Method for improving electrical properties of zinc oxide-based low voltage-sensitive ceramic film

Abstract

The invention relates to voltage-sensitive ceramic, and specially discloses a method for improving electrical properties of a zinc oxide-based low voltage-sensitive ceramic film. The method is characterized in that an aluminum foil as an absorption layer is coated on the surface of a zinc oxide-based low voltage-sensitive ceramic film sample; a liquid restraint layer is coated, pasted or covered on the surface of the aluminum foil; and the zinc oxide-based low voltage-sensitive ceramic film sample with the aluminum foil and the restraint layer is embedded in a mold and then is subjected to laser shock so that electrical properties of the zinc oxide-based low voltage-sensitive ceramic film sample are improved. Through a laser shock treatment technology, the method provided by the invention realizes surface treatment on a zinc oxide-based low voltage-sensitive ceramic film. Through the liquid restraint layer, the zinc oxide-based low voltage-sensitive ceramic film obtained by the method has a non-linear coefficient which is higher than a non-linear coefficient of the unshocked zinc oxide-based low-voltage voltage-sensitive ceramic film by above 24%, has breakdown voltage which is lower than breakdown voltage of the unshocked zinc oxide-based low-voltage voltage-sensitive ceramic film by above 30%, and has leakage current density which is lower than leakage current density of the unshocked zinc oxide-based low-voltage voltage-sensitive ceramic film by above 35%. The method provided by the invention can reduce film breakdown voltage and simultaneously improve a film non-linear coefficient.

Description

technical field [0001] The invention relates to a pressure-sensitive ceramic, in particular to a method for improving the electrical performance of a zinc oxide-based low-voltage pressure-sensitive ceramic thin film. Background technique [0002] Laser shock processing technology (Laser Shock Processing, referred to as LSP) is a high power density (10 9 W / cm 2 ), short-pulse (ns-level) laser irradiates the material, and the additional coating on the surface of the material is rapidly vaporized to form a plasma expansion explosion to generate a high-pressure shock wave, which causes the microstructure or physical properties of the material to change, thereby changing the performance of the material. surface treatment technology. [0003] At present, laser shock treatment technology is applied to the surface strengthening treatment of metal materials, such as various types of industrial steel, non-ferrous metal alloys and other fields, mainly to improve the mechanical proper...

AI Technical Summary

Problems solved by technology

[0004] For example, ZnO varistor has the advantages of excellent non-ohmic characteristics, small leakage current, large flow capacity, fast response time, and low cost. It is an ideal device for suppressing instantaneous high voltage and absorbing surge energy, and can be widely used in various In electrical equipment and electronic systems; in recent years, with the development of electronic products in the direction of miniaturization, thinning, integration and multi-function, it is required to lower the voltage of varistors. At present, the main method of preparing ZnO low voltage varistors is The methods include: wafer-type low-voltage varistors by controlling the growth of ZnO grains; multi-layer laminated low-voltage varistors using chip component preparation technology; ZnO low-voltage varistors using thin-film preparation technology; ZnO ceramics The thickness of the film is extremely small and can be adjusted between hundreds of nanometers and several microns, so it has very good potential and advantages in the preparation of low-power varistors with a varistor voltage lower than 5V. The thickness of the zinc oxide-based ceramic film is reduced At the same time, the varistor voltage is reduced, but the nonlinear coefficient is also reduced. When studying ZnO low-voltage varistor ceramics, in order to obtain a high nonlinear coefficient while reducing the varistor voltage, the researchers optimized the material group A lot of research work has been carried out in the aspects of element and component design and preparation and processing methods, and many scientific research results have been obtained, but the effect is not satisfactory.