The invention relates to a heating device of a
semiconductor heat treatment device, a service part of the heating device and a
repair method of the heating device. The heating device of the
semiconductor heat treatment device comprises a furnace body heat-insulating layer, a heater strip and a supporting insulating part, wherein the heater strip is fixed to the furnace body heat-insulating layer through the supporting insulating part. The heating device of the
semiconductor heat treatment device further comprises an auxiliary repair insulating part, wherein the auxiliary repair insulating part is erected between two adjacent sections, needing special reinforced insulation, of the heater strip, the auxiliary repair insulating part is of an h shape, and comprises a supporting connecting portion, a first
flange, a second
flange and a third
flange, the first flange, the second flange and the third flange perpendicularly extend out of the supporting connecting portion, the first flange and the second flange are coplanar, and extend in the direction opposite to the direction of the supporting connecting portion, the third flange is parallel to the first flange and the second flange, and is in the direction same as the direction of the second flange, and the deformed portion of the heater strip and the normal portion, adjacent to the deformed portion, of the heater strip are isolated by the portion, between the second flange and the third flange, of the supporting connecting portion. Therefore, when the heater strip deforms and needs repair, and an insulating part is damaged and falls off, the auxiliary repair insulating part is installed on the damaged portion of the heater strip, and it is ensured that the heater strip can be continuously used safely.