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Environment-friendly diffusion source for solar cell

An environmentally friendly, solar cell technology, applied in nanotechnology for information processing, nanotechnology for materials and surface science, circuits, etc., can solve problems such as uneven diffusion, improve doping uniformity, The effect of improving adsorption effect and reducing contact angle

Pending Publication Date: 2022-02-18
南京欣之禾安全技术有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In view of the problems existing in the prior art, the purpose of the present invention is to provide an environmentally friendly diffusion source for solar cells, which can effectively solve the problem of uneven diffusion on the silicon wafer substrate through the environment-friendly diffusion source , reduce the appearance of diffusion defective products, and improve the efficiency of solar cells

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  • Environment-friendly diffusion source for solar cell

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Embodiment 1

[0049] see Figure 1-11 , an environment-friendly diffusion source for solar cells, the environment-friendly diffusion source includes solvent, silicon oxide nanosphere precursor source, impurity source and additive, solvent is absolute ethanol or isopropanol, silicon oxide nanosphere precursor The source is any one of methyltriethoxysilane, methyltrimethoxysilane and n-silyl ethyl ester, the impurity source is a diffused boron source or a diffused phosphorus source, and the diffused boron source is boric acid, ammonium borate (five Any one of ammonium borate, ammonium acid borate, diammonium tetraborate, ammonium borate, ammonium hydrogen tetraborate) and a mixture of boric acid and ammonium borate salt. Diffusion phosphorus source is phosphoric acid, ammonium phosphate salt (ammonium hypophosphite, ammonium dihydrogen phosphite, ammonium dihydrogen phosphate, diammonium hydrogen phosphite, ammonium monohydrogen phosphate, ammonium dihydrogen hypophosphate, ammonium phosphate...

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Abstract

The invention discloses an environment-friendly diffusion source for a solar cell and belongs to the field of semiconductors. The environment-friendly diffusion source for the solar cell comprises a solvent, a silicon oxide nanosphere precursor source, an impurity source and an additive, wherein the solvent is absolute ethyl alcohol or isopropyl alcohol, the silicon oxide nanosphere precursor source is any one of methyltriethoxysilane, methyltrimethoxysilane and n-silane ethyl ester, the impurity source is a diffusion boron source or a diffusion phosphorus source, and the additive is any one of ammonia water, ammonia gas and liquid ammonia; a problem of uneven diffusion on the silicon wafer substrate can be effectively solved through the environment-friendly diffusion source, the occurrence of diffusion defective products is reduced, efficiency of the solar cell is improved, and the silicon oxide nanospheres can help to improve doping uniformity of the diffusion layer.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to an environment-friendly diffusion source for solar cells. Background technique [0002] A solar cell is a device that uses the photovoltaic effect to convert light energy into electrical energy. It is also called a photovoltaic device. It mainly includes monocrystalline silicon cells and monocrystalline gallium arsenide cells. Forming a P-N junction on a type or N-type silicon wafer is a very critical process step, and the quality of the P-N junction directly determines the efficiency of the solar cell. [0003] With the development of crystalline silicon solar cells in the direction of large size and ultra-thinning, the uneven distribution of P-N junctions on the entire silicon wafer surface caused by tubular diffusion has become a bottleneck that is difficult to improve the efficiency of cells. Advantages, the scope of application in the field of crystalline silicon manufacturing...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/22H01L21/225H01L31/18B82Y10/00B82Y30/00B82Y40/00
CPCH01L21/2225H01L21/2252H01L31/1804B82Y30/00B82Y10/00B82Y40/00Y02E10/547Y02P70/50
Inventor 王孟
Owner 南京欣之禾安全技术有限公司
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