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Cu doped Fe-N soft magnetic thin film and preparation method thereof

A soft magnetic thin film, fe-n technology, applied in the application of magnetic film to substrate, magnetic layer, inorganic material magnetism, etc., can solve the problems of poor thermal stability of magnetic properties, reduction of coercive force, and incompatibility of saturation magnetization To achieve low coercive force, high saturation magnetization and easy composition control

Active Publication Date: 2016-07-13
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Purpose of the invention: The purpose of the present invention is to provide a Cu-doped Fe-N soft magnetic film, which solves the problems of reducing the coercive force and improving the saturation magnetization and the thermal stability of the magnetic properties of most F-N series soft magnetic films. The shortcoming of poor property; Another object of the present invention is to provide the preparation method of this soft magnetic thin film

Method used

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preparation example Construction

[0024] The preparation method of Cu-doped Fe-N soft magnetic film adopts the FJL-560a dual-chamber magnetron and ion beam composite sputtering deposition system, and prepares Fe-N film by magnetron sputtering double-target co-sputtering. The sputtering process In, pass into Ar and N 2 The mixed gas, adjust the process parameters, obtain Fe-N soft magnetic film with low coercive force and high saturation magnetization. It mainly includes the following steps:

[0025] 1) Cleaning of the substrate material: first use acetone to ultrasonically clean to remove surface organic matter; then use anhydrous ethanol to ultrasonically clean to remove surface impurities (dust, cotton fibers, etc.), and finally blow dry with nitrogen; make sure the surface of the substrate material is clean Finally, put it into the designated sample holder, press it tightly with the pins around it, turn the sample holder upside down, and shake it slightly. After confirming that it is firm, put the sample h...

Embodiment 1

[0032] Both Fe and Cu targets are sputtered vertically, the sample is located directly above the Fe target, and Cu atoms are scattered and doped. Fe adopts radio frequency incidence, and the power is 100W, and Cu adopts direct current incidence, and the power is 30W. The sample stage bias for magnetron sputtering was 0V. The sputtering atmosphere is Ar and N 2 The flow ratio is 30:0.25, and the sputtering pressure is 0.5Pa. The sputtering time was 5 minutes. The obtained composition is (Fe 67 N 33 ) 89 Cu 11 film. The film thickness is 93nm, the coercive force is 1.65Oe, the saturation magnetization is 1675emu / cc, and it is stable in the temperature range of 0-450°C.

Embodiment 2

[0034] Both Fe and Cu targets are sputtered vertically, the sample is located directly above the Fe target, and Cu atoms are scattered and doped. Fe adopts radio frequency incidence, and the power is 200W, and Cu adopts direct current incidence, and the power is 60W. The sample stage bias for magnetron sputtering was -50V. The sputtering atmosphere is Ar and N 2 The flow ratio is 30:0.25, and the sputtering pressure is 0.5Pa. The sputtering time was 10 minutes. The obtained composition is (Fe 72 N 28 ) 83 Cu 17 film. The film thickness is 205nm, the coercive force is 8.3Oe, the saturation magnetization is 1364emu / cc, and it is stable in the temperature range of 0-600°C.

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Abstract

The invention discloses a Cu doped Fe-N soft magnetic thin film, and belongs to the technical field of soft magnetic thin films.The chemical general formula of the Cu doped Fe-N soft magnetic thin film is (Fe100-yNy)100-xCux, wherein y ranges from 25 to 40, and x ranges from 9 to 18.The invention further discloses a preparation method of the Cu doped Fe-N soft magnetic thin film.The Cu doped Fe-N soft magnetic thin film and the preparation method thereof have the following advantages that a reaction magnetron sputtering method is adopted for preparing the Cu doped Fe-N soft magnetic thin film, the preparation process is simple, ingredient control is easy, and the method is a basic process method for industrially producing the thin film; copper is wide in source and low in cost, and the product is environmentally friendly and free of pollution; the soft magnetic thin film with low coercive force (not larger than 10 Oe) and high saturated magnetization intensity (larger than or equal to 1,200 emu / cc) can be obtained, and magnetism is stable within the temperature range of 0-600 DEG C.

Description

technical field [0001] The invention belongs to the technical field of soft magnetic thin films, and in particular relates to a Cu-doped Fe-N soft magnetic thin film and a preparation method thereof. Background technique [0002] In today's society, the continuous development of electronic information technology requires electronic components to develop in the direction of high frequency and integration, which puts forward higher requirements for the core material of electronic components - soft magnetic materials. The definition of soft magnetic material is a magnetic material with coercive force ≤ 8kA / m (ie coercive force ≤ 10Oe). At present, high magnetic permeability, high saturation magnetization, low coercive force, and high stability are the main pursuit directions of soft magnetic materials. [0003] Iron-nitride compounds have attracted widespread attention in the early days due to their excellent corrosion resistance and wear resistance. In subsequent studies, it...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01F10/18H01F1/34H01F41/18
CPCH01F1/34H01F10/18H01F41/18
Inventor 陈瑾梅张旭海董岩何美平陈龙杨星梅莫丹曾宇乔蒋建清
Owner SOUTHEAST UNIV
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