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Method for manufacturing microtexture friction surface through photoetching

A friction surface and micro-texture technology, which is applied in the field of photolithography and etching to manufacture micro-texture friction surfaces, can solve the problems of different etching processes and no guiding specifications, etc., and achieve great application value, easy processing, and pattern resolution high rate effect

Inactive Publication Date: 2017-03-22
HEFEI UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The current etching process is mainly aimed at semiconductor materials. For other materials, such as the commonly used iron-based anti-friction lubrication materials, there are few reports on the etching process.
Due to the different materials, the etching process is also significantly different. Even for the same material, the etching process is different due to different purposes. In addition, the etching effect is affected and restricted by many factors. At present, there is no guiding specification. Exploring from the simple multiple condition tests in the existing preparation process requires risky systematic tests, so it still belongs to the category of scientific research

Method used

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  • Method for manufacturing microtexture friction surface through photoetching
  • Method for manufacturing microtexture friction surface through photoetching

Examples

Experimental program
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Effect test

Embodiment 1

[0024] Preheat the Q235 cast iron sheet at 100°C for 5 minutes; drop S1813 photoresist on the surface of the cast iron sheet material, then place the material in a spin coater, fix it on a vacuum chuck, and place it in a nitrogen protective atmosphere , rotate at 300rpm for 10s, 900rpm for 10s, and 4000rpm for 60s; pre-bake the obtained material at 110°C for 4min; cover the friction surface with a circular hole template with a diameter of 5mm, and the part that needs texture is a light-transmitting layer, and the rest It is a black light-absorbing layer; expose the friction surface covering the template to 365nm ultraviolet light for 10 minutes; then remove the template, and bake the obtained material at 120°C for 8 minutes; soak the material in a solution of tetramethylammonium hydroxide with a mass concentration of 2%. 2min, rinse in deionized water for 30s; then place it in an environment of 110°C for drying; put the material in a dilute nitric acid solution with a mass conc...

Embodiment 2

[0026] Preheat SAE1020 steel at 110°C for 3 minutes; drop S1813 photoresist on the surface of the cast iron sheet material, then place the material in a spin coater, fix it on a vacuum chuck, and in a nitrogen protective atmosphere, Rotate at 300rpm for 10s, 1000rpm for 10s, and 4000rpm for 60s; pre-bake the obtained material at 120°C for 3min; cover the elliptical (long axis 1.8mm, short axis 0.6mm) hole template on the friction surface, where texture is required Part of it is a light-transmitting layer, and the rest is a black light-absorbing layer; expose the friction surface covering the template to 365nm ultraviolet light for 20 minutes; then remove the template, and bake the obtained material at 125°C for 6 minutes; Soak in methyl ammonium hydroxide solution for 2min, rinse in deionized water for 40s; then place it in an environment of 110°C for drying; put the material in a dilute phosphoric acid solution with a mass concentration of 3% for 4min at 25°C, Take it out and...

Embodiment 3

[0028] Preheat 45 steel at 120°C for 6 minutes; drop S1813 photoresist on the surface of the cast iron sheet material, then place the material in a spin coater, fix it on a vacuum chuck, and in a nitrogen protective atmosphere, Rotate at 300rpm for 10s, 1100rpm for 10s, and 4000rpm for 60s; pre-bake the obtained material at 120°C for 2 minutes; cover the circular hole template with a diameter of 2 microns on the friction surface, and the part that needs texture is a light-transmitting layer, and the rest It is a black light-absorbing layer; expose the friction surface covering the template to 365nm ultraviolet light for 15 minutes; then remove the template, and bake the obtained material at 130°C for 6 minutes; soak the material in a solution of tetramethylammonium hydroxide with a mass concentration of 4%. 2min, rinse in deionized water for 60s; then put it into 120°C environment for drying; put the material into a dilute sulfuric acid solution with a mass concentration of 4% ...

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Abstract

The invention discloses a method for manufacturing a microtexture friction surface through photoetching. The friction performance of the surface can be significantly improved. The method comprises the steps of preheating, photoresist coating, predrying, masking, exposing, baking, developing, hard baking, etching, photoresist removal and the like. According to the method, no large equipment is needed, the process is easy and convenient, patterns are easy to control, and the method has important applications in the field of friction-reducing lubricating materials and the like.

Description

technical field [0001] The invention relates to the field of advanced manufacturing, in particular to a method for manufacturing a micro-textured friction surface by photolithography. Background technique [0002] Friction is one of the most common natural phenomena in nature, and wear caused by friction is the main manifestation of material failure. How to control the friction and wear behavior of materials has always been the goal pursued by researchers. In recent years, it has been found that micro-texturing on the surface of materials can effectively play the role of anti-wear and anti-friction. For example, Etsion has reported the surface friction properties processed by laser surface microtexture method (Tribology Letters, 2004, 17(17): 733-737), and found that compared with the untextured surface, the textured surface load The bearing capacity, wear resistance and anti-friction performance are significantly improved. The main reason is that in the case of lack of oi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23F1/28C23F1/02
CPCC23F1/28C23F1/02
Inventor 徐玉福彭玉斌泰索·威尔福瑞德阿布拉汗·拉莎尤涛胡献国
Owner HEFEI UNIV OF TECH
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