W-Cu composite powder with high thermal conductivity and low thermal expansion coefficient and preparation method thereof
A low thermal expansion coefficient, composite powder technology, applied in the direction of semiconductor devices, semiconductor/solid-state device parts, electric solid-state devices, etc., can solve the problem of W and Cu immiscible wettability, unfavorable material physical properties, and difficult mass production To achieve the effect of improving density and physical properties, less agglomeration, and reducing thermal expansion coefficient
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Embodiment 1
[0027] The preparation method of high thermal conductivity, low thermal expansion coefficient W-Cu composite powder is as follows:
[0028] Step 1: Precursor Preparation
[0029] Ammonium metatungstate (AMT, Aladdin, purity ≥ 99.95%) and copper nitrate (Cu(NO 3 ) 2 ·3H 2 O, Aladdin, purity ≥ 99.5%) are dissolved in deionized water, heated and stirred to obtain a mixed solution, and after the mixed solution is transparent, add oxalic acid (C 2 h 2 o 4 2H 2 O, analytically pure), the precipitate obtained after the mixed solution was stirred and evaporated to dryness is the W-Cu precursor.
[0030] Among them, the addition amount of copper nitrate and oxalic acid is 70.41% and 39% of the mass of ammonium metatungstate respectively.
[0031] Step 2: Hydrogen reduction
[0032] Fully grind the massive precursor obtained in step 1 in a mortar to obtain fine powder, put the burning boat containing the fine powder into a hydrogen (hydrogen purity ≥ 99.999%) reduction furnace f...
Embodiment 2
[0040] The chemical preparation method of W-Cu composite powder with high thermal conductivity and low thermal expansion coefficient is as follows:
[0041] Step 1: Precursor preparation
[0042] Ammonium metatungstate (AMT, Aladdin, purity ≥ 99.95%) and copper nitrate (Cu(NO 3 ) 2 ·3H 2 O, Aladdin, purity ≥ 99.5%) are dissolved in deionized water, heated and stirred to obtain a mixed solution, and after the mixed solution is transparent, add oxalic acid (C 2 h 2 o 4 2H 2 O, analytically pure), the precipitate obtained after the mixed solution was stirred and evaporated to dryness is the W-Cu precursor.
[0043] Wherein, the addition amount of copper nitrate and oxalic acid is respectively 31.29% and 38% of the mass of ammonium metatungstate.
[0044] Step 2: Hydrogen reduction
[0045] Fully grind the massive precursor obtained in step 1 in a mortar to obtain fine powder, put the burning boat containing the fine powder into a hydrogen (hydrogen purity ≥ 99.999%) reduc...
Embodiment 3
[0050] The preparation method of high thermal conductivity, low thermal expansion coefficient W-Cu composite powder is as follows:
[0051] Step 1: Precursor preparation
[0052] Ammonium metatungstate (AMT, Aladdin, purity ≥ 99.95%) and copper nitrate (Cu(NO 3 ) 2 ·3H 2 O, Aladdin, purity ≥ 99.5%) are dissolved in deionized water, heated and stirred to obtain a mixed solution, and after the mixed solution is transparent, add oxalic acid (C 2 h 2 o 4 2H 2 O, analytically pure), the precipitate obtained after the mixed solution was stirred and evaporated to dryness is the W-Cu precursor.
[0053] Wherein, the addition amounts of copper nitrate and oxalic acid are respectively 120.70% and 40% of the mass of ammonium metatungstate.
[0054] Step 2: Hydrogen reduction
[0055] Fully grind the massive precursor obtained in step 1 in a mortar to obtain fine powder, put the burning boat containing the fine powder into a hydrogen (hydrogen purity ≥ 99.999%) reduction furnace f...
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