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Method for preparing lead magnesium niobate-lead titanate ferroelectric thin film

The technology of a ferroelectric thin film and lead magnesium niobate is applied in the field of preparation of ferroelectric thin films, and can solve the problems of poor ferroelectric properties, poor electro-optical properties and high sintering temperature of lead magnesium niobate-lead titanate ferroelectric thin films, Achieve the effect of smooth surface, enhanced ferroelectric properties and low sintering temperature

Inactive Publication Date: 2009-10-07
HARBIN INST OF TECH
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  • Summary
  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problems of poor ferroelectric performance, poor electro-optic performance, low purity, low density and high sintering temperature in the preparation process of the lead magnesium niobate-lead titanate ferroelectric film prepared by the existing method , providing a preparation method of lead magnesium niobate-lead titanate ferroelectric thin film

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  • Method for preparing lead magnesium niobate-lead titanate ferroelectric thin film
  • Method for preparing lead magnesium niobate-lead titanate ferroelectric thin film
  • Method for preparing lead magnesium niobate-lead titanate ferroelectric thin film

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specific Embodiment approach 1

[0011] Specific embodiment 1: The method for preparing lead magnesium niobate-lead titanate ferroelectric thin film in this embodiment is implemented in the following steps: 1. According to the chemical formula (1-x)Pb(Mg 1 / 3 Nb 2 / 3 )-xPbTiO 3 , Weigh lead acetate, magnesium acetate, niobium ethoxide and tetrabutyl titanate according to the stoichiometric ratio, where 0.301 / 3 Nb 2 / 3 )-xPbTiO 3 Sol; 6. The substrate was sonicated in acetone and absolute ethanol for 4-6 minutes, and then placed in the air to dry naturally; 7. (1-x)Pb(Mg) was added dropwise to the substrate after step 6 1 / 3 Nb 2 / 3 )-xPbTiO 3 Sol, spin-coated for 10s under the condition of the homogenization speed of 1000~2000r / min, then spin-coated at the homogenization speed of 3500~4500r / min for 20s, and then dried at the temperature of 40~80℃. Film D; 8. Put film D in a rapid heat treatment furnace at a temperature of 630 to 650°C for 8 to 15 minutes, and cool to room temperature with the furnace to obtain a lead ...

specific Embodiment approach 2

[0016] The second embodiment: The difference between this embodiment and the first embodiment is that x=0.32 in step 1. Other steps and parameters are the same as in the first embodiment.

specific Embodiment approach 3

[0017] Specific embodiment three: the difference between this embodiment and specific embodiment one and two is that x=0.34 in step one. Other steps and parameters are the same as in the first embodiment.

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Abstract

A method for preparing lead magnesium niobate-lead titanate ferroelectric thin film relates to a method for preparing ferroelectric thin film. The method of the invention settles the problems of inferior performance, inferior electrooptic performance, low purity, low density and high sintering temperature in preparing process in the lead magnesium niobate-lead titanate ferroelectric thin film prepared by the prior method. The method comprises the following steps: 1. weighting the raw material; 2. preparing a solution A; 3. preparing a solution B; 4. preparing a solution C; 5, preparing (1-x)Pb(Mg1 / 3Nb12 / 3-xPbTiO3 sol; 6. preprocessing substrate; 7. coating the sol on the substrate with a spin coater and drying for preparing a film D; and 8. calcining the film D in a fast heat treatment furnace, and then cooling to room temperature for obtaining the PMN-PT ferroelectric thin film. The ferroelectric thin film prepared according to the method has excellent ferroelectric performance and electrooptic performance, high purity, high density and lower crystallization temperature. The method of the invention has the advantages of simple technique, simple device, short preparing period, low cost of raw material and excellent availability on market.

Description

Technical field [0001] The invention relates to a method for preparing a ferroelectric film. Background technique [0002] Perovskite structure lead magnesium niobate-lead titanate (PMN-PT) is a typical representative of relaxor ferroelectrics. It is not only a ferroelectric material with excellent performance, but also because of its unique electrical, optical and optoelectronics It has broad application prospects in modern microelectronics, micro-electromechanical systems, information storage, etc. because of its high dielectric constant, large electrostrictive effect and adjustable piezoelectric bias characteristics. [0003] At present, there are many methods for preparing lead magnesium niobate-lead titanate ferroelectric thin films, but during the preparation process, PbO is easy to volatilize at high temperature, especially when the temperature is higher than 950℃, lead will volatilize in a large amount, which will be serious Pollution to the environment; the volatilizatio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B41/50C04B35/499C04B35/472
Inventor 冯明王文周玉柯华
Owner HARBIN INST OF TECH
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