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Diamond-like composite coating and preparation method thereof

A composite coating and diamond layer technology, which is applied in metal material coating technology, coating, ion implantation plating, etc., can solve the problem of insufficient smoothness and density of the surface, hardness, unsatisfactory wear resistance, and unsatisfactory wear and corrosion resistance. and other problems, to improve the overall toughness and wear and corrosion resistance, reduce the cost of preparation, and increase the effect of bonding force

Active Publication Date: 2017-05-31
SHENZHEN INST OF ADVANCED TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to overcome the above-mentioned deficiencies of the prior art, to provide a diamond-like composite coating and its preparation method, to solve the problem that the surface of the existing diamond-like composite coating is not smooth enough, and the wear resistance and corrosion resistance are not ideal. technical problem
[0007] Another object of the present invention is to provide a wear-resistant device to solve the technical problems of unsatisfactory hardness and wear resistance in existing wear-resistant devices

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  • Diamond-like composite coating and preparation method thereof
  • Diamond-like composite coating and preparation method thereof
  • Diamond-like composite coating and preparation method thereof

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preparation example Construction

[0036] Correspondingly, the embodiment of the present invention also provides a method for preparing the diamond-like carbon composite coating described above. The process of the preparation method is as follows Figure 4 shown, see also the diamond-like composite coating structure Figure 1-3 , including the following steps:

[0037] S01. Cleaning and etching the substrate: pre-cleaning the substrate 10 and then performing ion etching on it;

[0038] S02. Depositing a transition metal layer on the surface of the substrate: using an arc deposition method to deposit a transition metal on the surface of the substrate 10 that has been subjected to the ion etching process to form a transition metal layer 20;

[0039] S03. Depositing a transition metal boride layer on the surface of the transition metal layer: depositing the transition metal boride on the surface of the transition metal layer 20 by magnetron sputtering to form a transition metal boride layer 30;

[0040] S04. De...

Embodiment 1

[0060] The invention provides a diamond-like composite coating, which is deposited with a transition metal layer / (TiB) successively on the surface of a YG6 cemented carbide sample 2 layer / diamond-like layer)*n / TiB 2 layer; among them, (TiB 2 layer / diamond-like layer)*n means TiB 2 Layer / diamond-like layer alternately combined multilayer structure, n=1; the transition metal in the transition metal layer is Ti, and its thickness is 10nm; TiB 2 The layer thickness is 10 nm, and the diamond-like layer is 10 nm thick.

[0061] Its preparation method is as follows:

[0062] S11. Pretreatment: First, put the YG6 cemented carbide sample in distilled water for ultrasonic cleaning for 10 minutes, then put the sample in acetone solution for ultrasonic cleaning for 10 minutes, then put the sample in absolute ethanol solution for ultrasonic cleaning for 10 minutes, and then dry it with Dry the surface of the sample with nitrogen, and finally put the sample in a blast drying oven to dry...

Embodiment 2

[0071] The invention provides a kind of diamond-like composite coating, which is successively deposited with transition metal layer / (WB on the surface of YG6 cemented carbide sample 2 layer / diamond-like carbon layer)*n / WB 2 layer; among them, (WB 2 Layer / Diamond-like carbon layer)*n means WB 2 Layer / Diamond-like layer alternately combined multilayer structure, n=5; the transition metal in the transition metal layer is W, and its thickness is 10nm; WB 2 The layer thickness was 500 nm, and the diamond-like carbon layer was 500 nm thick.

[0072] Its preparation method is as follows:

[0073] S21. Pretreatment: First put the YG6 cemented carbide sample in distilled water for ultrasonic cleaning for 10 minutes, then put the sample in acetone solution for ultrasonic cleaning for 15 minutes, then put the sample in absolute ethanol solution for ultrasonic cleaning for 20 minutes, and then dry it with Dry the surface of the sample with nitrogen, and finally put the sample in a bla...

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Abstract

The invention discloses a diamond-like composite coating, a preparation method thereof and an abrasion-resistant component containing the diamond-like composite coating. The diamond-like composite coating comprises a transitional metal layer combined to the surface of a substrate and further comprises transitional metal boride layers and diamond-like layers, and the transitional metal boride layers and the diamond-like layers are sequentially combined to the surface of the transitional metal layer in the extension direction from the substrate to the transitional metal layer; the transitional metal boride layers and the diamond-like layers are combined by being alternately stacked at least one time, and the outermost layer is one transitional metal boride layer. Sufficient relief of internal stress of the diamond-like composite coating can be achieved, and the overall toughness, abrasion resistance and corrosion resistance of the diamond-like composite coating are improved. As for the preparation method, complex preparation processes are avoided, performance stability of the deposited diamond-like composite coating is ensured, and the preparation cost of the diamond-like composite coating is effectively reduced.

Description

technical field [0001] The invention belongs to the technical field of thin film materials, and in particular relates to a diamond-like composite coating and a preparation method thereof. Background technique [0002] Aluminum alloys and titanium alloys have high specific strength, good wear resistance, corrosion resistance, strong fatigue resistance, light weight and other excellent properties. They are ideal structural materials for aerospace, automobiles, rail transit and other fields, but they are difficult The processing characteristics seriously hinder the large-scale application of such materials. For example, the phenomenon of sticking knife and built-up edge in the process of cutting aluminum alloy is serious, which not only affects the peeling off of subsequent debris, but also directly tears the workpiece in severe cases. Titanium alloy has high chemical activity at high temperature, poor thermal conductivity, low elastic modulus, and large friction coefficient w...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/35C23C14/06C23C14/14C23C14/02
CPCC23C14/022C23C14/0605C23C14/067C23C14/14C23C14/325C23C14/35
Inventor 唐永炳朱海莉蒋春磊申京受
Owner SHENZHEN INST OF ADVANCED TECH
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