Method for preparing magnetic recording exchange coupling complex film

Abstract

The invention relates to a method for preparing magnetic recording exchange coupling complex film. The method takes flat glass as a substrate and takes a silver target, an iron target, a ruthenium target and an iron-platinum alloy target as a target source, and in a magnetron sputtering furnace, at normal temperature of 20 DEG C plus or minus 1 DEG C, in argon atmosphere and magnetic field condition, in a water circulating cooling state and under constant vacuum degree of 1.0Pa, the exchange coupling complex film is prepared by magnetron sputtering, then high temperature annealing is carried out in a vacuum condition, the iron-platinum alloy is phase-changed to ensure a soft magnetic layer and a hard magnetic layer to combine tightly, and the complex film is silver-gray and of the thickness of 55nm, thus reducing the coercive force of the complex film, satisfying the writing field of a magnetic head and increasing the properties of a super-high density magnetic disk. The preparing method has short process flow, does not pollute the environment and is an ideal method for preparing the magnetic recording exchange coupling complex film.

Description

technical field [0001] The invention relates to a method for preparing a magnetic recording exchange coupling composite film, and belongs to the technical field of material structures and preparation methods of magnetic recording information storage devices. Background technique [0002] Magnetic recording is the core technology of information storage. The development of information technology has higher and higher requirements for magnetic recording. Improving the magnetic recording density is the core of information storage. The perpendicular magnetic recording medium film is the key to achieve 1Tbit / in 2 The key technology of ultra-high recording density requires that the perpendicular magnetic recording medium film has a smaller grain size, but the extremely fine grain size of the magnetic grain may produce a superparamagnetic effect, thereby reducing the thermal stability of the dielectric film. To maintain the dielectric film The thermal stability of the magnetocrystal...

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Problems solved by technology

[0002] Magnetic recording is the core technology of information storage. The development of information technology has higher and higher requirements for magnetic recording. Improving the magnetic recording density is the core of information storage. The perpendicular magnetic recording medium film is the key to achieve 1Tbit / in 2 The key technology of ultra-high recording density requires that the perpendicular magnetic recording medium film has a smaller grain size, but the extremely fine grain size of the magnetic grain may produce a superparamagnetic effect, thereby reducing the thermal stability of the dielectric film. To maintain the dielectric film The thermal stability of the magnetocrystalline anisotropy constant Ku must be increased, but the high coercive force generated by the high Ku value has brought new difficulties, far exceeding the writing field of the current writing head, making writing difficult. In order to solve these problems, patterned magnetic recording, heat-assisted magnetic recording, and tilted magnetic recording have been proposed, but these dielectric films are very difficult to prepare

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