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Corrosion resistant material, and its production method

A technology of corrosion-resistant materials and manufacturing methods, which is applied in the direction of metal material coating process, coating, superimposed layer plating, etc., can solve the problems of phosphorus fluoride pollution gas, etc., achieve less pollution gas generation, good resistance Excellent wear, durability, and corrosion resistance

Inactive Publication Date: 2008-06-04
RESONAC HOLDINGS CORPORATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] However, since the corrosion-resistant material disclosed in Document 4 has a structure in which a nickel fluoride layer is directly formed on the nickel alloy layer on the surface of the base material, if the corrosion-resistant material is used in contact with fluorine gas or the like, there may be some differences depending on the conditions. Differently, the nickel alloy layer as the lower layer is further fluorinated, which causes the problem of polluting gases such as phosphorus fluoride

Method used

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  • Corrosion resistant material, and its production method
  • Corrosion resistant material, and its production method
  • Corrosion resistant material, and its production method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0061] After pickling and pretreatment of the base material stainless steel (SUS316L), dip into the electroless plating bath (composition: nickel sulfate (20g / L), hypophosphorous acid (20g / L), complexing agent (appropriate amount), stabilizer ( Appropriate amount), brightener (appropriate amount), pH 4.5, temperature 90° C.) to make it react for a predetermined time, and a nickel-phosphorus alloy layer is formed on the surface of the stainless steel.

[0062] In the normal-pressure flow-through reaction furnace, the substrate on which the nickel-phosphorus alloy layer has been formed is loaded into the furnace, and after pre-treatment for firing at 200° C. for 1 hour under reduced pressure, the temperature is raised to 500°C.

[0063] Forced oxidation of the nickel-phosphorous alloy layer was then carried out at this temperature for 12 hours. Then, the temperature was lowered while replacing the oxygen in the reaction furnace with nitrogen. Introduce 20% F when the temperatu...

Embodiment 2

[0065] After the stainless steel (SUS316L) of the base material is pickled and pre-treated, it is immersed in an electroless plating bath (composition: nickel sulfate (30g / L), dimethylamino boron (5g / L), complexing agent (appropriate amount), stabilizer (appropriate amount), brightening agent (appropriate amount), pH 7.0, temperature 65°C) for a predetermined time, and a nickel-boron alloy layer was formed on the surface of the stainless steel.

[0066] In the normal-pressure flow-through reaction furnace, the substrate on which the nickel-boron alloy layer has been formed is loaded into the furnace, and after pre-treatment for firing at 200° C. for 1 hour under reduced pressure, the temperature is raised to 500°C.

[0067] Forced oxidation of the nickel-boron alloy layer was then carried out at this temperature for 12 hours. Then, the temperature was lowered while replacing the oxygen in the reaction furnace with nitrogen. Introduce 20% F when the temperature drops to 250°C...

Embodiment 3

[0069] After the stainless steel (SUS316L) of the base material is pickled and pre-treated, it is immersed in an electroless plating bath (composition: nickel sulfate (15g / L), sodium tungstate (20g / L), hypophosphorous acid (20g / L), Mixture (appropriate amount), stabilizer (appropriate amount), brightening agent (appropriate amount), pH9.0, temperature 85 ℃) to make it react for a predetermined time, forming a nickel-phosphorus-tungsten alloy layer on the surface of the stainless steel.

[0070] In an atmospheric pressure flow-through reaction furnace, the substrate on which the nickel-phosphorus-tungsten alloy layer has been formed is loaded into the furnace, and after pre-treatment for firing at 200°C for 1 hour under reduced pressure, oxygen (99.999%) is introduced into the furnace. The temperature was raised to 500°C.

[0071] Forced oxidation of the nickel-phosphorus-tungsten alloy layer was then carried out at this temperature for 12 hours. Then, the temperature was lowe...

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Abstract

This invention provides a corrosion resistant material which is excellent in corrosion resistance to halogen based corrosive gas, e.g., used for a semiconductor production process, has satisfactory durability in a fluoride passive layer, and has reduced generation in contaminated gas on use, and to provide its production method. The corrosion resistant material consists of a nickel layer or a nickel alloy layer formed on the surface of a base material consisting of metal or the like, a nickel oxide layer formed on the surface thereof and a nickel fluoride layer formed on the surface of the nickel oxide layer.

Description

technical field [0001] The present invention relates to a corrosion-resistant material having a corrosion-resistant film formed on the surface of a substrate such as metal, plastic, or ceramics. More specifically, the present invention relates to a corrosion-resistant material having a fluorinated passivation layer excellent in corrosion resistance against halogen-based corrosive gases used in semiconductor manufacturing processes, and a method for producing the same. Background technique [0002] Various halogen-based gases are used in the dry etching process and chamber dry cleaning in the semiconductor manufacturing process. When these halogen gases contain moisture in their gas atmosphere, hydrolysis produces highly corrosive acids such as hydrogen chloride or hydrogen fluoride, causing corrosion of materials constituting storage containers, piping, supply equipment, reaction chambers, etc. used to process these gases. [0003] If corrosion occurs in this way, there wil...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C28/00
CPCC23C28/345C23C28/00C23C28/321C23C28/322
Inventor 田口裕康儿玉孝德
Owner RESONAC HOLDINGS CORPORATION
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