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Array laser based on waveguide grating coupler and preparation method thereof

A grating coupler and waveguide grating technology, applied in the laser field, can solve the problems of high device cost and large volume, and achieve the effect of cost advantage, excellent production yield and process applicability

Inactive Publication Date: 2021-04-20
BEIJING UNIV OF TECH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0005] The invention provides an array laser based on a waveguide grating coupler and a preparation method thereof, which are used to solve the defects of high device cost and large volume in the prior art, and realize a low-cost, small-volume array laser

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  • Array laser based on waveguide grating coupler and preparation method thereof
  • Array laser based on waveguide grating coupler and preparation method thereof
  • Array laser based on waveguide grating coupler and preparation method thereof

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preparation example Construction

[0066] The embodiment of the present invention proposes a preparation method of a two-dimensional waveguide grating coupler, such as Figure 5 to Figure 12 As shown, the steps include:

[0067] 110, using RIE (Reactive Ion Etching) to etch a vertical coupling waveguide hole in the waveguide base layer;

[0068] 120. Using ICPCVD to grow Si on the surface of quartz glass after etching the vertical coupling waveguide hole 3 N 4 , to fill the previously etched holes to form a vertical coupling waveguide;

[0069] 130, using a polishing process to polish off the excess Si grown on the surface of the quartz glass in the previous step 3 N 4 , so that the quartz glass is exposed, and at the same time it can flatten the glass surface.

[0070] 140, again using the ICPCVD process to grow a layer of Si with precise thickness and flatness on the flat quartz glass 3 N 4 As a transverse coupling waveguide layer;

[0071] 150, using RIE to etch a transverse coupling waveguide;

[0...

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Abstract

The invention provides an array laser based on a waveguide grating coupler and preparation method thereof. The array laser comprises an N-type injection electrode Au / Ge / Ni / Au, an N-type GaAs substrate, a lower DBR with Al<0.1>Ga<0.9>As / Al<0.9>Ga<0.1>As alternately growing, a quantum well active region Al<0.2>Ga<0.8>Al<0.12>In<0.18>Ga<0.7>As, an oxidation current limiting layer Al<0.98> / Ga<0.02>As, an upper DBR with Al<0.1>Ga<0.9>As / Al<0.9>Ga<0.1>As alternately growing, a SiO<2> passivation layer, a P-type injection electrode Ti / Au, an ultraviolet curable adhesive, a waveguide substrate, a vertical coupling waveguide; a lateral coupling waveguide layer; a two-dimensional diffraction grating. And the waveguide grating coupler is utilized to reduce the overall spectral line width. The preparation of the waveguide layer is realized without secondary epitaxy, the preparation cost is reduced, and the production yield is improved.

Description

technical field [0001] The invention relates to the field of laser technology, in particular to an array laser based on a waveguide grating coupler and a preparation method thereof. Background technique [0002] As the power requirements for laser light sources are getting higher and higher, connecting multiple lasers in parallel to form an array laser has gradually become a popular technical means to increase laser power. However, since the array laser is arranged in a certain way by a plurality of relatively independently working laser units and then works as a whole to achieve higher output power, this multi-unit independent work also brings a new level to the array light source The problem: each laser unit in the array laser cannot be coherently coupled to each other due to the resonant cavity. This problem makes each unit of the array laser may emit multiple laser beams of different wavelengths due to the heat dissipation environment and its own process differences. Th...

Claims

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Application Information

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IPC IPC(8): H01S5/42H01S5/125H01S5/187H01S5/183H01S5/042G02B6/132G02B6/42G02B6/43
Inventor 关宝璐黎豪
Owner BEIJING UNIV OF TECH
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