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485results about "Dry-cleaning apparatus" patented technology

Detergent injection systems and methods for carbon dioxide microelectronic substrate processing systems

Microelectronic substrate processing systems include a microelectronic substrate processing chamber that is configured to contain therein at least one microelectronic substrate. A carbon dioxide supply system is configured to supply densified carbon dioxide to the microelectronic substrate processing chamber. A detergent supply system is configured to supply detergent to the microelectronic substrate processing chamber.
Owner:MICELL TECH INC
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