Composite surface treatment process for preparing amorphous-nanocrystalline molybdenum disilicide base abrasion resistant and corrosion resistant coatings on titanium alloy surfaces
A composite surface treatment, molybdenum disilicide technology, applied in metal material coating process, coating, ion implantation plating and other directions, can solve problems such as poor corrosion resistance
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Embodiment 1
[0026] A composite surface treatment process for preparing an amorphous-nanocrystalline molybdenum disilicide-based wear-resistant and corrosion-resistant coating on the surface of a titanium alloy. The steps are:
[0027] a. First, double-cathode plasma sputtering deposition is carried out. The process parameters are as follows: target voltage 800V, workpiece voltage 400V, distance between target and workpiece 25mm, working pressure 40Pa, deposition temperature 800℃;
[0028] b. Then perform ion nitriding, the process parameters are as follows: workpiece voltage 800V, nitriding temperature 500°C, working pressure 35Pa, nitrogen partial pressure 0.5 Pa; ion nitriding time 1.5 hours;
[0029] c. Type of sputtering target: Mo 0.3 (Si 0.9 ,Al 0.1 ) 0.7 ;
[0030] d. The type of workpiece material: titanium alloy.
[0031] figure 1 The composition ratio prepared by the hot isostatic pressing process is Mo 0.3 (Si 0.90 ,Al 0.10 ) 0.7 The powder metallurgy sintered plat...
Embodiment 2
[0035] The composite surface treatment process of preparing amorphous-nanocrystalline molybdenum disilicide-based wear-resistant and corrosion-resistant coating on the surface of titanium alloy. The main preparation process steps are: a. First, double-cathode plasma sputtering deposition is carried out. The process parameters are as follows: target voltage 1000 V, the workpiece voltage is 450 V, the distance between the target and the workpiece is 30 mm, the working pressure is 45Pa, and the deposition temperature is 650°C; b. Then ion nitriding is carried out, and the process parameters are as follows: the workpiece voltage is 850V, the nitriding temperature is 600°C, and the working pressure is 45Pa , nitrogen partial pressure 1 Pa; ion nitriding time 2 hours; c. The type of sputtering target: Mo 0.3 (Si 0.90 ,Al 0.10 ) 0.7 ; d. The type of workpiece material: titanium alloy. The properties of the resulting coating were slightly lower than in Example 1.
[0036]
Embodiment 3
[0038] The composite surface treatment process of preparing amorphous-nanocrystalline molybdenum disilicide-based wear-resistant and corrosion-resistant coating on the surface of titanium alloy. The main preparation process steps are: a. First, double-cathode plasma sputtering deposition is carried out. The process parameters are as follows: target voltage 500 V, workpiece voltage 300V, distance between target and workpiece 10mm, working pressure 20Pa, deposition temperature 450°C; Partial pressure 0.1Pa; ion nitriding time 1 hour; c. Type of sputtering target: Mo 0.3 (Si 0.90 ,Al 0.10 ) 0.7 ; d. The type of workpiece material: titanium alloy. The properties of the resulting coating were slightly lower than in Example 1.
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