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Preparation method of high-cleanliness metal foil and preparation method of metal mask plate strip

A technology of metal foil and high cleanliness, applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problem that the uniformity is difficult to control properly, processing or use is not as good as etching, and the composition of metal foil is limited, etc. low investment in manufacturing equipment, good cleanliness and purity, and easy quality control

Pending Publication Date: 2022-05-06
MAGIC STAR TECHNOLOGY (NINGBO) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] First, the composition of the metal foil produced by this method is limited by the choice of chemicals in the plating solution formulations available
[0007] Second, for metal foils composed of multi-component alloys, when the metal foil is deposited by electroforming, the uniformity of the composition is difficult to properly control
[0008] Third, the ultra-thin metal foil material made by the electroforming method is weak, so it is not as good as an etched precision metal mask in subsequent processing or use.
The traditional etching mask, electroforming mask, and hybrid mask use different materials, and the positioning requirements and methods in the use process are different, which leads to complex positioning process of the mask, low work efficiency and high cost

Method used

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  • Preparation method of high-cleanliness metal foil and preparation method of metal mask plate strip
  • Preparation method of high-cleanliness metal foil and preparation method of metal mask plate strip
  • Preparation method of high-cleanliness metal foil and preparation method of metal mask plate strip

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Experimental program
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Effect test

Embodiment 1

[0071] Such as figure 2 As shown, a method for preparing a high-clean metal foil material described in this embodiment specifically includes the following steps:

[0072] S201, metal powder filling; clean metal powder is filled into the metal powder dispenser of the laser welding processing equipment after being screened by particle size, wherein the material of the metal powder is Invar alloy, and the mass percentage of Invar alloy is Ni: 35 ~39wt%, the balance is Fe and other trace elements; among them, the metal powder within the required powder particle size range is selected during screening.

[0073] S202, metal rough foil forming; the metal powder dispenser uniformly injects the metal powder onto the substrate on the working platform in the laser welding processing equipment to form a metal powder layer, and then uses the laser plane scanner in the laser welding processing equipment to The metal powder layer is welded into a metal thick foil; the thickness of the meta...

Embodiment 2

[0090] Such as figure 2 As shown, the preparation method of a high-clean metal foil material described in this embodiment is roughly the same as that of Embodiment 1, the only difference is that it also includes a metal powder forming step, which is specifically as follows:

[0091] S199, metal smelting; smelting the selected high-purity metal materials by means of vacuum smelting, so that the metal materials are in a molten state; when selecting pure metals, select some with a purity higher than 99%, an oxygen content 4 Pa or 10 -4 -100mbar, melting power is 200~1200KW.

[0092] S200, making metal powder; the molten metal is atomized, cooled, and solidified to form fine clean metal powder; the molten metal is atomized in an inert, reducing, or vacuum atmosphere, and the particle size of the powder The size range is 0.1~60µm.

[0093] Preferably, in step S199, remelting is performed according to the cleanliness or purity of the required metal, and the remelting method is el...

Embodiment 3

[0096] Such as Figure 5 As shown, the preparation method of a high-clean metal foil material described in this embodiment is roughly the same as that of embodiment 1 or embodiment 2, the difference is that based on the processing method of step S202; in an inert atmosphere or a reducing atmosphere Under the environment 9, the metal powder dispenser 1 moves along the X-axis or the X-Y axis to dispense a layer of metal powder on the substrate of the working platform, and the thickness of the dispensed metal powder layer is 1-300 μm. The laser plane scanner performs plane scanning and welding on the metal powder layer. When scanning, the laser energy is 50~500W, and the laser energy density is 10~350J / mm 3 , the scanning speed is 100~5000mm / sec, so that the metal powder layer 2 on the substrate is welded with the formed metal coarse foil 8 to form a continuous metal coarse foil, and the continuous metal foil is formed by welding one by one on the substrate The thick metal foils...

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Abstract

The invention discloses a preparation method of a high-cleanliness metal foil and a preparation method of a metal mask plate strip. The preparation method comprises the following steps: filling metal powder into a metal powder dispensing device of laser welding processing equipment; welding the metal powder layer into a metal coarse foil by using a laser plane scanner in laser welding processing equipment; primary heat treatment; precisely rolling; rolling the crude metal foil raw material subjected to primary heat treatment into a required high-cleanliness thin metal foil material in a normal-temperature precise cold rolling manner; performing secondary heat treatment; the high-cleanliness metal foil obtained through the high-cleanliness metal foil preparation method is used for preparing precision metal mask plate strips, metal foil pattern processing is carried out after cleaning, and the precision metal mask plate strips are cut and formed after patterning processing is completed; the manufacturing process has the advantages of few procedures, low production cost, and high cleanliness and yield of the metal foil.

Description

technical field [0001] The invention relates to the technical field of metal mask preparation, in particular to a method for preparing a high-clean metal foil and a metal mask strip. Background technique [0002] OLED (Organic Light Emitting Diode) is an organic light-emitting diode. Compared with liquid crystal displays, it has the advantages of light weight, wide viewing angle, fast response time, low temperature resistance and high luminous efficiency. It is regarded as the next generation of new display technology. Generally, vacuum thermal evaporation technology is used to prepare organic electroluminescent thin films, that is, organic semiconductor materials are heated in a vacuum environment, the materials are sublimated by heat, and organic thin film devices with designed shapes are formed on the surface of the substrate through metal masks with special sub-pixel patterns. The stacked structure undergoes continuous deposition of various materials, and the two ends of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B22F5/00B22F3/105B22F3/18B22F3/24B22F9/08C23C14/04C23C14/24C23F1/02B23P15/00
CPCB22F5/00B22F3/105B22F3/24B22F3/18B22F9/082C23C14/042C23C14/24C23F1/02C23C14/0015B23P15/00B22F2003/248B22F2009/0848B22F2009/0852
Inventor 陈鼎国
Owner MAGIC STAR TECHNOLOGY (NINGBO) CO LTD
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