Runway type micro-ring optical switch based on silicon dioxide/polymer mixed waveguide and preparation method of runway type micro-ring optical switch

Abstract

The invention discloses a silicon dioxide / polymer mixed waveguide-based runway type micro-ring optical switch and a preparation method thereof, and belongs to the technical field of silicon dioxide / polymer mixed waveguide optical integrated chip preparation. The structure is composed of a Si substrate, a SiO2 lower cladding layer, a polymer core layer, a polymer upper cladding layer and a metal electrode from bottom to top. The polymer core layer is composed of a micro-ring resonance part and a coupling part; the micro-ring resonance part is formed by sequentially connecting a first bent waveguide, a first straight waveguide, a second bent waveguide and a second straight waveguide to form a runway type structure; the coupling part is composed of an input straight waveguide, a third straight waveguide and an output straight waveguide, and the second straight waveguide and the third straight waveguide form a directional coupler; by applying modulation voltage to the metal electrode, the function of the optical switch can be realized. The optical switch has the advantages of low loss, compact structure, low power consumption, high response speed, large extinction ratio and the like, and plays roles of optical domain optimization, routing, protection, power balance and the like in an optical network.

Description

technical field [0001] The invention belongs to the technical field of preparation of silicon dioxide / polymer hybrid waveguide optical integrated chips, and in particular relates to a racetrack-type micro-ring optical switch based on silicon dioxide / polymer hybrid waveguide and a preparation method thereof. Background technique [0002] The all-optical network represented by Optical Add Drop Multiplexer (OADM) and Optical Cross Connector (OXC) uses optical network switch to replace the current electrical network switch, thus saving optical- The step of electrical-to-optical conversion increases the speed, bandwidth, and capacity of optical communications. With the increase of interactive ports, higher requirements are placed on the size and power consumption of optical switches. The silica-based planar lightwave circuit (PLC) device that is common in the market today has the advantages of low loss, high stability, and high coupling efficiency. However, the thermo-optic coe...

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Problems solved by technology

However, the thermo-optic coefficient of silica-based planar optical waveguide (PLC) is only 1.19×10 -5 K -1 , the power consumption used to make active optical waveguide devices is often only tens of milliwatts, and the response speed is also at the level of several milliseconds

At present, the common silica-based planar optical waveguide (PLC) has a core-in-pack refractive index difference of Δ=0.75%. The low refractive index difference leads to a core layer size of 6 μm×6 μm and a minimum bending radius of 5 mm, resulting in a smaller device size. Large, difficult to achieve large-scale integration

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