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Al-Ti-B target material and powder solid phase alloying sintering method thereof

A technology of solid-phase alloying and sintering method, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems that the content is limited and cannot be used to prepare titanium and boron-aluminum-titanium-boron alloy targets, etc. , to achieve low production cost, avoid melting and flow, and short process flow

Active Publication Date: 2020-07-28
CHANGSHA XUNYANG NEW MATERIAL TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In the high-temperature aluminum melt, add potassium fluotitanate and potassium fluoborate compounds, and use the reduction reaction between the aluminum liquid and these two compounds at high temperature to obtain an aluminum-titanium-boron master alloy with a composition of 2% to 3%. , patents CN201711352357.6, CN201711166867.4, CN201210093195.X, etc. all use the chemical reaction of potassium fluorotitanate and potassium fluoroborate in aluminum liquid to obtain aluminum-titanium-boron intermediate alloys. The content of titanium and boron in these alloys is limited. The content of titanium is 1% to 10%, and the content of boron is 0.5 to 5%, both of which are used as grain refiners for aluminum alloys. This method cannot be used to prepare aluminum-titanium-boron alloy targets with high titanium and boron content.

Method used

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  • Al-Ti-B target material and powder solid phase alloying sintering method thereof
  • Al-Ti-B target material and powder solid phase alloying sintering method thereof
  • Al-Ti-B target material and powder solid phase alloying sintering method thereof

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Embodiment 1

[0033] The embodiment of the present invention provides a solid phase alloying and sintering method of aluminum titanium boron target powder, which includes the following steps:

[0034] Step 1: Choose the average particle size of the powder to be 10μm. Elemental aluminum powder, titanium powder and boron powder with a purity of more than 99.9%. The atomic percentage of aluminum powder and titanium powder is: Al:Ti=80%:20%. First, mix the aluminum and titanium powders together. Add boron powder according to 1% of the total amount of aluminum and titanium mixed powder atoms; weigh the aluminum powder, titanium powder and boron powder in the above proportions, put them in the mixing tank, and mix on the three-dimensional mixer for 30 minutes ;

[0035] Step 2: Put the mixed materials in step 1 into a planetary high-energy ball mill for ball milling. The ball-to-material ratio is 10:1, and the milling time is 1h. The ball mill tank can be filled with a protective atmosphere such as a...

Embodiment 2

[0041] The embodiment of the present invention provides a solid phase alloying and sintering method of aluminum titanium boron target powder, which includes the following steps:

[0042] Step 1: Choose the average particle size of the powder to be 50μm. Elemental aluminum powder, titanium powder and boron powder with a purity of more than 99.9%. The atomic percentage of aluminum powder and titanium powder is: Al:Ti=20%:80%. First, mix the aluminum and titanium powders together. Add boron powder according to 20% of the total atom amount of the aluminum-titanium mixed powder; weigh the aluminum powder, titanium powder and boron powder in the above proportions, put them into the mixing tank, and mix on the three-dimensional mixer for 60 minutes ;

[0043] Step 2: Put the mixed materials in step 1 into a planetary high-energy ball mill for ball milling. The ball-to-material ratio is 10:1 and the milling time is 12h. The ball mill tank can be filled with a protective atmosphere such as...

Embodiment 3

[0049] The embodiment of the present invention provides a solid phase alloying and sintering method of aluminum titanium boron target powder, which includes the following steps:

[0050] Step 1: Choose the average particle size of the powder to be 20μm. Elemental aluminum powder, titanium powder and boron powder with a purity of more than 99.9%. The atomic percentage of aluminum powder and titanium powder is: Al:Ti=70%:30%. First, mix the aluminum and titanium powders together. Add boron powder according to 10% of the total atomic amount of the aluminum-titanium mixed powder; weigh the aluminum powder, titanium powder and boron powder in the above proportions, put them in the mixing tank, and mix on the three-dimensional mixer for 40 minutes ;

[0051] Step 2: Put the mixed materials in step 1 into a planetary high-energy ball mill for ball milling. The ball-to-material ratio is 10:1, and the milling time is 6 hours. The ball mill tank can be filled with a protective atmosphere su...

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Abstract

The invention provides an Al-Ti-B target material and a powder solid phase alloying sintering method thereof. The method comprises the following steps of firstly, weighing and mixing, secondly, ball grinding mechanical alloying, thirdly hot pressing sintering, fourthly, demolding, fifthly, annealing treatment and sixthly, forging. According to the Al-Ti-B target material and the powder solid phasealloying sintering method thereof, high-content Ti and B are added into an Al matrix to be prepared into the Al-Ti-B target material, the content of Ti can reach up to 80%, and the content of B can reach up to 20%; on the basis of an Al-Ti-B ternary alloy, other elements can be added to obtain the alloy target material with more elements; due to the fact that the low temperature and large pressure solid phase sintering method, melting and flowing of low-melting-point alloy elements are avoided, and through the diffusion action, alloying between high-melting-point alloy elements and low-melting-point alloy elements is achieved; and the technological process is short, product quality is stable, production cost is low, and the Al-Ti-B target material and the method are suitable for batched production.

Description

Technical field [0001] The invention relates to the new technical field of non-ferrous metal functional materials and powder metallurgy processing, in particular to an aluminum titanium boron target material and a powder solid phase alloying sintering method. Background technique [0002] Metal and alloy targets can use physical vapor deposition or chemical vapor deposition techniques such as magnetron sputtering and plasma sputtering to form nano-thick films on the surface of other metals, ceramics or polymer materials to achieve hardness and corrosion of other materials The improvement of physical and chemical properties such as electrical conductivity can achieve the purpose of surface modification of other materials. Moreover, the sputtering technology performed under vacuum or gas protection will not cause environmental pollution. Compared with traditional electroplating methods, it is an environmentally friendly green surface treatment technology. [0003] Surface modificati...

Claims

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Application Information

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IPC IPC(8): C23C14/34B22F5/00B22F3/14B22F3/10B22F3/24B22F3/17B22F9/04C22C21/00C22C14/00
CPCC23C14/3414B22F5/00B22F3/14B22F3/1007B22F3/24B22F3/17B22F9/04C22C21/003C22C14/00B22F2003/248B22F2009/043
Inventor 余琨余鹏
Owner CHANGSHA XUNYANG NEW MATERIAL TECH CO LTD
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