Rare earth element oxyflouride powder spray material and sprayed article
a technology of rare earth element and oxyflouride, which is applied in the direction of natural mineral layered products, transportation and packaging, and cellulosic plastic layered products, etc. it can solve the problems of rare earth element fluoride sprayed coatings suffering from a technical problem, and the coatings of rare earth element fluoride are susceptible to corrosion, etc., to achieve high corrosion resistance, high corrosion resistance, and atmospheric plasma spraying
Inactive Publication Date: 2014-02-27
SHIN ETSU CHEM IND CO LTD
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Benefits of technology
The text states that rare earth element oxyfluoride powder can be sprayed onto articles using atmospheric plasma spraying. The resulting coated article has higher resistance to plasma etching and corrosion compared to articles coated with rare earth element oxide and fluoride in a halogen gas plasma. This makes it more durable and reliable.
Problems solved by technology
While aluminum, chromium and similar metal oxides are often used as the thermal spray material, the sprayed coatings of these oxide materials are susceptible to corrosion upon exposure to hot plasma.
These materials are thus inadequate for use in the semiconductor manufacturing process which may typically involve treatment in a halogen-based corrosive gas plasma atmosphere.
On the other hand, the rare earth element fluoride sprayed coatings suffer from a technical problem despite good corrosion resistance.
The plasma spraying of rare earth element fluoride has the problem that when the rare earth element fluoride is passed through a flame at 3,000° C. or higher for melting, the fluoride can be decomposed so that the material partially converts to a mixture of rare earth element fluoride and rare earth element oxide.
Method used
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[0029]Examples are given below by way of illustration and not by way of limitation.
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Abstract
A spray material comprising rare earth element oxyfluoride particles having an aspect ratio of up to 2, an average particle size of 10-100 μm, and a bulk density of 0.8-2 g / cm3, and containing not more than 0.5 wt % of carbon and 3-15 wt % of oxygen is suitable for air plasma spraying. An article having a sprayed coating of rare earth element oxyfluoride has high resistance against plasma etching and a long lifetime.
Description
CROSS-REFERENCE TO RELATED APPLICATION[0001]This non-provisional application claims priority under 35 U.S.C. §119(a) on Patent Application No. 2012-183302 filed in Japan on Aug. 22, 2012, the entire contents of which are hereby incorporated by reference.TECHNICAL FIELD[0002]This invention relates to a thermal spraying material in the form of rare earth element oxyfluoride powder, especially suited for use to form a sprayed coating having high corrosion resistance in a corrosive plasma atmosphere as encountered in the semiconductor device fabrication process, and an article having a sprayed coating of the thermal spraying material.BACKGROUND ART[0003]In the prior art, sprayed coatings having high corrosion resistance are used for protecting substrates in a variety of service environments. While aluminum, chromium and similar metal oxides are often used as the thermal spray material, the sprayed coatings of these oxide materials are susceptible to corrosion upon exposure to hot plasma...
Claims
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Patent Type & Authority Applications(United States)
IPC IPC(8): C09D5/18
CPCC09D5/18C23C4/11C23C4/134Y10T428/24413Y10T428/2982C23C4/10
Inventor HAMAYA, NORIAKITAKAI, YASUSHI
Owner SHIN ETSU CHEM IND CO LTD
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