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Aluminum oxide sintered product and method for producing the same

A manufacturing method and alumina technology, which is applied in the field of alumina sintered body and its manufacture, can solve the problems of integrated circuit damage and small electrostatic adsorption force, and achieve the effects of reduced leakage current and increased corrosion resistance

Inactive Publication Date: 2010-03-10
NGK INSULATORS LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Johnson-Rabbek type, although it can obtain high adsorption force, not only requires an expensive power supply with high current capacity, but also because of its leakage current, a small amount of current flows to the chip, so there is a possibility of electrical damage to the integrated circuit formed on the chip
Due to the above situation, the Coulomb type with less leakage current is used more, but the Coulomb type has the problem that the electrostatic adsorption force is smaller than that of the Johnson-Rabeck type.

Method used

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  • Aluminum oxide sintered product and method for producing the same
  • Aluminum oxide sintered product and method for producing the same
  • Aluminum oxide sintered product and method for producing the same

Examples

Experimental program
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Effect test

Embodiment 1

[0039] As the raw material powder, commercially available alumina (Al 2 o 3 ) powder, commercially available ytterbium fluoride (YbF 3 ) powder was wet-mixed for 4 hours using isopropanol as a solvent using a nylon jar and alumina balls with a diameter of 5 mm. The particle size of the raw material powder was measured by laser diffraction method. After mixing, the slurry was removed into a large tub and dried at 110° C. for 16 hours in a nitrogen stream. Then pass through a 30-mesh sieve to make blended powder. The resulting blended powder was mixed at 200kgf / cm 2 The pressure is uniaxially press-molded to produce a disc-shaped compact with a diameter of 50 mm and a thickness of about 20 mm, which is stored in a graphite mold for firing. Firing uses the hot pressing method. The pressurized pressure during firing is 100kgf / cm 2 , the atmosphere is a vacuum from room temperature to 1600°C, and then 1.5kgf / cm is introduced until the firing is completed at 1600°C 2 of nitr...

Embodiment 2～21、 comparative example 1～9

[0060] According to Example 1, the alumina sintered bodies of Examples 2 to 13 and Comparative Examples 1 to 9 were produced through the compositions and firing conditions in Table 1 and Table 2, and the same operations as in Example 1 were carried out (1) to (8) Determination of items. The results are shown in Table 1 and Table 2. When the firing temperature is 1700°C, the firing atmosphere is a vacuum from room temperature to 1600°C, and then 1.5kgf / cm is introduced during the period from 1600°C to 1700°C and until the firing is completed at 1700°C. 2 of nitrogen. In addition, in Comparative Example 9, since the firing was carried out in the air, the atmosphere was not particularly controlled.

[0061] As can be seen from Table 1, Examples 1 to 13, that is, for the fluoride (YbF 3 , YF 3 、LaF 3 ) mixture of alumina sintered by hot pressing and firing, the volume resistivity at room temperature is 1×10 13 ~1×10 16Ω·cm. Therefore, when these alumina sintered bodies are...

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Abstract

The invention provides an aluminum oxide sintered product which can be provided with volume resistivity adjusted between the coulombian and Johnson type and excellent corrosion resistance. The aluminum oxide sintered product of the invention is the sintered product with layer phase containing a rare-earth element and fluorine among grains of aluminum oxide serving as a main component, or a phase containing a rare-earth element and fluorine along edges of grains of aluminum oxide serving as a main component. Such an aluminum oxide sintered product includes a phase containing a rare-earth element and a fluorine element among grains of aluminum oxide, the phase not being in the form of localized dots but in the form of line segments, when viewed in an SEM image. An aluminum oxide sintered product according to the present invention can be readily adjusted to have a volume resistivity in the range of 1*10 <13> to 1*10<16> omega.cm, wherein the volume resistivity is calculated from a currentvalue after the lapse of 1 minute from the application of a voltage of 2 kV / mm to the aluminum oxide sintered product at room temperature.

Description

technical field [0001] The present invention relates to an alumina sintered body and a method for producing the same. Background technique [0002] Conventionally, in a semiconductor manufacturing apparatus, an electrostatic chuck is used to fix a wafer. An electrostatic chuck includes internal electrodes to which a voltage is applied and a dielectric layer laminated on the internal electrodes, and is configured such that electrostatic attraction is generated between the dielectric layer and the wafer when a voltage is applied to the internal electrodes with the wafer placed. . The electrostatic chuck has a unipolar type with one internal electrode and a bipolar type with a pair (ie, two) of internal electrodes separately provided. In the unipolar electrostatic chuck, the electrostatic attraction force is generated by applying a voltage between the internal electrode and the external electrode provided on the outside of the electrostatic chuck. In the bipolar electrostatic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/10C04B35/645
Inventor 寺谷直美胜田佑司小林义政
Owner NGK INSULATORS LTD
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