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Method for obtaining super-smooth surface low-sub-surface-damage crystal

A technology of sub-surface damage and ultra-smooth surface, applied in the direction of working carrier, grinding device, grinding machine tool, etc., to achieve the effect of reducing process cost, process stability and strong pertinence

Inactive Publication Date: 2015-04-29
TONGJI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This type of crystal is generally soft in texture (Mohs hardness is about 6.5). Traditional polishing methods can easily leave small scratches on the crystal surface or only have a smooth surface, but many scratches and damages remain on the subsurface layer below the surface layer.
At present, there are no scientific research institutions in China that have given a detailed polishing process for YCOB and other similar crystals and methods for removing subsurface damage and scratches.

Method used

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  • Method for obtaining super-smooth surface low-sub-surface-damage crystal
  • Method for obtaining super-smooth surface low-sub-surface-damage crystal
  • Method for obtaining super-smooth surface low-sub-surface-damage crystal

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] Grinding and polishing of YCOB crystals:

[0030] 1. Grinding --- Fix the YCOB crystal on the loading plate with paraffin, and stick a protective sheet around the crystal. The crystal is ground on a cast iron plate, with boron carbide as the abrasive W1, and ground on a Nanjing Lisheng double-axis precision grinding and polishing machine JM 030.2. The surface morphology of the crystal is as follows figure 1 shown. This can ensure the grinding speed while reducing the depth of the damaged layer and shorten the subsequent polishing time. On the double-axis polishing machine, the self-made clamping tool is used to avoid the crystal sagging caused by the unbalanced moment when the axis is moving, so as to ensure the crystal surface shape is good.

[0031] 2. Make the rubber plate --- select No.55 asphalt from GUGOLZ company in Switzerland and put it on the loading plate, fix a circle of tape around it, gradually increase the heating temperature, and try to avoid stirring ...

Embodiment 2

[0038] A method for obtaining ultra-smooth surface and low subsurface damage crystal, the method comprises the following steps:

[0039] (1) Grinding: Paste a protective sheet around the crystal, fix the crystal on the abrasive tool with paraffin, then clamp the crystal with a clamping tool, and use boron carbide with a specification of W1 as the abrasive on a two-axis precision grinding and polishing machine. And cooperate with the cast iron disc to grind the crystal, quickly remove the damage layer caused by the previous process, so that the crystal surface has a good shape and the flatness reaches the standard;

[0040] (2) Coarse polishing: After preparing the asphalt disk and correcting the surface type and roughness of the asphalt disk, use a cerium oxide polishing solution with a particle size of 1 μm to mechanically polish the crystal on the asphalt disk until the surface roughness of the crystal reaches 1nm or basically no scratches , wherein, the temperature of rough...

Embodiment 3

[0046] A method for obtaining ultra-smooth surface and low subsurface damage crystal, the method comprises the following steps:

[0047] (1) Grinding: Paste a protective sheet around the crystal, fix the crystal on the abrasive tool with paraffin, then clamp the crystal with a clamping tool, and use boron carbide with a specification of W1 as the abrasive on a two-axis precision grinding and polishing machine. And cooperate with the cast iron disc to grind the crystal, quickly remove the damage layer caused by the previous process, so that the crystal surface has a good shape and the flatness reaches the standard;

[0048] (2) Coarse polishing: After preparing the asphalt disk and correcting the surface type and roughness of the asphalt disk, use a cerium oxide polishing solution with a particle size of 1 μm to mechanically polish the crystal on the asphalt disk until the surface roughness of the crystal reaches 1nm or basically no scratches , wherein the temperature of rough ...

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Abstract

The invention relates to a method for obtaining super-smooth surface low-sub-surface-damage crystal. The method includes the following steps: (1) grinding crystal on a cast iron disc by using boron carbide with the specification as W1 as a grinding material; (2) polishing the crystal on an asphalt disc by using cerium oxide polishing liquid with the particle size as 1 mum; (3) soaking the crystal surface in an organic solvent and processing for 30-60 seconds in an ultrasonic mode; (4) polishing the crystal for 10-15 minutes on a polyurethane polishing gasket by using silicon dioxide polishing liquid with the particle size as 100 nm; (5) placing the crystal in the organic solvent, washing for 30-60 seconds in an ultrasonic mode, and observing the surface topography of the crystal by using a high-power microscope; and (6) if the crystal surface still has scratches, repeating the step (2) to step (5), replacing the cerium oxide polishing liquid with the particle size as 1 mum in the step (2) with cerium oxide polishing liquid with the particle size as 100-300 nm. Compared with the prior art, the method is simple to operate, high in processing efficiency and convenient to popularize.

Description

technical field [0001] The invention relates to a crystal ultra-smooth precision processing method, in particular to a method for obtaining a crystal with an ultra-smooth surface and low subsurface damage. Background technique [0002] Technologies such as high-energy ultra-short pulse lasers require crystals such as YCOB, KDP, and LBO to have good surface roughness for easy coating. When strong lasers are incident, they must not cause damage to the laser due to defects such as scratches or trachoma on the crystal surface. Absorption, scattering. Therefore, in addition to ensuring the roughness of the crystal surface to the Angstrom level, it is necessary to control the number of scratches on the crystal subsurface as much as possible. This type of crystal is generally soft in texture (Mohs hardness is about 6.5). Traditional polishing methods can easily leave small scratches on the surface of the crystal or only have a smooth surface, but many scratches remain on the subsu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B37/04B24B37/30
Inventor 朱杰张志萌王占山
Owner TONGJI UNIV
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