Tunable laser and preparation method thereof

Abstract

The present invention provides a tunable laser and a preparation method thereof. The tunable laser comprises a gain region, a phase region and a grating region which are located on the same substrate, have the same height and are applied to each other. The gain region comprises in order from down to up: a lower waveguide layer, an active layer and an upper waveguide layer, the active layer is a multi-quantum well structure, the multi-quantum well structure comprises a well layer and a barrier layer which are alternatively superposed, the main body materials of the well layer and the barrier layer are both InGaAlAs quaternary compounds; the side surfaces, close to the phase region, of the lower waveguide layer, the active region and the upper waveguide layer are subjected to corrosion to form an inclined plane; the phase region and the grating region both comprise passive layers, and the passive layer of the grating region is provided with a grating structure; and the side surface, close to the inclined plane, of the phase region is consistent with the inclined plane to allow the gain region and the phase region to be applied. The side wall of the gain region is subjected to corrosion to form the inclined plane so as to effectively avoid material stack formed by the phase region and the grating region at a joint interface when joining growth of the passive layer materials and reduce the light loss and light reflection at the interface.

Description

technical field [0001] The invention belongs to the field of semiconductor optoelectronic integrated devices, and more specifically relates to a tunable laser and a preparation method thereof. Background technique [0002] Wavelength division multiplexing (WDM) optical communication systems can effectively utilize the capacity of optical fibers by simultaneously transmitting multiple wavelengths. In WDM systems, tunable lasers can greatly reduce the amount of device inventory in manufacturing and operation. When using a single-wavelength light source like a distributed feedback (DFB) laser, it is necessary to prepare many lasers with different emission wavelengths, which greatly increases the cost. Using tunable lasers requires several devices to cover all wavelengths, and it is also very convenient to replace failed devices. [0003] Distributed Bragg Reflection (DBR) tunable lasers are used in WDM systems because of their compact size, high mechanical reliability and eas...

AI Technical Summary

Problems solved by technology

[0004] The existing two-segment / three-segment DBR lasers are designed and manufactured using InGaAsP / InP materials, but their tunable range is small, and the electronic confinement ability is weak, and at higher temperatures, the modulation bandwidth will be significantly reduced, so the device Small operating temperature range

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