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Self-lubricating titanium diboride/diamond-like carbon coating and preparing method and application thereof

A titanium diboride and self-lubricating technology, which is applied in the field of titanium diboride/diamond-like coating and its preparation, can solve the problem of protective coating use efficiency and application field limitations, poor toughness of titanium diboride, and coating performance Instability and other problems, to achieve the effects of large-scale industrial production, low cost, and short preparation cycle

Active Publication Date: 2016-11-09
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Due to the poor toughness of titanium diboride, it is easy to crack and fall off when it is impacted, so its use efficiency and application field as a protective coating are limited.
Due to the limitation of the structure and doping content, the coating performance changes periodically and becomes unstable, or the toughness increases while the hardness decreases greatly

Method used

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  • Self-lubricating titanium diboride/diamond-like carbon coating and preparing method and application thereof
  • Self-lubricating titanium diboride/diamond-like carbon coating and preparing method and application thereof
  • Self-lubricating titanium diboride/diamond-like carbon coating and preparing method and application thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0033] 1. Preparation:

[0034] S1. Cleaning the substrate: send the polished WC-Co cemented carbide substrate into an ultrasonic cleaning machine, and use acetone and absolute ethanol to perform ultrasonic cleaning at 30kHz for 10 minutes, then clean it with deionized water, and then clean it with purity ≥ 99.5% nitrogen blow dry.

[0035] S2. Vacuuming and ion beam etching to clean the cavity and substrate: install TiB on the ion coating machine 2 For planar targets and graphite cylindrical targets, clean the coating chamber with a high-powered vacuum cleaner. Place the substrate after ultrasonic cleaning on the workpiece support in the vacuum chamber, and pump it to a vacuum degree of 5.0×10 -3Below Pa, then turn on the ion source, pass 80sccm argon gas into the ion source, set the ion source power to 0.9kW, set the workpiece support bias to -300V, and the etching cleaning process lasts for 20min.

[0036] S3. Ion beam etching substrate: rotate the turret, place the subs...

Embodiment 2

[0043] S1. Cleaning the substrate: send the polished (100) oriented single crystal silicon substrate into an ultrasonic cleaning machine, perform ultrasonic cleaning with acetone and absolute ethanol at 30kHz for 10min respectively, then rinse with deionized water, and then use Nitrogen with a purity ≥ 99.5% is blown dry.

[0044] S2. Vacuuming and ion beam etching to clean the cavity and substrate: install TiB on the ion coating machine 2 For planar targets and graphite cylindrical targets, clean the coating chamber with a high-powered vacuum cleaner. Place the substrate after ultrasonic cleaning on the workpiece support in the vacuum chamber, and evacuate the vacuum chamber to a vacuum of 5.0×10 -3 Below Pa, then turn on the ion source, feed 80sccm argon gas into the ion source, set the ion source power to 0.9kW, set the workpiece support bias to 300V, and the etching and cleaning process lasts for 20min.

[0045] S3. Ion beam etching substrate: rotate the turret, place th...

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Abstract

The invention discloses a self-lubricating titanium diboride (TiB2) / diamond-like carbon (DLC) hard coating and a preparing method of the coating. According to the TiB2 / DLC hard coating, a bipolar pulse magneto-sputtering deposition technology is adopted to enable a TiB2 ceramic layer and a DLC layer to be periodically overlaid on a base to form the coating; the modulation period of the TiB2 / DLC hard coating ranges from 15 nm to 60 nm, and the total thickness of the coating ranges from 1.2 micrometers to 1.4 micrometers; according to the TiB2 / DLC hard coating, advantages of TiB2 and advantages of DLC are integrated, the coating has the excellent hardness and lubricating characteristics, the good conducting property is achieved, meanwhile, the pulse magneto-sputtering deposition technology is convenient to operate, the process is simple, the preparing period is short, the cost is low, large-scale industrial production is facilitated, and the coating can be widely applied to fields of cutters, molds, microelectronics, protection and the like.

Description

technical field [0001] The invention belongs to the field of surface protection technology and related coating technology, and relates to a self-lubricating multilayer coating, more specifically, to a titanium diboride (titanium diboride) with a periodic multilayer structure with high hardness and low coefficient of friction. TiB 2 ) / diamond-like carbon (DLC) coating and its preparation method and application. Background technique [0002] With the development of society and the advancement of industrial technology, the industrial field has put forward higher and higher requirements for the performance of materials. In many engineering applications, materials are required to have excellent comprehensive properties; not only high hardness and corrosion resistance are required , It is also required to have a low coefficient of friction, good high temperature stability, etc. In order to meet the increasingly complex and diverse engineering needs, a hard coating is applied on ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C28/04
CPCC23C28/046C23C28/40
Inventor 高翔代伟王启民
Owner GUANGDONG UNIV OF TECH
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