Deep ultraviolet electro-catalysis assisted magnetorheological elastomer leveling device and method
A magnetorheological elastomer, deep ultraviolet technology, applied in the direction of grinding device, grinding drive device, working carrier, etc., can solve the problems of difficult to control the processing quality stably, low yield rate, weakened device performance, etc.
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[0065] The present invention will be described in detail below with reference to the accompanying drawings and examples. It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. For the convenience of description, if the words "up", "down", "left" and "right" appear in the following, it only means that the directions of up, down, left and right are consistent with the drawings themselves, and do not limit the structure.
[0066] A gallium oxide crystal deep-ultraviolet catalysis-assisted magnetorheological polishing device, see figure 1 , including deep ultraviolet light source 1, tool shaft 2, tool shaft motor 3, magnetorheological elastomer polishing tool head 4, brush 5, wire 6, vertical guide rail 7, horizontal guide rail 8, polishing disc 9, spindle 10, gear Box 11, spindle motor 12, fixture 14, nozzle 15. The deep ultraviolet light source 1 is preferably a deep ult...
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