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Composite processing technology of fine injection type hole

A compound machining and jetting technology, which is applied in the field of compound machining technology of fine jetting holes, can solve the problems of poor shape accuracy and surface roughness, difficulty in precise control of dimensional accuracy, and difficulty in ensuring machining accuracy, and achieves less deformation and wear. , good consistency, the effect of improving processing efficiency

Inactive Publication Date: 2005-10-26
TSINGHUA UNIV
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AI Technical Summary

Problems solved by technology

[0003] The use of precision machining to manufacture micro-sized holes has disadvantages such as difficult to guarantee machining accuracy, low machining efficiency, and difficult machining of complex shapes; in special machining, electron beam and ion beam machining need to be carried out under vacuum conditions, and the processing equipment is expensive. There are limitations in practical applications; laser processing usually has poor shape accuracy and surface roughness; the processing efficiency of EDM is low, and the loss of electrodes will affect the processing accuracy; electrochemical processing has the ability to achieve precision and micromachining in the processing mechanism. However, the traditional electrochemical processing includes photolithography and electrolytic processing, and the dimensional accuracy is not easy to control precisely in the process of electrolytic etching; while in the aspect of plastic deformation processing, precision stamping has the advantages of high productivity and good consistency of processing dimensions. However, the application of microstructure processing has yet to solve the key process problems

Method used

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  • Composite processing technology of fine injection type hole
  • Composite processing technology of fine injection type hole
  • Composite processing technology of fine injection type hole

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Embodiment Construction

[0027] The invention provides a compound processing technology for micro-spray holes, which is composed of micro-plastic deformation stamping processing and micro-electric discharge machining. Its combined processing process is as follows: (1) A series of punches 1 with different tip shapes and sizes are used. Firstly, according to the principle of rough machining first and then fine machining, multiple micro-stamping processes are performed to process strips on one side of the workpiece 2. There is a thin layer of metal with a thickness of less than 0.1mm left at the bottom of the bottom cavity with a fine inverted cone 4 (such as figure 1 (a) shown); (2) then turn over the workpiece 2, on its back side with the position of the inverted cone of the bottom die cavity 4 with the micro electric discharge machining electrode 3 (as figure 1 (b), figure 1 As shown in (c), the workpiece 2 is thinned by the micro electric discharge process, and the bottom cavity 4 is exposed at the ...

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Abstract

A combined technology for machining the shaped superfine spray orifices includes fine punching with the group of punching heads having different tip shapes to form the reverse conic cavities, and electrospark machining on their back to form the shaped superfine orifices.

Description

technical field [0001] The invention belongs to the technical field of micromachining, and in particular relates to a compound machining process for micro-jet-shaped holes for processing metal alloy materials by cross-merging micro-stamping and micro-electric discharge machining technologies. Background technique [0002] Micro-sized pores of metal alloy materials are widely used in many fields. For example, printer inkjet hole array, screen structure, spinneret and MEMS (micro electromechanical system) micro-jet, micro-pump and other fine structures. At present, the processing methods of array micro-holes involve precision machining, special processing and micro-processing. [0003] The use of precision machining to manufacture micro-sized holes has disadvantages such as difficult to guarantee machining accuracy, low machining efficiency, and difficult machining of complex shapes; in special machining, electron beam and ion beam machining need to be carried out under vacuu...

Claims

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Application Information

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IPC IPC(8): B23H5/04
Inventor 李勇陈旭鹏彭良强贾维溥张虹
Owner TSINGHUA UNIV
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