Adjustable dual-control optical switch based on near-zero dielectric constant indium tin oxide and using method

A technology of indium tin oxide and indium tin oxide layer, applied in optics, nonlinear optics, instruments, etc., can solve the problems of less involvement of all-optical response devices, limited working conditions, etc., and achieve convenient integrated application and fast response time , The effect of simple production process

Active Publication Date: 2022-08-09
PEKING UNIV SHENZHEN GRADUATE SCHOOL
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the research on indium tin oxide with near-zero dielectric constant mainly focuses on its electrical properties, and the all-optical response devices based on nonlinear optical response are rarely involved.
In terms of optical switches, only the research on electrical modulation or optical modulation is concentrated, which limits its actual working conditions.

Method used

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  • Adjustable dual-control optical switch based on near-zero dielectric constant indium tin oxide and using method
  • Adjustable dual-control optical switch based on near-zero dielectric constant indium tin oxide and using method
  • Adjustable dual-control optical switch based on near-zero dielectric constant indium tin oxide and using method

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Effect test

Embodiment 1

[0032] This embodiment provides an adjustable dual-control optical switch based on near-zero dielectric constant indium tin oxide. As shown in FIG. 1 , the length of the gold layer 2 is 450 nm, the width is 50 nm, and the thickness is 100 nm; The length of 3 is 450 nm, the width is 50 nm, and the thickness is 23 nm; the thickness of indium tin oxide nano-thin layer 4 is 4 nm; the thickness of hafnium dioxide layer 5 is 50 nm; the material of metal electrode 6 is gold. In this embodiment, as shown in FIG. 1( d ), the metal electrodes 6 are in the shape of a square frame and are correspondingly close to the outer sides of the four sides of the hafnium dioxide layer 5 for applying a uniform gate voltage 7 .

[0033] Under the normal incidence of linearly polarized light, the plasmon resonance mode excited by the gold layer 2 is strongly coupled with the near-zero dielectric constant mode excited by the cross-shaped indium tin oxide layer 3, so that the transmittance spectrum occur...

Embodiment 2

[0037] This embodiment provides a method for all-optical modulation of a near-zero dielectric constant indium tin oxide-based tunable dual-control optical switch under the irradiation of pump light. The cross-shaped indium tin oxide 3 and the indium tin oxide nano-thin layer 4 are irradiated with the pump light at a certain angle under the condition that the linearly polarized light is vertically incident. At this time, due to the huge optical nonlinear effect of indium tin oxide, the transmittance spectrum changes, thereby realizing the function of the optical switch. like Figure 5 shown at an intensity of 5GW / cm 2 Under the irradiation of the pump light of , the position of the short-wavelength transmittance recesses blue-shifts, and the transmittance increases. When the angle of the pump light is gradually increased, the position of the short-wavelength transmittance recess will be blue-shifted, and the transmittance will also gradually increase. Therefore, when a certa...

Embodiment 3

[0039] This embodiment provides an adjustable dual-control optical switch 1 based on near-zero dielectric constant indium tin oxide, which can also work simultaneously under two conditions of electrical control and pump light irradiation according to actual needs. When the function of the optical switch is realized by changing the carrier concentration of indium tin oxide through the gate voltage 7 at the selected operating wavelength, the tunable dual-control optical switch 1 can be continuously irradiated with pump light, In order to obtain a greater depth of opening, make up for the deficiencies in practical applications.

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Abstract

The invention discloses an adjustable double-control optical switch based on near-zero dielectric constant indium tin oxide and a method for using the same. The transmission spectrum of the structure can be adjusted by means of external voltage or pump light irradiation, so as to adjust the switching of different wavelengths. / off ratio, so it can be adjusted according to the actual situation; the optical switch has a simple manufacturing process and is compatible with the existing CMOS process, and can be produced on a large scale using an integrated process, reducing the production cost; the optical switch has nano-scale integration The size is convenient for technicians to carry out integrated applications; it has the characteristics of ultra-fast response time, works at the communication wavelength, and has broad application prospects; it has excellent performance and has a large switching depth and modulation range.

Description

technical field [0001] The invention belongs to the technical field, and in particular relates to an adjustable dual-control optical switch based on near-zero dielectric constant indium tin oxide and a method of using the same. Background technique [0002] As an indispensable part of high-speed optical networks and integrated optical devices, optical switches have a wide range of applications in the field of optical communications. Optical switches have excellent performance such as low power consumption, high efficiency, ultra-fast response speed and integrated size, which cannot be matched by traditional electronic switches. At present, the design schemes of optical opening include photonic crystal nanocavities, surface plasmons, metamaterials, and microring resonators. However, the challenges in the application of optical switches mainly come from the materials that make up themselves, including non-tunable materials, narrow spectral application range, low response spee...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/35G02F1/355
CPCG02F1/3515G02F1/355
Inventor 李倩谢泽韬吴嘉野
Owner PEKING UNIV SHENZHEN GRADUATE SCHOOL
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