34results about How to "Improve axial resolution" patented technology

The invention relates to a full parameter detection apparatus of a polished surface quality of an optical element and a detection method thereof. According to an existing polished surface quality parameter detection method and an apparatus thereof, a surface quality of an evaluated region can not be reflected really. According a technical scheme employed in the invention, a full parameter detection apparatus of a polished surface quality of an optical element is provided; the apparatus comprises a light source excitation system, a white light interference system, a laser confocal detection system, a computer, a CCD camera, a pinhole photoelectric detector and signal processing unit, a diaphragm photoelectric detector and signal processing unit and a three dimensional scanning and control unit; the light source excitation system is formed by a laser excitation system and a broadband light source excitation system, wherein optical paths of the laser excitation system and the broadband light source excitation system are vertical; and the CCD camera, the pinhole photoelectric detector and signal processing unit, the diaphragm photoelectric detector and signal processing unit and the three dimensional scanning and control unit are respectively connected with the computer. Moreover, the white light interference system is arranged between the broadband light source excitation system and the CCD camera; and the laser confocal detection system is arranged between the laser excitation system and the pinhole photoelectric detector and signal processing unit and the diaphragm photoelectric detector and signal processing unit. According to the invention, a surface quality of an evaluated region can be reflected effectively and really.

The invention belongs to the technical field of optical precision measurement, relating to super-resolution laser polarization differential confocal imaging method and device. The method improves the transverse resolution power by combining a radial polarized light and a pupil filtering technology, improves the axial resolution power by using a differential subtraction detection technology of an axial-offset dual-detector system and remarkably improves the spatial resolution power and tomography ability of the system. The device comprises a laser source as well as a beam expander, a polarization state modulation system, a pupil filter and a spectroscope which are sequentially arranged at a transmitting end of the laser source, an objective and a sample which are arranged in the transmitted light direction of the spectroscope in turn, and a differential confocal system in the opposite direction of the reflected light direction of the spectroscope. The invention combines the radial polarized light resolution technology with the pupil filtering technology and improves the transverse resolution power of the system; moreover, the differential work mode of the invention can remarkably improve the axial imaging ability of the system and is applicable to the high-precision detection and metering of nanometer-level geometrical parameters in the nanometer manufacturing field.

The invention belongs to the technical field of optical precise measurement and relates to a super-resolution double-shaft differential confocal measuring method and a super-resolution double-shaft differential confocal measuring device. In the method and the device, pupil filtering technology is fused in a double-shaft confocal measuring structure, and a differential treatment method is used forreceiving a measured light beam and carrying out treatment, thereby achieving the aims of improving resolution, expanding working distance, improving anti-interference capability and improving linearrange. The invention can be used for precise measurement in such fields as micro-electronics, materials, industrial precise detection, biomedicine, etc.

The invention relates to a line scanning differential confocal measuring device based on a light path of a pillar lens, belonging to the field of a microcosmic measurement technique. The line scanning differential confocal measuring device provided by the invention can be used for solving the problem of low measurement efficiency when the three-dimensional measurement is carried out by a differential confocal detection technique. In the line scanning differential confocal measuring device provided by the invention, laser beams generated by a laser device are gathered in a pinhole through a focusing lens, expanded through a collimation and beam expansion lens after being filtered and then emitted to a first spectroscope through a rectangular diaphragm; the transmitted light beams of the first spectroscope are emitted to a detection focusing pillar lens; the line focusing is formed on the image focusing plane of the detection focusing pillar lens; after the light beams which are reflected by a sample to be measured are transmitted through the detection focusing pillar lens, the light beams which pass through the first spectroscope are emitted to a second spectroscope; and after passing through a first collecting pillar lens, the transmitted light beams of the second spectroscope are subjected to line focusing to reach the photosensitive surface of a first linear array point detector. The line scanning differential confocal measuring device provided by the invention is suitable for differential confocal detection.

The invention belongs to the technical field of optical imaging and detection, and relates to a bilateral fitting confocal measurement method. This method respectively uses a section of data on both sides of the confocal system characteristic curve itself to fit the curve equations and subtract them to obtain a new curve equation. By solving the solution of the new curve equation, the extreme of the confocal system characteristic curve is obtained. Value point location. The present invention fits two sections of data that are very sensitive to axial displacement near the FWHM position of the confocal characteristic curve, so the extreme point position of the confocal microscopic characteristic curve deduced by the data section is different from that of the existing Compared with the top fitting method of the confocal characteristic curve, the sensitivity is greatly improved, and it is more suitable for the processing of the asymmetric confocal characteristic curve in actual measurement. The invention will provide a brand-new measurement processing method in the field of confocal imaging / detection.