Method for preparing ZnO/Al film on solar cell without introduced electrode

Abstract

The invention belongs to the field of novel transparent conducting materials and particularly relates to a method for preparing ZnO / Al film on a solar cell without an introduced electrode. The solar cell without the introduced electrode is used as a substrate, cleaned before being sent into a magnetron sputtering reaction chamber, pure Al is used as target for magnetron sputtering to obtain an Al film 20-300 nanometers in thickness, the substrate is then placed in a vapor deposition chamber, oxygen and with argon with Zn(CH2CH3)2 are fed into the vapor deposition chamber, a ZnO film 50-600 nanometers in thickness is obtained after deposition, and at last, under oxygen atmosphere, annealing treatment is performed to the substrate with the ZnO film and the Al film at 400-600 DEG C to obtain the ZnO / Al film. The method has the advantages that the preparation process is simple, the deposition is easy to control, the prepared transparent conducting film has good uniformity and excellent photoelectric performance, the transparent conducting film is used as back electrode of the solar cell to replace the traditional aluminum electrodes, and conversion efficiency of the solar cell is further improved.

Description

technical field [0001] The invention belongs to the field of novel transparent conductive materials, and in particular relates to a method for preparing a ZnO / Al thin film on a solar battery sheet without introducing electrodes. Background technique [0002] With the development of society and the rapid development of science and technology, the demand for functional materials is increasing. New functional materials have become the key to the development of new technologies and emerging industries. With the development of industries such as solar energy, flat panel display and semiconductor lighting, a new Functional materials—transparent conductive materials have emerged and developed accordingly. [0003] A solar cell is a photoelectric semiconductor sheet that uses sunlight to generate electricity directly. As long as it is exposed to light, it can output voltage and current in an instant. The electrode of a traditional solar cell is made by screen printing, and the cond...

AI Technical Summary

Problems solved by technology

However, although metal electrodes have relatively good electrical conductivity, there are many problems. The biggest problem is that because the metal electrodes themselves are opaque, a large part of the light is reflected and cannot be absorbed. The conversion efficiency of solar cells in industrial production is generally between 14-19%. Therefore, the development of new transparent conductive materials to replace traditional metal electrodes and improve the efficiency of solar cells has become the most critical research hotspot. question

[0004]The ZnO thin film is a new type of wide bandgap compound semiconductor material, the raw material is easy to get and cheap, and has a higher melting point, exciton binding energy and good electromechanical Coupling and low electron-induced defects. In addition, the epitaxial growth temperature of the film is low, which is beneficial to reduce equipment costs, inhibit solid phase out-diffusion, improve film quality, and is easy to achieve doping. Among them, ZnO / Al composite back The replacement of the traditional aluminum electrode by the electrode can enhance the light absorption, thereby increasing the short-circuit current, improving the conversion efficiency of the solar cell, and improving the stability of the cell. At present, there are few domestic researches on the composite back electrode material, and its preparation method is not mature. , such as the chemical sol-gel method, the problem is that it is difficult to control the thickness of the film and the uniformity of doping, such as molecular beam epitaxy, the problem is that the crystallinity of the material and the concentration of doping particles are difficult to control

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