Multi-logic-state storage unit of multi-vortex ferroelectric domain and power regulation and control method
A storage unit and logic state technology, applied in the field of information storage, can solve the problems of ferroelectric vortex domains returning to their original state and being unable to be preserved, and achieving the effect of improving storage density and realizing miniaturization
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[0097] In Embodiment 1, the multi-logic state memory cell of the multi-vortex ferroelectric domain, the substrate 1 is Si, and the transition layer 2 is SrTiO 3 , the lower electrode 3 is SrRuO 3 , ferroelectric layer 4 is PbZr 0.2 Ti 0.8 o 3 , dielectric and ferroelectric periodic multilayer composite film layer 5 is (SrTiO 3 / PbZr 0.2 Ti 0.8 o 3 ) 3 , and the upper electrode 6 is Pt. The main process of its realization is:
[0098] a) Fabrication of 100 nm transition layer SrTiO on Si substrate by atomic layer deposition 3 .
[0099] b) Using atomic layer deposition on the transition layer SrTiO 3 Preparation of 15 nm bottom electrode SrRuO 3 .
[0100] c) SrRuO on the bottom electrode using atomic layer deposition 3 Preparation of 5 nm ferroelectric layer PbZr 0.2 Ti 0.8 o 3 .
[0101] d) SrRuO on the bottom electrode using atomic layer deposition 3 Alternately prepare dielectric and ferroelectric periodic multilayer composite thin film layers, repeating ...
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