A kind of micro-equipment and method for grinding single-crystal diamond micro-blade

Abstract

The invention discloses miniature equipment for grinding monocrystal diamond micro blades. The equipment comprises a workpiece feeding device and a shaft sleeve and shaft transmission feeding device.The workpiece feeding device comprises a clamp and a driving device for driving the clamp to move transversely and longitudinally, and a to-be-machined monocrystal diamond is clamped on the clamp. Theshaft sleeve and shaft transmission feeding device comprises a case, a miniature grinding wheel and a planetary gear transmission system in the case. The invention further discloses a method for grinding the monocrystal diamond micro blades by the miniature equipment for grinding the monocrystal diamond micro blades. According to the method, an easy-to-grind direction of a crystal surface is determined by a laser positioning device, detected information is transmitted to a control system in real time, and the control system controls actions of the workpiece feeding device and the shaft sleeveand shaft transmission feeding device to realize grinding of the micro blades. By the equipment and the method, micro-nano ultra-precision grinding of the micro blades of monocrystal diamond tools can be realized.

Description

technical field [0001] The invention belongs to the field of ultra-precision grinding, in particular to a micro-equipment and method for grinding single-crystal diamond micro blades. Background technique [0002] In ultra-precision machining, in addition to high-precision machine tools and ultra-stable working environments, high-quality cutting tools are also an important aspect to ensure the quality of the machined surface. Single crystal diamond is considered to be the most ideal ultra-precision grinding tool because of its high hardness, good wear resistance, high strength, low friction coefficient with non-ferrous metals, excellent corrosion resistance and stable chemical properties. [0003] Diamond grinding technology plays a very important role in the convenience of ultra-precision machining, and the quality of diamond tool grinding will be a key factor in the realization of nanoscale machining. As far as the existing technology is concerned, it is difficult to fine-t...

AI Technical Summary

Problems solved by technology

[0003] Diamond grinding technology plays a very important role in the convenience of ultra-precision machining, and the quality of diamond tool grinding will be a key factor in the realization of nanoscale machining. As far as the existing technology is concerned, it is difficult to fine-tune the micro-edge of single crystal diamond tools. High-precision processing, because the large fixtures and machine tools used in the traditional processing industry cannot reach the order of magnitude required for micro-nano parts

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