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Comb tooth micro-accelerometer capable of resisting high-g-value impact, and preparation method thereof

A technology of micro-accelerometer and accelerometer, which is applied in the direction of measuring acceleration, speed/acceleration/shock measurement, impedance network, etc., can solve the problems of restricting the quality and efficiency of military ammunition weapon systems, poor working stability, and low precision. Achieve the effect of having stress release ability, reducing quality and improving quality factor

Active Publication Date: 2020-10-13
XI AN JIAOTONG UNIV
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  • Abstract
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Problems solved by technology

[0002] Micromachined accelerometers are an important part of MEMS inertial sensors. Compared with traditional accelerometers, microaccelerometers have the advantages of small size, light weight, low cost, and compatibility with integrated circuit technology, so they are widely used in automobiles and Consumer electronics and other fields, but in the field of domestic military weapons and guidance, there are often deficiencies in the application process of accelerometers, such as low accuracy, poor working stability, and poor impact resistance, which seriously restrict the development of military ammunition and weapon systems. quality and efficiency

Method used

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  • Comb tooth micro-accelerometer capable of resisting high-g-value impact, and preparation method thereof
  • Comb tooth micro-accelerometer capable of resisting high-g-value impact, and preparation method thereof
  • Comb tooth micro-accelerometer capable of resisting high-g-value impact, and preparation method thereof

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Embodiment Construction

[0049] The present invention is described in further detail below in conjunction with accompanying drawing:

[0050] refer to Figure 1 to Figure 5 , the comb-tooth micro-accelerometer of the high-g impact resistance of the present invention comprises a bottom surface layer 10, a substrate 11 and a silicon micro-accelerometer device layer arranged on the substrate 11, wherein the silicon micro-accelerometer device layer comprises the first A fixed anchor block 3, a movable mass block 6 and a second fixed anchor block 7; the first fixed anchor block 3 is located on the left side of the movable mass block 6, and the second fixed anchor block 7 is located on the right side of the movable mass block 6 , wherein, a first stop block and a first support beam are arranged between the first fixed anchor block 3 and the movable mass block 6, and a second stop block is arranged between the second fixed anchor block 7 and the movable mass block 6 Block 9 and the second support beam 8; th...

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Abstract

The invention discloses a comb tooth micro-accelerometer capable of resisting high-g-value impact, and a preparation method thereof. A first fixed anchor block is located on the left side of a movablemass block, a second fixed anchor block is located on the right side of the movable mass block, a first stop block and a first supporting beam are arranged between the first fixed anchor block and the movable mass block, and a second stop block and a second supporting beam are arranged between the second fixed anchor block and the movable mass block. The first supporting beam and the second supporting beam are each of a U-shaped folding structure. One end of the first supporting beam is fixed on the first fixed anchor block; the other end of the first supporting beam is fixed on the left sidesurface of the movable mass block; one end of the second supporting beam is fixed to the second fixed anchor block, the other end of the second supporting beam is fixed to the right side face of themovable mass block, the first stop block is fixed to the first fixed anchor block, and the second stop block is fixed to the second fixed anchor block. The accelerometer has high stability and high gvalue impact resistance.

Description

technical field [0001] The invention belongs to the field of sensor design and preparation technology and anti-shock technology, and relates to a comb-tooth micro-accelerometer and a preparation method thereof which can resist high-g impact. Background technique [0002] Micromachined accelerometers are an important part of MEMS inertial sensors. Compared with traditional accelerometers, microaccelerometers have the advantages of small size, light weight, low cost, and compatibility with integrated circuit technology, so they are widely used in automobiles and Consumer electronics and other fields, but in the field of domestic military weapons and guidance, there are often deficiencies in the application process of accelerometers, such as low accuracy, poor working stability, and poor impact resistance, which seriously restrict the development of military ammunition and weapon systems. quality and efficiency. Compared with other types of micro-accelerometers, capacitive acc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125B81B7/02B81C1/00
CPCG01P15/125B81B7/02B81C1/00015G01P2015/0862B81B2201/0235
Inventor 田边江山刘江江张仲凯林启敬蒋庄德
Owner XI AN JIAOTONG UNIV
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