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Preparation method of compact dodecacalcium heptaaluminate ceramic rotating target material

A dodecacalcium, rotating target technology, applied in metal material coating process, vacuum evaporation plating, coating and other directions, can solve the problems of difficult preparation, poor conductivity, etc., and achieve good conductivity, high density, and organizational structure. uniform effect

Pending Publication Date: 2021-06-11
广州市尤特新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a method for preparing a dense calcium dodecaaluminate ceramic rotating target, so as to solve the problems of poor electrical conductivity and difficult preparation of the current ceramic rotating target

Method used

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  • Preparation method of compact dodecacalcium heptaaluminate ceramic rotating target material
  • Preparation method of compact dodecacalcium heptaaluminate ceramic rotating target material
  • Preparation method of compact dodecacalcium heptaaluminate ceramic rotating target material

Examples

Experimental program
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Effect test

preparation Embodiment 1

[0056] Mix α-alumina and calcium carbonate according to the ratio of calcium and aluminum elements in dodecaaluminate heptaaluminate, and carry out solid-state reaction at a temperature of 1000°C and a reaction time of 5 hours to prepare superfine particles with a particle size of 0.1-1 μm. oxide powder. The superfine oxide powder is mixed with water and dispersant, and ball milled to obtain a preliminary slurry with a particle size of 0.1-0.42 μm. In this embodiment, the solid content of the preliminary slurry accounts for 40% by mass. Vinyl butyral (PVB) was then added to the preliminary slurry and mixed well for granulation.

[0057] In this example, the slurry was spray-granulated by spray granulation method, and then the granules were sieved by ultrasonic vibrating sieve to obtain solid particles of 50 μm-120 μm. The screened solid particles of 50 μm-120 μm were calcined at 600° C. for 6 hours at a high temperature. After calcination, the solid particles were converted i...

preparation Embodiment 2

[0059] Aluminum hydroxide and calcium carbonate are mixed according to the content ratio of calcium and aluminum elements in dodecacalcium heptaaluminate, and after a solid phase reaction is carried out at a temperature of 1200°C and a reaction time of 3 hours, an ultrafine particle size of 0.1-1 μm is prepared. oxide powder. The superfine oxide powder is mixed with water and dispersant, and ball milled to obtain a preliminary slurry with a particle size of 0.1-0.42 μm. In this embodiment, the solid content of the preliminary slurry accounts for 60% by mass. Then polyvinyl butyral (PVB) was added to the preliminary slurry and mixed uniformly for granulation.

[0060] In this example, the slurry was spray-granulated by spray granulation method, and then the granules were sieved by ultrasonic vibrating sieve to obtain solid particles of 50 μm-120 μm. The solid particles of 50 μm-120 μm obtained by screening are subjected to high-temperature calcination at 1300° C. for 2 hours. ...

preparation Embodiment 3

[0062] Mix α-alumina and calcium hydroxide according to the content ratio of calcium and aluminum elements in dodecaaluminate heptaaluminate, and carry out solid-state reaction at a temperature of 1300°C and a reaction time of 2 hours to prepare ultra-fine particles with a particle size of 0.1-1 μm fine oxide powder. Mix ultrafine oxide powder with water and dispersant, and ball mill to obtain a preliminary slurry with a particle size of 0.1-0.42 μm. In this embodiment, the solid content of the preliminary slurry accounts for 60% by mass. Then polyvinyl butyral (PVB) was added to the preliminary slurry and mixed uniformly for granulation.

[0063] In this example, the slurry was spray-granulated by spray granulation method, and then the granules were sieved by ultrasonic vibrating sieve to obtain solid particles of 50 μm-120 μm. The screened solid particles of 50 μm-120 μm were subjected to high-temperature calcination at 1000° C. for 5 hours. After calcination, the solid par...

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Abstract

The invention relates to magnetron sputtering target material processing, and belongs to the field of material processing. A dodecacalcium heptaaluminate ceramic rotating target material is prepared by the following steps: firstly, obtaining oxide powder by solid-phase reaction, carrying out ball milling on the powder to prepare slurry, adding a binder, carrying out spray granulation on the slurry, carrying out screening to obtain solid particles of 50-120 microns, carrying out high-temperature calcination on the solid particles to obtain compact solid particles, namely dodecacalcium heptaaluminate ceramic particles, and the dodecacalcium heptaaluminate ceramic rotating target material is prepared with the dodecacalcium heptaaluminate ceramic particles by adopting a plasma spraying process. The dodecacalcium heptaaluminate ceramic rotating target material prepared by the process is high in compactness (the relative density can reach 95% at most), high in purity (greater than or equal to 99.9%), uniform in organization structure, good in conductivity, and adjustable in spraying thickness (3-15 mm) and length (less than or equal to 4,000 mm); and the target material further has the remarkable advantages of high product yield, high powder utilization rate, easiness in large-scale production and the like.

Description

technical field [0001] The invention relates to a magnetron sputtering target material and a processing method thereof, in particular to a method for preparing a dense heptaaluminate calcium dodecaaluminate ceramic rotating target material. Background technique [0002] Mayenite electron compound [Ca 24 Al 28 o 64 ] 4+ :4e - (C12A7:e - ) as a highly potential transparent conductive oxide has set off a research boom since it entered people's field of vision in 2002, and its preparation technology and application have achieved considerable development in just a few years. Compared with other electronic compounds, it has better chemical stability and can exist stably in the air below 450°C. In addition, the unique nano-cage structure of C12A7:e- makes it have low work function, good resistance to ion bombardment and controllable electrical properties, so it is widely used in the fields of vacuum electronic devices, catalytic chemical reactions and superconductivity. It h...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C04B35/44C04B35/622C23C4/11C23C4/134
CPCC23C14/35C23C14/3414C23C4/134C23C4/11C04B35/44C04B35/62222
Inventor 杨永添张扬吴健许积文
Owner 广州市尤特新材料有限公司
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