Plasma separating chip and preparation method thereof

A plasma separation and chip technology, applied in the field of microelectromechanical systems, can solve the problems of high consumption of sample biochemical reagents, restricting the development of biochemical analysis, and difficulty in realizing automation, and achieves the effects of compact structure, reduced total area, and short time consumption.

Inactive Publication Date: 2012-08-29
PEKING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, as an indispensable part of the system, pretreatment technologies such as sample separation have developed relatively slowly, and have become the bottleneck in the entire analysis process, which restricts the development of biochemical analysis.
Existing sample pretreatment technologies are often implemented off-chip, and most of them have disadvantages such as time-consuming, labor-intensive, difficult to automate, poor precision, and large consumption of samples and other biochemical reagents, and are often the main cause of measurement errors
The traditional sample separation technology can no longer meet the needs of the development of μTAS (Micro total analysis system), it is necessary to develop a new micro separation technology

Method used

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  • Plasma separating chip and preparation method thereof
  • Plasma separating chip and preparation method thereof
  • Plasma separating chip and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0060] Embodiment 1: Process a chip on a silicon wafer

[0061] The structure of this embodiment refers to the attached figure 1 , see the appendix for the process flow figure 2 .

[0062] 1) Silicon wafer structure process:

[0063] (a) processing and cleaning the silicon wafer 8;

[0064] (b) Throwing the photoresist 9 on the front side of the silicon wafer, pre-baking, photolithography, developing, and post-baking;

[0065] (c) In-depth etching (ICP) of about 100 μm of silicon on the front side of the silicon wafer to form a microfluidic channel 4, a microcolumn array separator 1, a sample inlet 2, and two sample outlets 3 and 4;

[0066] 2) Cover slip polymer process:

[0067] (d) process and clean the silicon wafer 8, and apply a release agent 10 on its surface;

[0068] (e) Pour the bubble-free silicon rubber photoresist (PDMS) 11 into the petri dish, let it stand for flattening, and then bake it in an oven at 80°C for about 1 hour;

[0069] (f) The cured PDMS11 ...

Embodiment 2

[0071] Example 2: Process chips with polymers

[0072] The structure of this embodiment refers to the attached figure 1 , see the appendix for the process flow image 3 .

[0073] 1) Process flow of polymer structure:

[0074] (a) processing and cleaning the silicon wafer 8;

[0075] (b) Throwing the photoresist 9 on the front side of the silicon wafer, pre-baking, photolithography, developing, and post-baking;

[0076] (c) In-depth etching (ICP) of about 100 μm of silicon on the front side of the silicon wafer to form microfluidic channels 4, gradient channels, sample inlets and sample outlets;

[0077] (d) Process and clean the silicon structure mold 13, and apply a release agent 10 on its surface, pour the bubble-free PDMS 11 on the silicon structure mold 13, and let it stand for flattening, then bake in an oven at 80°C Bake for about 1 hour;

[0078] (e) peel off the cured PDMS from the silicon mold 13, and cut each unit;

[0079] 2) Cover slip polymer process:

[...

Embodiment 3

[0084] Example 3: Sandwich structure

[0085] The structure of this embodiment refers to the attached figure 1 , see the appendix for the process flow Figure 4 .

[0086] (a) processing and cleaning the silicon wafer 8;

[0087] (b) Throwing the photoresist 9 on the front side of the silicon wafer, pre-baking, photolithography, developing, and post-baking;

[0088] (c) In-depth etching (ICP) silicon about 50 μm on the front side of the silicon wafer to form microfluidic channels 5, 6 and gradient channels (similar to method 1 structure);

[0089] (d) the front side of the silicon wafer is anodically bonded to the glass 14;

[0090] (e) Thinning the silicon wafer on the back side of the silicon glass sheet after bonding, the method of dry method, wet method or CMP can be adopted;

[0091] (f) Photoresist removal on the back of the silicon wafer, pre-baking, photolithography, development, and post-baking;

[0092] (g) Deeply etch the inlet and outlet sample ports;

[009...

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Abstract

The invention discloses a plasma separating chip, and belongs to the field of micro electro mechanical systems. The chip is provided with a micro spiral fluid channel, and a centre around which the micro fluid channel bypasses is provided with a sample inlet; the inner side at a certain position of the micro fluid channel is connected with another concentric micro spiral fluid channel; a plurality of gradient channels are arranged between the two micro spiral fluid channels; and the two micro spiral fluid channels are connected with two different sample outlets. A mixture of different sizes of cells or particles is injected through the sample inlet of the plasma separating chip by a micro pump or an injection pump; and the cells and plasma in the blood are separated into two different circulation channels by inertial characteristics of the fluid and a pressure difference between the inner and outer channels. The plasma separating chip has a compact structure; the total area of the chip is reduced, and the separating efficiency is improved; and time is short in the separating process of the chip.

Description

technical field [0001] The invention belongs to the field of micro-electro-mechanical systems, and in particular relates to a blood plasma separation chip and a chip preparation method for separation, detection and analysis of biological samples. Background technique [0002] The 21st century is an era of interdisciplinary development, especially the development of biochips and biochemical detection technology. Sensing technology is an important means of information acquisition, and using sensing technology to obtain biological sample information is an important content of the development of biological detection technology. [0003] BioMEMS (biological micro-electro-mechanical systems) technology, which combines biotechnology and micro-electro-mechanical systems (MEMS) technology, can realize continuous, integrated, miniature , so as to obtain the so-called micro-full analysis system. The system includes sample injection, separation, reaction and detection. In a broad sens...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N35/00B81C1/00
Inventor 李志宏耿照新王玮鞠衍睿张灵倩
Owner PEKING UNIV
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