Diamond wire saw device

a technology of diamond wire sawing and diamond wire, which is applied in the direction of metal sawing devices, metal sawing apparatus, manufacturing tools, etc., to achieve the effect of reducing the processing shearing force of silicon wafers, reducing the sequence of machining allowances, and improving the utilization ratio of silicon materials

Inactive Publication Date: 2012-11-01
GUILIN CHAMPION UNION DIAMOND CO LTD
View PDF4 Cites 5 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0028]By adopting the method of cutting the silicon wafers in sequence via the cutting mesh surfaces of a plurality of groups of diamond sawing wires, the cutting, fine grinding, and polishing procedures of the silicon wafer are finished via the diamond sawing wires with different characteristics according to different working parameters; the machining allowance of cutting, fine grinding, and polishing is greatly lowered in sequence, and the shearing force to the silicon wafer durin

Problems solved by technology

The cutting method of a wire saw machine has been greatly improved technically compared with a traditional band saw cutting method and ID blades slicing method, but there are still a lot problems such as surface cracks of surface cutting by abrasive slurry, uncontrollable depth of the affected layer, difficulty in separation between abrasive particles and silicon crumbs, harsh working environment, and lower efficiency.
Each diamond wire saw with abrasive concretion has different characteristics, but also has obvious defects.(1) As to the resin bond diamond wire saw with abrasive concretion, the finishing surface quality is good, but the efficiency is low, the resin heat resistance is poor, the bonding strength is low, the diameter of the wire saw is easily worn, the change in kerf is great, and the subsequent processing cost may be increased due to the out-of-tolerance in thickness of the silicon wafer.(2) As to the diamond wire saw with abrasive concretion by mechanical extrusion, the working efficiency is high, but the core wire is damaged under extrusion, the life is affected after the strength degradation, and the finishing qua

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Diamond wire saw device
  • Diamond wire saw device
  • Diamond wire saw device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0038]The technical scheme of a diamond wire saw device is described by taking a three-layer cutting mesh surface and a two-layer cutting mesh surface as examples.

[0039]1. In the silicon wafer cutting process of a three-layer cutting mesh surface, three vertically aligned diamond sawing wires 2 are used for cutting, finely grinding, and polishing the same silicon slit. Each layer of the cutting mesh surface comprises mesh surfaces of a group of wire meshes formed by winding long diamond sawing wires 2 on a group of spools 3; each group of the spools 3 are arranged in the four corners to form a square wire mesh. As shown in FIG. 1 and FIG. 2, the upper mesh surface and the lower mesh surface in the square wire mesh corresponding to a cutting table 1 for fixing silicon rods are cutting mesh surfaces.

[0040]A. The three-layer cutting mesh surface comprises mesh surfaces of three groups of wire meshes formed by winding three diamond sawing wires 2 on three groups of spools 3. As shown in...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Angleaaaaaaaaaa
Diameteraaaaaaaaaa
Sizeaaaaaaaaaa
Login to view more

Abstract

A diamond wire saw device including a diamond sawing wire. At least two diamond sawing wires are arranged in the front and back of a cutting working surface along a cutting feed direction, or at least two groups of the diamond sawing wires are arranged in the front and back of more than one parallel cutting working surface. The diamond sawing wires in the same group are parallel to one another to form a layer of cutting mesh surface. The diameter of a latter diamond sawing wire or a latter group of diamond sawing wires is equal to or greater than that of a former diamond sawing wire or a former group of diamond sawing wires.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This application is a continuation-in-part of International Patent Application No. PCT / CN2012 / 071788 with an international filing date of Feb. 29, 2012, designating the United States, now pending, and further claims priority benefits to Chinese Patent Application No. 201110112869.1 filed Apr. 29, 2011. The contents of all of the aforementioned applications, including any intervening amendments thereto, are incorporated herein by reference.CORRESPONDENCE ADDRESS[0002]Inquiries from the public to applicants or assignees concerning this document should be directed to: MATTHIAS SCHOLL P.C., ATTN.: DR. MATTHIAS SCHOLL ESQ., 14781 MEMORIAL DRIVE, SUITE 1319, HOUSTON, Tex. 77079.BACKGROUND OF THE INVENTION[0003]1. Field of the Invention[0004]The invention relates to a processing device for hard and brittle non-metallic materials and more particularly to a diamond wire saw device for cutting silicon ingots.[0005]2. Description of the Related Art[...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): B28D5/00
CPCB28D5/045B23D57/0023
Inventor SONG, JINGXIN
Owner GUILIN CHAMPION UNION DIAMOND CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products