Manufacturing method and product of high-conductivity and low-reflectivity metal mesh
A metal grid, low reflectivity technology, applied in electrical digital data processing, data processing input/output process, instruments, etc. Long exposure time and other problems, to achieve the effect of reducing reflectivity, easy operation, and simple preparation process
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[0028] A method for manufacturing a metal grid with high conductivity and low reflectivity, comprising the following steps:
[0029] (1) Coating photoresist layers (1, 2) on the transparent substrate 3, the thickness of the photoresist layer is 20-60 microns, and the photoresist layer is formed by stacking two layers of photoresist layers with different etching rates (such as Figure 1~3 shown); and, the plasma etching rate of the photoresist material selected for the upper photoresist layer 1 is greater than the plasma etching rate of the photoresist material selected for the lower photoresist layer 2;
[0030] (2) The photoresist layer (1, 2) is imprinted by using the embossing template 4 with a raised circuit pattern on the bottom, and after the embossing template 4 is pulled out, a circuit pattern is formed in the photoresist layer (1, 2) Groove 5 (eg figure 2 shown);
[0031] (3) Carry out plasma etching to the photoresist layer (1, 2) after embossing, expose transpare...
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