Three-dimensional integrated millimeter wave AiP phased array element
A three-dimensional integration, millimeter-wave technology, applied in the direction of electrical components, antenna arrays, radiation element structure, etc., can solve the problems of low energy efficiency, backward packaging structure, high power consumption, etc., to achieve controllable collapse height, high integration, and low loss low effect
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Embodiment 1
[0040] combine figure 1 , a three-dimensional integrated millimeter-wave AiP phased array element of the present invention uses a combination of silicon-based semiconductor packaging technology and glass-based micro-nano processing technology to vertically interconnect the millimeter-wave antenna and multilayer functional circuits in the Z-axis direction . From top to bottom: millimeter wave microstrip patch antenna array layer 1, antenna feed network layer 2, millimeter wave signal transmitting and receiving circuit layer 3, millimeter wave signal three-dimensional vertical transmission layer 4, millimeter wave circuit shielding layer 5 , Power division network and digital signal layer 6 and bottom BGA signal input layer 7.
[0041] Such as figure 2 As shown, the number of millimeter-wave microstrip patch antenna elements is N×N, N≥2, and glass with low loss and low dielectric constant is used as the radiation substrate. The glass micro-nano processing technology includes ...
Embodiment 2
[0049] Such as figure 1 As shown, a new three-dimensional integrated millimeter-wave AiP phased array element, its design architecture includes high-gain millimeter-wave microstrip antenna array, antenna feed network, millimeter-wave signal transmitting and receiving circuit, three-dimensional vertical transmission circuit, different channels Shielding design, power division network and digital chip circuit and fine-pitch BGA port design.
[0050] Such as figure 2 As shown, the millimeter-wave microstrip patch antenna array is formed by 2×2=4 glass-based radiating elements. The array is a rectangular square array, and the feeding mode of space coupling is adopted. The air cavity is etched on the glass substrate by laser to realize the high gain, high efficiency and high bandwidth of the 2×2 rectangular antenna array. The glass with cavity and the glass with pattern metallization are bonded together by wafer-level bonding. The antenna and the feed are interconnected using a...
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