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Nanocrystalline amorphous composite coating and preparation method thereof

A composite coating, nanocrystalline technology, applied in the direction of coating, nanotechnology, nanotechnology, etc., can solve the problems of thin coating, high friction coefficient, low bonding force of aluminum doped coating, etc., to achieve uniform distribution, The effect of excellent high temperature resistance, excellent strength and bond strength

Active Publication Date: 2021-06-25
SHENYANG SANJUKAITE CATALYST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Therefore, the technical problem to be solved by the present invention is to overcome defects such as low binding force, thin coating, limited service life and high friction coefficient of the aluminum doped coating in the prior art, thereby providing a nanocrystalline amorphous Composite coating and preparation method thereof

Method used

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  • Nanocrystalline amorphous composite coating and preparation method thereof
  • Nanocrystalline amorphous composite coating and preparation method thereof
  • Nanocrystalline amorphous composite coating and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0064] This embodiment is to deposit AlCrSiCN nanocrystalline amorphous composite coating on the surface of 304 stainless steel.

[0065] Stainless steel sheet pretreatment: Ultrasonic cleaning in acetone and alcohol for 10 minutes respectively.

[0066] Hang the stainless steel sheet on the tooling of the PEMS-3C plasma-enhanced magnetron sputtering coating system, close the vacuum chamber door, and evacuate. The coated targets are Cr targets and CrAl composite targets, both of which have a purity of 99.9 wt%.

[0067] Vacuum down to 1×10 -3 At Pa, the tooling rotation system is turned on at a speed of 3 revolutions per minute. Turn on the heating system, set the temperature to 400°C, until the temperature displayed by the thermocouple sensor in the vacuum chamber is 400°C, stabilize for 10 minutes, and keep the vacuum degree better than 1×10 -3 Pa.

[0068] 250 sccm of argon gas was introduced, the vacuum degree reached 1.0 Pa, the tungsten electrode was turned on, the f...

Embodiment 2

[0078] This embodiment is to deposit AlCrSiCN nanocrystalline amorphous composite coating on the surface of M2 high speed steel.

[0079] Pretreatment of high-speed steel sheet: Ultrasonic cleaning in acetone and alcohol for 10 minutes respectively.

[0080] Hang the M2 high-speed steel on the tooling of the PEMS-3C plasma-enhanced magnetron sputtering coating system, close the vacuum chamber door, and evacuate. The coated targets are Cr targets and CrAl composite targets, both of which have a purity of 99.9 wt%.

[0081] Vacuum down to 1×10 -3 At Pa, the tooling rotation system is turned on at a speed of 3 revolutions per minute. Turn on the heating system, set the temperature to 500°C, until the temperature displayed by the thermocouple sensor in the vacuum chamber is 500°C, stabilize for 10 minutes, and keep the vacuum degree better than 1×10 -3 Pa.

[0082] 300sccm of argon gas was introduced, the vacuum degree reached 2.0Pa, the tungsten wire electrode was turned on, ...

Embodiment 3

[0088] This embodiment is to deposit AlCrSiCN nanocrystalline amorphous composite coating on the surface of 304 stainless steel.

[0089] Stainless steel sheet pretreatment: Ultrasonic cleaning in acetone and alcohol for 15 minutes respectively.

[0090] Hang the stainless steel sheet on the tooling of the PEMS-3C plasma-enhanced magnetron sputtering coating system, close the vacuum chamber door, and evacuate. The coated targets are Cr targets and CrAl composite targets, both of which have a purity of 99.9 wt%.

[0091] Vacuum down to 1×10 -3 At Pa, the tooling rotation system is turned on at a speed of 3 revolutions per minute. Turn on the heating system, set the temperature to 300°C, until the temperature displayed by the thermocouple sensor in the vacuum chamber is 300°C, stabilize for 10 minutes, and keep the vacuum degree better than 1×10 -3 Pa.

[0092] 200 sccm of argon gas was introduced, the vacuum degree reached 0.8 Pa, the tungsten wire electrode was turned on, ...

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Abstract

The invention belongs to the technical field of machining and manufacturing of cutting tools, and particularly relates to a nanocrystalline amorphous composite coating and a preparation method thereof. According to the nanocrystalline amorphous composite coating and the preparation method thereof, an AlCrSiCN coating with nanocrystalline and amorphous composite is prepared by using an enhanced magnetron sputtering technology, the composite coating is composed of nanocrystalline with the particle size of 10-50nm and amorphous phases distributed around the nanocrystalline, so that the nanocrystalline grains with the nanoscale ensure that the coating has enough hardness, and the amorphous layers have good plasticity; and a large number of nanocrystalline and amorphous interfaces can increase the resistance of micro-crack expansion, so that the coating has high hardness (28-35GPa), high toughness and excellent wear resistance, and the excellent high-temperature resistance of AlCrN is kept, so that the coating has excellent strength and bonding strength; and meanwhile, due to the doping of Si and C, on one hand, the grains are refined, the strength is improved, and on the other hand, the formed carbide amorphous layer can further reduce the friction coefficient of the tool and reduce the friction resistance of the tool.

Description

technical field [0001] The invention belongs to the technical field of cutting tool processing and manufacturing, and in particular relates to a nanocrystalline amorphous composite coating and a preparation method thereof. Background technique [0002] The tool coating acts as a chemical barrier and a thermal barrier, reducing the diffusion and chemical reaction between the tool and the workpiece, thereby reducing the wear of the tool. Therefore, the tool used to cut metal materials generally needs to be coated to improve the use of the tool The function of the coating includes improving the high temperature oxidation resistance of the tool, anti-wear performance, reducing the friction coefficient, etc. [0003] Conventional tool coatings include TiN, TiCN, TiAlN, CrAlN, Al 2 o 3 etc., its preparation technology includes physical vapor deposition and chemical vapor deposition, among which physical vapor deposition is easy to realize the advantages of element diversificatio...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/16C23C14/06B82Y30/00B82Y40/00
CPCC23C14/35C23C14/165C23C14/0641C23C14/0036C23C14/0057B82Y40/00B82Y30/00Y02E60/10
Inventor 黄晓林赵文涛李景斌孙亮
Owner SHENYANG SANJUKAITE CATALYST
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