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MEMS lithium battery and manufacturing method thereof

A lithium battery, integrated technology, applied in the direction of secondary batteries, battery electrodes, battery components, etc., can solve the problems of gas products, unsatisfactory service life, etc., to reduce charge transfer resistance, increase body surface area, The effect of increasing the ion transfer number

Inactive Publication Date: 2015-11-11
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there are still some unsatisfactory aspects of fuel cells in supplementing fuel, generating gas products, and service life.

Method used

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  • MEMS lithium battery and manufacturing method thereof
  • MEMS lithium battery and manufacturing method thereof
  • MEMS lithium battery and manufacturing method thereof

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preparation example Construction

[0075] The invention also discloses a method for preparing a chip battery, comprising the following steps:

[0076] Use semiconductor material as the substrate, evaporate a layer of Au / Cr by sputtering or electron beam, Au thickness is 100-500nm, preferably 200nm, Cr thickness is 10-50nm, preferably 20nm, use dry film (negative resist) as photoresist Perform photolithography, and then chemically etch to remove Au / Cr in other parts to form lead-out electrodes;

[0077] Deposit a layer of metal on the upper surface of the substrate, such as Au, Al, preferably aluminum, and then fix a layer of dry film on the upper surface of the substrate as a photoresist for photolithography to form a micro-column array pattern, and remove the column array by chemical etching Metals other than metals are then etched using a deep etching process to form a microcolumn array and the pool body of the battery's first housing;

[0078] Modifying and immobilizing nanomaterials on the surface of the m...

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Abstract

The invention discloses an MEMS lithium battery. The MEMS lithium battery comprises a first housing, a second housing and an electrolyte, wherein a cavity is formed in the first housing and a battery positive electrode is integrally formed in the cavity; the second housing and the first housing are manufactured by use of a same material; a cavity abutted with the first housing is formed in the second housing, and a battery negative electrode is integrally formed in the cavity; the electrolyte is received in the cavity between the first housing and the second housing. The invention also provides a manufacturing method of the MEMS lithium battery. The MEMS lithium battery is simple in preparation process, and can be produced in a large batch, and therefore, the production cost can be reduced; the uniformity and reliability of battery preparation can be greatly improved; the two-dimensional structure of each electrode can be changed into a three-dimensional structure so that the surface area of the electrode can be greatly increased, the charge transfer resistance can be reduced and the ion transference number can be increased, and therefore, the energy density and the power density of the battery can be greatly improved; the ion migration path can be shortened so that the charging time of the battery can be reduced.

Description

technical field [0001] The invention relates to the field of battery manufacturing, and more particularly relates to a MEMS lithium battery and a manufacturing method thereof. Background technique [0002] Micro-Electro-Mechanical System (MEMS), also known as micro-electro-mechanical system, micro-system or micro-machine, is developed on the basis of microelectronic technology (semiconductor manufacturing technology), which integrates lithography, corrosion, thin film , LIGA, silicon micromachining, non-silicon micromachining and precision machining technologies such as high-tech electromechanical devices. [0003] MEMS integrates micro-sensors, micro-actuators, micro-mechanical structures, micro-power and micro-energy sources, signal processing and control circuits, high-performance electronic integrated devices, interfaces, and communications. It is a revolutionary new technology and is widely used in high-tech In the industry, its system size is several millimeters or ev...

Claims

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Application Information

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IPC IPC(8): B81B1/00B81C1/00B81C3/00H01M10/0525H01M2/02H01M4/131H01M10/058H01M4/1391H01M50/102H01M50/117
CPCY02E60/10Y02P70/50
Inventor 孙建海赵佩月刘昶马天军
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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