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Multi-logic-state storage unit of multi-vortex ferroelectric domain and power regulation and control method

A storage unit and logic state technology, applied in the field of information storage, can solve the problems of ferroelectric vortex domains returning to their original state and being unable to be preserved, and achieving the effect of improving storage density and realizing miniaturization

Pending Publication Date: 2021-11-02
FOSHAN GREEN INTELLIGENT MFG RES INST OF XIANGTAN UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the researchers found that applying force perpendicular to the axis of the ferroelectric vortex domains can temporarily erase the ferroelectric vortex domains, this state cannot be preserved after the force is removed, and the ferroelectric vortex domains will return to their original shape.

Method used

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  • Multi-logic-state storage unit of multi-vortex ferroelectric domain and power regulation and control method
  • Multi-logic-state storage unit of multi-vortex ferroelectric domain and power regulation and control method
  • Multi-logic-state storage unit of multi-vortex ferroelectric domain and power regulation and control method

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Embodiment 1

[0097] In Embodiment 1, the multi-logic state memory cell of the multi-vortex ferroelectric domain, the substrate 1 is Si, and the transition layer 2 is SrTiO 3 , the lower electrode 3 is SrRuO 3 , ferroelectric layer 4 is PbZr 0.2 Ti 0.8 o 3 , dielectric and ferroelectric periodic multilayer composite film layer 5 is (SrTiO 3 / PbZr 0.2 Ti 0.8 o 3 ) 3 , and the upper electrode 6 is Pt. The main process of its realization is:

[0098] a) Fabrication of 100 nm transition layer SrTiO on Si substrate by atomic layer deposition 3 .

[0099] b) Using atomic layer deposition on the transition layer SrTiO 3 Preparation of 15 nm bottom electrode SrRuO 3 .

[0100] c) SrRuO on the bottom electrode using atomic layer deposition 3 Preparation of 5 nm ferroelectric layer PbZr 0.2 Ti 0.8 o 3 .

[0101] d) SrRuO on the bottom electrode using atomic layer deposition 3 Alternately prepare dielectric and ferroelectric periodic multilayer composite thin film layers, repeating ...

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Abstract

The invention discloses a multi-logic-state storage unit of a multi-vortex ferroelectric domain and a power regulation and control method. The storage unit comprises a substrate, a transition layer, a lower electrode, a ferroelectric layer, a dielectric and ferroelectric periodic multilayer composite film layer and an upper electrode which are sequentially arranged from bottom to top. And the state of the multi-logic-state storage unit of the multi-vortex ferroelectric domain is determined according to the remaining polarization directions in the ferroelectric layer, the dielectric and ferroelectric periodic multilayer composite film layer and the magnitude of the applied force perpendicular to the substrate. According to the power regulation and control method, the logic state in the storage unit is determined by utilizing the conductivity of the multi-logic-state storage unit of the multi-vortex ferroelectric domain after the electric power is applied, the storage density of the ferroelectric memory is effectively improved, the stored logic state can be identified based on the magnitude of the read current, the process of reading the logic state does not affect the stored data, non-destructive reading is realized, and the nanoscale size of the ferroelectric vortex domain is beneficial to the miniaturization of the ferroelectric memory.

Description

technical field [0001] The invention relates to the field of information storage, in particular to a multi-logic state storage unit with multi-vortex ferroelectric domains and a power regulation method. Background technique [0002] Capacitor-based ferroelectric memory uses the spontaneous polarization of ferroelectric materials for data storage, which has the advantages of radiation resistance, fatigue resistance, and good retention. It has important applications in spacecraft, aircraft black boxes, and high-speed rail. However, the ferroelectric memory based on the capacitor structure often involves the phenomenon of polarization reversal in some storage cells during the data reading process, which will destroy the data written in the storage cells. In order to ensure the re-readability of the data, A rewrite operation is also required. This mode greatly increases the volume of the device unit and the complexity of the circuit, which is not conducive to the miniaturizatio...

Claims

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Application Information

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IPC IPC(8): H01L45/00G11C11/22
CPCG11C11/225H10N70/881
Inventor 侯鹏飞欧阳晓平陈诚
Owner FOSHAN GREEN INTELLIGENT MFG RES INST OF XIANGTAN UNIV
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