Method for preparing indium tin oxide-indium oxide thin film thermocouple with crystal face preferred orientation

Abstract

The invention relates to a method for preparing an indium tin oxide-indium oxide thin film thermocouple with crystal face preferred orientation. A metal surface is a curved surface, and the method comprises the following steps of 1, depositing a yttrium-stabilized zirconia (YSZ) bonding coating on the surface of a metal workpiece through a physical vapor deposition process; 2, preparing a thin film thermocouple with crystal face preferred orientation on the bonding coating through a magnetron sputtering process; 3, carrying out heat treatment on the metal workpiece with the thin film thermocouple; and 4, preparing a protective layer on the bonding coating through the magnetron sputtering process. According to the thin-film thermocouple, the firm bonding coating serves as a deposition interface, a transition interface between the thin-film thermocouple and a high-temperature alloy blade is fewer, a stress interface is fewer, the thin-film thermocouple is not prone to falling off, the thickness is smaller, and the temperature measurement precision is high. Meanwhile, the thin film thermocouple with the crystal face preferred orientation can be prepared on an unpolished curved surface of the bonding coating by overcoming stress and breaking through the limitation of a traditional plane substrate, so that the thin film thermocouple has relatively high stability.

Description

technical field [0001] The invention relates to a technology for measuring the surface temperature of a high-temperature alloy, and specifically provides a method for preparing a crystal plane preferred orientation film thermocouple on a metal surface, so as to realize rapid and accurate acquisition of temperature data on the surface of a high-temperature alloy. Background technique [0002] Using thin-film thermocouples to measure temperature is a common method to obtain real-time temperature data of high-temperature parts of aero-engines. This technology can effectively avoid overheating of aeroengine blades and provide data support for engine design. However, the combination of thin-film thermocouples on the turbine blades requires the preparation of an insulating layer on the turbine blades. The insulating layer needs to have good insulation, high-temperature bonding ability, and is not easy to fall off, which leads to a certain thickness and affects to temperature meas...

AI Technical Summary

Problems solved by technology

[0004] Existing bonding coatings usually have a relatively large thickness, at least tens of microns, which affects heat conduction efficiency. Excessive thickness makes it more difficult for thin-film thermocouples to achieve thermal balance between the bonding coating and the surface of the workpiece, and it is impossible to measure the temperature instantaneously.