a vacuum chamber for plasma etching, the plasma etching conditions are: under an argon environment, power 300W, air pressure 3mTorr; deposit a bonding layer on its surface, the The bonding layer is a Ti layer, and the deposition conditions of the bonding layer are: adopt high-power pulse magnetron sputtering technology, pulse voltage 400V, argon gas pressure 3mTorr; (2) deposit a supporting layer on the bonding layer obtained in the previous step, the supporting layer Si layer, the deposition co...

Embodiment 2

[0048] The carbon-based coating structure is:

[0049] (1) Deposit a bonding layer Ti with a thickness of 950nm and a grain size of 10-15nm;

[0050] (2) Depositing a support layer Si with a thickness of 1800nm;

[0051] (3) Depositing a catalytic layer Ti with a thickness of 120nm and a grain size of 120-150nm;

[0052] (4) Deposit the functional layer DLC with a thickness of 1200nm.

[0053] The preparation process is as follows: (1) put the cleaned aluminum alloy substrate into a vacuum chamber for plasma etching, the plasma etching conditions are: under an argon environment, power 400W, air pressure 8mTorr; deposit a bonding layer on its surface, the The bonding layer is a Ti layer, and the deposition conditions of the bonding layer are: adopt high-power pulse magnetron sputtering technology, pulse voltage 700V, argon gas pressure 6mTorr; (2) deposit a support layer on the bonding layer obtained in the previous step, the support layer Si layer, the deposition condition ...

Embodiment 3

[0056] The carbon-based coating structure is:

[0057] (1) Deposit a bonding layer Ti with a thickness of 1000nm and a grain size of 15-20nm;

[0058] (2) Depositing a support layer Si with a thickness of 2000nm;

[0059] (3) Depositing a catalytic layer Ti with a thickness of 200nm and a grain size of 120-200nm;

[0060] (4) Deposit the functional layer DLC with a thickness of 1500 nm.

[0061] The preparation process is as follows: (1) put the cleaned aluminum alloy substrate into a vacuum chamber for plasma etching, the plasma etching conditions are: under an argon environment, power 500W, air pressure 10mTorr; deposit a bonding layer on its surface, the The bonding layer is a Ti layer, and the deposition conditions of the bonding layer are: adopt high-power pulse magnetron sputtering technology, pulse voltage 1000V, argon gas pressure 10mTorr; (2) deposit a support layer on the bonding layer obtained in the previous step, the support layer Si layer, the deposition condi...

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Abstract

The invention discloses an aluminum alloy surface carbon-based composite coating which is composed of three elements of Ti, Si and C. The carbon-based composite coating is of a multi-layer structure, and a combined Ti layer, a Si layer, a catalytic Ti layer and a DLC layer are sequentially arranged from the aluminum alloy surface to the surface of the carbon-based composite coating. The carbon-based composite coating has good surface binding force and high bearing capacity. The invention further discloses a preparation method of the aluminum alloy surface carbon-based composite coating, and the preparation method comprises the step that the Ti layer, the Si layer, the catalytic Ti layer and the DLC layer are sequentially deposited and combined on the aluminum alloy surface through the high-power pulse magnetron sputtering technology, the direct-current magnetron sputtering technology and the ion beam deposition technology in sequence to obtain the aluminum alloy surface carbon-based composite coating. The preparation method is simple and efficient.

Description

technical field [0001] The invention belongs to the technical field of surface protection, and in particular relates to a carbon-based composite coating on the surface of an aluminum alloy and a preparation method thereof. Background technique [0002] Aluminum alloy has the advantages of low density, high specific strength, and good plasticity. As an important lightweight material, it has good application prospects in high-tech fields such as aerospace, military, and transportation. In recent years, with the rapid development of the above fields, the service conditions of aluminum alloys tend to be harsh, but there are key problems such as low hardness and poor wear resistance, which restrict the long-life and reliable operation of key equipment. Coating hard coating on the surface of mechanical moving parts through material surface strengthening technology can effectively enhance the surface strength, hardness, wear resistance, corrosion resistance and other properties of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/16C23C14/22C23C14/35
CPCC23C14/352C23C14/16C23C14/06C23C14/0611C23C14/221
Inventor 孙丽丽魏晨阳汪爱英郭鹏
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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