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A kind of solid lubricating multilayer composite film and preparation method thereof

A multi-layer composite film, solid lubrication technology, applied in the direction of coating, superimposed layer plating, metal material coating process, etc., can solve the problems of low bonding strength, low friction coefficient and wear rate, insufficient lubrication performance of lubricating film, etc. Achieve the effect of high bonding strength, improved lubrication and wear performance, and excellent wear resistance

Active Publication Date: 2018-11-13
GUANGDONG INST OF NEW MATERIALS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The purpose of the present invention is to provide a solid lubricating multilayer composite film for the problem of insufficient lubricating performance of the above-mentioned lubricating film, which has high bonding strength, low friction coefficient and wear rate

Method used

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  • A kind of solid lubricating multilayer composite film and preparation method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] ① Use a stainless steel substrate, grind and polish the surface of the substrate with sandpaper, and then dry it after ultrasonic degreasing and derusting cleaning, then put it in a vacuum chamber, the background vacuum degree is ≤5×10 -3 Pa, the matrix is ​​cleaned by ion bombardment;

[0025] ② Deposition of metal bottom Ti layer: argon pressure of 0.2Pa, metal Ti target power of 12W / cm 2 , the bias voltage is 300V, the ion source power is 0.5kW, the time is 10min, and the thickness is 97nm;

[0026] ③ Turn off the Ti target, turn on the CuNiIn target, and deposit the CuNiIn layer: the argon pressure is 0.5Pa, and the power of the CuNiIn target is 5W / cm 2 , the bias voltage is 40V, the ion source is 0.8kW, the time is 8min, and the thickness is 0.12μm;

[0027] ④ Turn off the CuNiIn target, turn on the Ti target, and deposit the Ti layer of the metal transition layer: the argon pressure is 0.5Pa, and the Ti target power is 5W / cm 2 , the bias voltage is 500V, the io...

Embodiment 2

[0032] ①A titanium alloy substrate is used. After grinding and polishing the surface of the substrate with sandpaper, ultrasonic degreasing, rust removal, cleaning, drying, and putting it in a vacuum chamber, the background vacuum degree is ≤5×10 -3 Pa, the matrix is ​​cleaned by ion bombardment;

[0033] ② Deposition of metal primer Cr layer: argon pressure of 0.5 Pa, metal Cr target power of 9W / cm 2 , the bias voltage is 200V, the ion source is 1.0kW, the time is 20min, and the thickness is 187nm;

[0034] ③Close the Cr target, open the CuNiIn target, and deposit the CuNiIn layer: the argon pressure is 1.0Pa, and the CuNiIn target power is 9W / cm 2 , the bias voltage is 100V, the ion source is 0.6kW, the time is 25min, and the thickness is 0.44μm;

[0035] ④ Turn off the CuNiIn target, turn on the Cr target, and deposit the Cr layer of the intermediate metal transition layer: the argon pressure is 1.0Pa, and the Cr target power is 9W / cm 2 , the bias voltage is 300V, the ion ...

Embodiment 3

[0040] ①Using high-speed steel substrate, after grinding and polishing the surface of the substrate with sandpaper, ultrasonic degreasing, rust removal, cleaning, drying, and putting it in a vacuum chamber, the background vacuum degree is ≤5×10 -3 Pa, the matrix is ​​cleaned by ion bombardment;

[0041] ② Deposition of the W layer of the metal base layer: the argon pressure is 0.8Pa, and the power of the metal W target is 5W / cm 2 , the bias voltage is 100V, the ion source is 1.5kW, the time is 30min, and the thickness is 0.27μm;

[0042] ③ Turn off the W target, turn on the CuNiIn target, and deposit the CuNiIn layer: the argon pressure is 2.0Pa, and the CuNiIn target power is 12W / cm 2 , the bias voltage is 180V, the ion source is 0.4kW, the time is 50min, and the thickness is 0.69μm;

[0043] ④ Turn off the CuNiIn target, turn on the W target, and deposit the intermediate metal transition layer W layer: the argon pressure is 2.0Pa, and the W target power is 12W / cm 2 , the ...

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Abstract

The invention discloses a solid lubricating multilayer composite membrane and a preparation method thereof. The solid lubricating multilayer composite membrane consists of a substrate (1), a metal bottom layer Me (2), a CuNiIn layer (3), a metal transition layer Me (4) and an MoS2-Me layer (5) in sequence. The preparation method comprises the following steps: by adopting a magnetron sputtering method, firstly depositing the metal bottom layer (2) on the substrate (1), and then alternately depositing the CuNiIn layer (3), the metal transition layer Me (4) and the MoS2-Me layer (5) in sequence to form a multilayer structure, wherein the MoS2-Me layer (5) is at the outermost layer. The solid lubricating composite membrane with the multilayer structure has the performance features of being high in bonding strength and low in friction coefficient which is as low as 0.06, has excellent self-lubricating performance, anti-occlusion performance and friction durability, and can be applied to the components such as bearings, gears, blades, tools and moulds.

Description

technical field [0001] The invention belongs to the technical field of surface engineering, in particular, a kind of Me / CuNiIn / Me / MoS deposited by magnetron sputtering technology 2 -Me multi-layer composite film method, the present invention can be applied to the surface self-lubricating, anti-occlusion and anti-wearing treatment of various metal workpieces. Background technique [0002] MoS 2 Known as the king of solid lubrication, it has excellent self-lubricating properties and is widely used in moving parts such as bearings, gears, knives, and processing tools and molds. But MoS 2 Oxidation is prone to occur in humid atmosphere or oxidizing environment, which degrades its lubricating performance and greatly reduces the wear life. The existing literature shows that the method of doping or composite film is an effective way to improve the MoS 2 Method of lubricating wear resistance. Such as MoS doped with Ti and Cr metal elements 2 -Ti, MoS 2 -Cr film, the film stru...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/02C23C14/14C23C14/06C23C14/35C23C28/00
CPCC23C14/025C23C14/0623C23C14/14C23C14/35C23C28/321C23C28/34
Inventor 韦春贝代明江侯惠君林松盛李琪石倩胡芳赵利曾威
Owner GUANGDONG INST OF NEW MATERIALS
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